DE69024719D1 - Gasverteilungssystem und Verfahren zur Benutzung dieses Systems - Google Patents

Gasverteilungssystem und Verfahren zur Benutzung dieses Systems

Info

Publication number
DE69024719D1
DE69024719D1 DE69024719T DE69024719T DE69024719D1 DE 69024719 D1 DE69024719 D1 DE 69024719D1 DE 69024719 T DE69024719 T DE 69024719T DE 69024719 T DE69024719 T DE 69024719T DE 69024719 D1 DE69024719 D1 DE 69024719D1
Authority
DE
Germany
Prior art keywords
gas distribution
distribution system
gas
distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024719T
Other languages
English (en)
Other versions
DE69024719T2 (de
Inventor
Joseph F Salfelder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69024719D1 publication Critical patent/DE69024719D1/de
Application granted granted Critical
Publication of DE69024719T2 publication Critical patent/DE69024719T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31105—Etching inorganic layers
    • H01L21/31111—Etching inorganic layers by chemical means
    • H01L21/31116—Etching inorganic layers by chemical means by dry-etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
DE69024719T 1989-08-14 1990-08-07 Gasverteilungssystem und Verfahren zur Benutzung dieses Systems Expired - Fee Related DE69024719T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US39315389A 1989-08-14 1989-08-14

Publications (2)

Publication Number Publication Date
DE69024719D1 true DE69024719D1 (de) 1996-02-22
DE69024719T2 DE69024719T2 (de) 1996-10-02

Family

ID=23553500

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69024719T Expired - Fee Related DE69024719T2 (de) 1989-08-14 1990-08-07 Gasverteilungssystem und Verfahren zur Benutzung dieses Systems

Country Status (5)

Country Link
US (1) US5451290A (de)
EP (1) EP0413239B1 (de)
JP (1) JPH03175627A (de)
KR (1) KR0160288B1 (de)
DE (1) DE69024719T2 (de)

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US5021121A (en) * 1990-02-16 1991-06-04 Applied Materials, Inc. Process for RIE etching silicon dioxide
US5880036A (en) 1992-06-15 1999-03-09 Micron Technology, Inc. Method for enhancing oxide to nitride selectivity through the use of independent heat control
TW347460B (en) * 1995-11-29 1998-12-11 Applied Materials Inc Flat bottom components and flat bottom architecture for fluid and gas systems
US6007673A (en) * 1996-10-02 1999-12-28 Matsushita Electronics Corporation Apparatus and method of producing an electronic device
JP4147608B2 (ja) * 1998-03-06 2008-09-10 東京エレクトロン株式会社 熱処理装置
JP2001102309A (ja) * 1998-04-09 2001-04-13 Tokyo Electron Ltd ガス処理装置
US6335292B1 (en) * 1999-04-15 2002-01-01 Micron Technology, Inc. Method of controlling striations and CD loss in contact oxide etch
TW477009B (en) * 1999-05-26 2002-02-21 Tadahiro Ohmi Plasma process device
KR100500246B1 (ko) 2003-04-09 2005-07-11 삼성전자주식회사 가스공급장치
US7097714B2 (en) * 2003-09-17 2006-08-29 Intersil Americas Inc. Particulate removal from an electrostatic chuck
US6983892B2 (en) * 2004-02-05 2006-01-10 Applied Materials, Inc. Gas distribution showerhead for semiconductor processing
KR20050089516A (ko) * 2004-03-05 2005-09-08 학교법인 성균관대학 전자석이 구비된 반도체 식각용 중성빔 소오스
EP1970468B1 (de) * 2007-03-05 2009-07-15 Applied Materials, Inc. Beschichtungsanlage und Gasleitungssystem
US20080216958A1 (en) * 2007-03-07 2008-09-11 Novellus Systems, Inc. Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Methods for Manufacturing the Same
JP6043046B2 (ja) * 2010-08-12 2016-12-14 東京エレクトロン株式会社 エッチングガスの供給方法及びエッチング装置
US9111728B2 (en) 2011-04-11 2015-08-18 Lam Research Corporation E-beam enhanced decoupled source for semiconductor processing
US8900403B2 (en) 2011-05-10 2014-12-02 Lam Research Corporation Semiconductor processing system having multiple decoupled plasma sources
US9177756B2 (en) * 2011-04-11 2015-11-03 Lam Research Corporation E-beam enhanced decoupled source for semiconductor processing
US9109754B2 (en) 2011-10-19 2015-08-18 Applied Materials, Inc. Apparatus and method for providing uniform flow of gas
US8955547B2 (en) 2011-10-19 2015-02-17 Applied Materials, Inc. Apparatus and method for providing uniform flow of gas
KR101253462B1 (ko) 2012-10-22 2013-04-10 재 욱 한 진열대용 수직프레임 및 이를 이용한 다용도 조립식 진열대
US9353440B2 (en) 2013-12-20 2016-05-31 Applied Materials, Inc. Dual-direction chemical delivery system for ALD/CVD chambers
JP2017152531A (ja) * 2016-02-24 2017-08-31 東京エレクトロン株式会社 基板処理方法
TW202020218A (zh) 2018-09-14 2020-06-01 美商應用材料股份有限公司 用於多流前驅物配分劑量的裝置
TW202115815A (zh) * 2019-10-04 2021-04-16 美商應用材料股份有限公司 用於易碎板以防止破裂的氣體分配組件安裝
CN115287630B (zh) * 2022-08-04 2024-03-26 长鑫存储技术有限公司 一种半导体器件制备装置及制备方法

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FR2376904A1 (fr) * 1977-01-11 1978-08-04 Alsthom Atlantique Procede d'attaque d'une couche mince par decomposition d'un gaz dans un plasma
US4209357A (en) * 1979-05-18 1980-06-24 Tegal Corporation Plasma reactor apparatus
US4339297A (en) * 1981-04-14 1982-07-13 Seiichiro Aigo Apparatus for etching of oxide film on semiconductor wafer
US4436534A (en) * 1982-11-08 1984-03-13 Seguy Bernard R Method for reducing desorbent consumption in recovery systems
JPS59114825A (ja) * 1982-12-22 1984-07-03 Fujitsu Ltd プラズマエツチング方法及び装置
US4595434A (en) * 1983-09-15 1986-06-17 American Can Company Collapsible dispensing tube with an orifice sealed with multi-layer sealant sheet material
JPS61163640A (ja) * 1985-01-14 1986-07-24 Hitachi Ltd ドライエツチング装置
JPS61208222A (ja) * 1985-03-13 1986-09-16 Hitachi Ltd プラズマ処理方法及び装置
US4617079A (en) * 1985-04-12 1986-10-14 The Perkin Elmer Corporation Plasma etching system
US4612077A (en) * 1985-07-29 1986-09-16 The Perkin-Elmer Corporation Electrode for plasma etching system
JPS62210623A (ja) * 1986-03-11 1987-09-16 Hitachi Electronics Eng Co Ltd 気相反応装置用電極
JPH0680642B2 (ja) * 1986-05-30 1994-10-12 東京エレクトロン山梨株式会社 放電加工用電極
JP2544121B2 (ja) * 1986-11-25 1996-10-16 東京エレクトロン 株式会社 アッシング装置
JPS63142634A (ja) * 1986-12-05 1988-06-15 Oki Electric Ind Co Ltd 半導体製造装置
US4960488A (en) * 1986-12-19 1990-10-02 Applied Materials, Inc. Reactor chamber self-cleaning process
JPS63303061A (ja) * 1987-06-02 1988-12-09 Anelva Corp 真空装置
US4838990A (en) * 1987-07-16 1989-06-13 Texas Instruments Incorporated Method for plasma etching tungsten
US5006520A (en) * 1987-10-13 1991-04-09 Yoshitomi Pharmaceutical Industries, Ltd. Fused pyrazole compounds and pharmaceutical use thereof
JPH01149964A (ja) * 1987-12-04 1989-06-13 Furukawa Electric Co Ltd:The プラズマｃｖｄ装置用シャワー電極
US4820371A (en) * 1987-12-15 1989-04-11 Texas Instruments Incorporated Apertured ring for exhausting plasma reactor gases
KR970003885B1 (ko) * 1987-12-25 1997-03-22 도오교오 에레구토론 가부시끼 가이샤 에칭 방법 및 그 장치
JP2768685B2 (ja) * 1988-03-28 1998-06-25 株式会社東芝 半導体装置の製造方法及びその装置
US4859304A (en) * 1988-07-18 1989-08-22 Micron Technology, Inc. Temperature controlled anode for plasma dry etchers for etching semiconductor
JPH02101740A (ja) * 1988-10-11 1990-04-13 Anelva Corp プラズマエッチング装置
US4949068A (en) * 1988-11-28 1990-08-14 John Johnston Motorcycle sound simulator for a child's toy
DE3914065A1 (de) * 1989-04-28 1990-10-31 Leybold Ag Vorrichtung zur durchfuehrung von plasma-aetzverfahren
JPH035767A (ja) * 1989-06-02 1991-01-11 Ricoh Co Ltd 画像形成装置

Also Published As

Publication number Publication date
EP0413239A2 (de) 1991-02-20
EP0413239A3 (en) 1991-12-11
US5451290A (en) 1995-09-19
KR0160288B1 (ko) 1999-02-01
JPH03175627A (ja) 1991-07-30
EP0413239B1 (de) 1996-01-10
KR910005408A (ko) 1991-03-30
DE69024719T2 (de) 1996-10-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee