DE69030512T2 - Antriebsvorrichtung für Ultraschallmotor - Google Patents
Antriebsvorrichtung für UltraschallmotorInfo
- Publication number
- DE69030512T2 DE69030512T2 DE69030512T DE69030512T DE69030512T2 DE 69030512 T2 DE69030512 T2 DE 69030512T2 DE 69030512 T DE69030512 T DE 69030512T DE 69030512 T DE69030512 T DE 69030512T DE 69030512 T2 DE69030512 T2 DE 69030512T2
- Authority
- DE
- Germany
- Prior art keywords
- drive device
- ultrasonic motor
- ultrasonic
- motor
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
- H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
- H02N2/145—Large signal circuits, e.g. final stages
- H02N2/147—Multi-phase circuits
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1282278A JPH03145976A (ja) | 1989-10-30 | 1989-10-30 | 超音波モータの駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69030512D1 DE69030512D1 (de) | 1997-05-22 |
DE69030512T2 true DE69030512T2 (de) | 1997-07-24 |
Family
ID=17650354
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69030200T Expired - Fee Related DE69030200T2 (de) | 1989-10-30 | 1990-10-26 | Antriebsvorrichtung für Ultraschallmotor |
DE69030512T Expired - Fee Related DE69030512T2 (de) | 1989-10-30 | 1990-10-26 | Antriebsvorrichtung für Ultraschallmotor |
DE69025031T Expired - Fee Related DE69025031T2 (de) | 1989-10-30 | 1990-10-26 | Antriebsvorrichtung für Ultraschallmotor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69030200T Expired - Fee Related DE69030200T2 (de) | 1989-10-30 | 1990-10-26 | Antriebsvorrichtung für Ultraschallmotor |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69025031T Expired - Fee Related DE69025031T2 (de) | 1989-10-30 | 1990-10-26 | Antriebsvorrichtung für Ultraschallmotor |
Country Status (4)
Country | Link |
---|---|
US (1) | US5173631A (de) |
EP (3) | EP0426042B1 (de) |
JP (1) | JPH03145976A (de) |
DE (3) | DE69030200T2 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6411008B1 (en) * | 1919-09-11 | 2002-06-25 | Canon Kabushiki Kaisha | Drive device for vibration type motor and image forming apparatus |
JPH04200282A (ja) * | 1990-11-29 | 1992-07-21 | Nikon Corp | 超音波モータの駆動装置 |
JP3165701B2 (ja) * | 1991-03-06 | 2001-05-14 | キヤノン株式会社 | 振動波モーター |
JP2972010B2 (ja) * | 1992-01-08 | 1999-11-08 | キヤノン株式会社 | 振動型アクチュエーター駆動制御装置 |
JPH05273361A (ja) * | 1992-03-24 | 1993-10-22 | Seiko Instr Inc | 超音波モータ付電子機器 |
US5939847A (en) * | 1992-08-07 | 1999-08-17 | Nikon Corporation | Drive control device for ultrasonic motors |
JPH06178556A (ja) * | 1992-12-10 | 1994-06-24 | Asmo Co Ltd | 超音波モータの駆動回路 |
US5563464A (en) * | 1993-02-09 | 1996-10-08 | Olympus Optical Co., Ltd. | Circuit for rotating ultrasonic motor |
JPH07170772A (ja) * | 1993-10-21 | 1995-07-04 | Seiko Instr Inc | 超音波モータおよび超音波モータ付電子機器 |
US5670852A (en) * | 1994-01-18 | 1997-09-23 | Micropump, Inc. | Pump motor and motor control |
DE69517232T2 (de) * | 1994-03-23 | 2000-10-26 | Nikon Corp | Ultraschallmotor |
FR2721154B1 (fr) * | 1994-06-08 | 1996-07-05 | Moulinex Sa | Circuit d'alimentation d'un moteur piézo-électrique. |
FR2724787B1 (fr) * | 1994-09-16 | 1997-01-24 | Crouzet Automatismes | Machine a ondes acoustiques de surface |
JPH08116685A (ja) * | 1994-10-17 | 1996-05-07 | Canon Inc | 振動波モータ |
US5619089A (en) * | 1994-10-31 | 1997-04-08 | Seiko Instruments Inc. | Ultrasonic motor and electronic apparatus provided with an ultrasonic motor |
MY120661A (en) * | 1994-11-18 | 2005-11-30 | Sony Corp | Method and apparatus for control of a supersonic motor |
JP3402816B2 (ja) * | 1994-12-22 | 2003-05-06 | キヤノン株式会社 | 超音波モータの駆動回路 |
DE19529667C2 (de) * | 1995-08-11 | 1998-07-16 | Siemens Ag | Anordnung zur Ansteuerung eines ersten und eines zweiten piezoelektrischen Aktors |
JPH0984365A (ja) * | 1995-09-18 | 1997-03-28 | Canon Inc | 振動型アクチュエーター装置 |
US5945768A (en) * | 1997-05-08 | 1999-08-31 | Alliedsignal Inc. | Piezoelectric drive circuit |
DE19942269A1 (de) * | 1999-09-04 | 2001-03-08 | Philips Corp Intellectual Pty | Piezoelektrische Antriebsvorrichtung |
DE10158584A1 (de) | 2001-11-29 | 2003-07-03 | Philips Intellectual Property | Piezoelektrische Antriebsvorrichtung und ein Regelverfahren für eine piezoelektrische Antriebsvorrichtung |
CN101686022B (zh) * | 2008-09-24 | 2012-03-28 | 无锡华润矽科微电子有限公司 | 一种超声电机驱动电路 |
KR20120114214A (ko) * | 2009-11-25 | 2012-10-16 | 신포니아 테크놀로지 가부시끼가이샤 | 제진 장치 및 이것을 구비한 차량 |
JP5885380B2 (ja) | 2010-01-28 | 2016-03-15 | キヤノン株式会社 | 振動波駆動装置の駆動制御装置及び駆動制御方法 |
JP5506552B2 (ja) | 2010-06-07 | 2014-05-28 | キヤノン株式会社 | 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法 |
CN101964601B (zh) * | 2010-09-19 | 2012-08-08 | 河南科技大学 | 一种带低频控制的对称pwm控制信号发生器 |
JP5679781B2 (ja) * | 2010-11-26 | 2015-03-04 | キヤノン株式会社 | 振動型アクチュエータの制御装置 |
JP2014018027A (ja) | 2012-07-11 | 2014-01-30 | Canon Inc | 振動型アクチュエータ、撮像装置、及びステージ |
JP5843911B2 (ja) * | 2014-03-20 | 2016-01-13 | キヤノン株式会社 | 装置及び振動型アクチュエータの駆動方法 |
JP6672055B2 (ja) * | 2016-04-22 | 2020-03-25 | 株式会社トプコン | 超音波モータの制御方法及びそのための測量機 |
US10071400B2 (en) * | 2016-06-20 | 2018-09-11 | Texas Instruments Incorporated | Ultrasonic lens cleaning with travelling wave excitation |
US10606069B2 (en) | 2016-08-01 | 2020-03-31 | Texas Instruments Incorporated | Ultrasound lens structure cleaner architecture and method |
US10838199B2 (en) | 2016-12-30 | 2020-11-17 | Texas Instruments Incorporated | Ultrasound lens structure cleaner architecture and method using standing and traveling waves |
CN112152505B (zh) * | 2020-05-27 | 2021-11-16 | 北京机械设备研究所 | 超声波电机的驱动电路及调速方法 |
CN117471150B (zh) * | 2023-10-26 | 2024-04-30 | 南京航达超控科技有限公司 | 一种超声电机孤极归一化整定电路 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3975650A (en) * | 1975-01-30 | 1976-08-17 | Payne Stephen C | Ultrasonic generator drive circuit |
JPS59111609A (ja) * | 1982-12-17 | 1984-06-27 | Nippon Kogaku Kk <Nikon> | レンズ鏡筒 |
JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
JPH072023B2 (ja) * | 1985-04-26 | 1995-01-11 | 株式会社ニコン | 超音波モータの駆動回路 |
SU1357915A1 (ru) * | 1985-07-04 | 1987-12-07 | Предприятие П/Я В-8670 | Импульсный регул тор положени пьезодвигател |
KR900007413B1 (ko) * | 1986-08-26 | 1990-10-08 | 마쯔시다덴기산교 가부시기가이샤 | 초음파 모우터구동 방법 |
US4970656A (en) * | 1986-11-07 | 1990-11-13 | Alcon Laboratories, Inc. | Analog drive for ultrasonic probe with tunable phase angle |
JPS6450771A (en) * | 1987-08-20 | 1989-02-27 | Matsushita Electric Ind Co Ltd | Ultrasonic motor driving device |
JPH01185174A (ja) * | 1988-01-11 | 1989-07-24 | Canon Inc | 振動波モータの駆動回路 |
JP2637467B2 (ja) * | 1988-05-06 | 1997-08-06 | キヤノン株式会社 | 振動型アクチュエーター装置 |
US4879528A (en) * | 1988-08-30 | 1989-11-07 | Olympus Optical Co., Ltd. | Ultrasonic oscillation circuit |
-
1989
- 1989-10-30 JP JP1282278A patent/JPH03145976A/ja active Pending
-
1990
- 1990-10-23 US US07/601,677 patent/US5173631A/en not_active Expired - Fee Related
- 1990-10-26 EP EP90120618A patent/EP0426042B1/de not_active Expired - Lifetime
- 1990-10-26 DE DE69030200T patent/DE69030200T2/de not_active Expired - Fee Related
- 1990-10-26 EP EP94103600A patent/EP0603163B1/de not_active Expired - Lifetime
- 1990-10-26 DE DE69030512T patent/DE69030512T2/de not_active Expired - Fee Related
- 1990-10-26 EP EP94103599A patent/EP0603162B1/de not_active Expired - Lifetime
- 1990-10-26 DE DE69025031T patent/DE69025031T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69030200D1 (de) | 1997-04-17 |
DE69030200T2 (de) | 1997-06-19 |
US5173631A (en) | 1992-12-22 |
EP0603163B1 (de) | 1997-04-16 |
EP0603162A1 (de) | 1994-06-22 |
DE69025031T2 (de) | 1996-05-30 |
EP0426042A1 (de) | 1991-05-08 |
EP0603163A1 (de) | 1994-06-22 |
JPH03145976A (ja) | 1991-06-21 |
EP0426042B1 (de) | 1996-01-24 |
DE69025031D1 (de) | 1996-03-07 |
DE69030512D1 (de) | 1997-05-22 |
EP0603162B1 (de) | 1997-03-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |