DE69015135D1 - Verfahren zum Herstellen eines Kondensators für DRAM-Zelle. - Google Patents
Verfahren zum Herstellen eines Kondensators für DRAM-Zelle.Info
- Publication number
- DE69015135D1 DE69015135D1 DE69015135T DE69015135T DE69015135D1 DE 69015135 D1 DE69015135 D1 DE 69015135D1 DE 69015135 T DE69015135 T DE 69015135T DE 69015135 T DE69015135 T DE 69015135T DE 69015135 D1 DE69015135 D1 DE 69015135D1
- Authority
- DE
- Germany
- Prior art keywords
- capacitor
- manufacturing
- dram cell
- dram
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003990 capacitor Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/954—Making oxide-nitride-oxide device
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/443,897 US5116776A (en) | 1989-11-30 | 1989-11-30 | Method of making a stacked copacitor for dram cell |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69015135D1 true DE69015135D1 (de) | 1995-01-26 |
DE69015135T2 DE69015135T2 (de) | 1995-06-14 |
Family
ID=23762625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69015135T Expired - Fee Related DE69015135T2 (de) | 1989-11-30 | 1990-08-30 | Verfahren zum Herstellen eines Kondensators für DRAM-Zelle. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5116776A (de) |
EP (1) | EP0430404B1 (de) |
JP (1) | JP2798300B2 (de) |
KR (1) | KR910010751A (de) |
DE (1) | DE69015135T2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5219781A (en) * | 1988-12-08 | 1993-06-15 | Mitsubishi Denki Kabushiki Kaisha | Method for manufacturing semiconductor memory device having a stacked type capacitor |
KR950010115B1 (ko) * | 1990-02-23 | 1995-09-07 | 금성일렉트론주식회사 | 캐패시터 제조방법 및 구조 |
US5234853A (en) * | 1990-03-05 | 1993-08-10 | Fujitsu Limited | Method of producing a high voltage MOS transistor |
US5229314A (en) * | 1990-05-01 | 1993-07-20 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing field effect transistor having a multilayer interconnection layer therein with tapered sidewall insulation |
KR930000718B1 (ko) * | 1990-05-21 | 1993-01-30 | 삼성전자 주식회사 | 반도체장치의 제조방법 |
DE4122038C2 (de) * | 1990-07-03 | 1994-08-25 | Mitsubishi Electric Corp | Herstellungsverfahren für einen DRAM |
JPH04342164A (ja) * | 1991-05-20 | 1992-11-27 | Hitachi Ltd | 半導体集積回路装置の形成方法 |
KR930010081B1 (ko) * | 1991-05-24 | 1993-10-14 | 현대전자산업 주식회사 | 2중 적층캐패시터 구조를 갖는 반도체 기억장치 및 그 제조방법 |
US5220483A (en) * | 1992-01-16 | 1993-06-15 | Crystal Semiconductor | Tri-level capacitor structure in switched-capacitor filter |
US5401680A (en) * | 1992-02-18 | 1995-03-28 | National Semiconductor Corporation | Method for forming a ceramic oxide capacitor having barrier layers |
JP2838337B2 (ja) * | 1992-03-27 | 1998-12-16 | 三菱電機株式会社 | 半導体装置 |
US5244826A (en) * | 1992-04-16 | 1993-09-14 | Micron Technology, Inc. | Method of forming an array of finned memory cell capacitors on a semiconductor substrate |
US5262352A (en) * | 1992-08-31 | 1993-11-16 | Motorola, Inc. | Method for forming an interconnection structure for conductive layers |
US5395784A (en) * | 1993-04-14 | 1995-03-07 | Industrial Technology Research Institute | Method of manufacturing low leakage and long retention time DRAM |
US5650655A (en) | 1994-04-28 | 1997-07-22 | Micron Technology, Inc. | Integrated circuitry having electrical interconnects |
US5439840A (en) * | 1993-08-02 | 1995-08-08 | Motorola, Inc. | Method of forming a nonvolatile random access memory capacitor cell having a metal-oxide dielectric |
US5369048A (en) * | 1993-08-26 | 1994-11-29 | United Microelectronics Corporation | Stack capacitor DRAM cell with buried bit-line and method of manufacture |
US5364813A (en) * | 1993-09-01 | 1994-11-15 | Industrial Technology Research Institute | Stacked DRAM poly plate capacitor |
US5416356A (en) * | 1993-09-03 | 1995-05-16 | Motorola, Inc. | Integrated circuit having passive circuit elements |
US5378654A (en) * | 1994-05-24 | 1995-01-03 | United Microelectronics Corporation | Self-aligned contact process |
US5661064A (en) * | 1995-11-13 | 1997-08-26 | Micron Technology, Inc. | Method of forming a capacitor having container members |
US5637523A (en) * | 1995-11-20 | 1997-06-10 | Micron Technology, Inc. | Method of forming a capacitor and a capacitor construction |
US6218237B1 (en) | 1996-01-03 | 2001-04-17 | Micron Technology, Inc. | Method of forming a capacitor |
US5754390A (en) * | 1996-01-23 | 1998-05-19 | Micron Technology, Inc. | Integrated capacitor bottom electrode for use with conformal dielectric |
DE19640211A1 (de) * | 1996-09-30 | 1998-04-02 | Siemens Ag | Verfahren zur Herstellung barrierenfreier Halbleiterspeicheranordnungen |
US6054340A (en) * | 1997-06-06 | 2000-04-25 | Motorola, Inc. | Method for forming a cavity capable of accessing deep fuse structures and device containing the same |
US5970358A (en) * | 1997-06-30 | 1999-10-19 | Micron Technology, Inc. | Method for forming a capacitor wherein the first capacitor plate includes electrically coupled conductive layers separated by an intervening insulative layer |
US6027969A (en) * | 1998-06-04 | 2000-02-22 | Taiwan Semiconductor Manufacturing Company | Capacitor structure for a dynamic random access memory cell |
US6228699B1 (en) * | 1998-12-14 | 2001-05-08 | Taiwan Semiconductor Manufacturing Company | Cross leakage of capacitors in DRAM or embedded DRAM |
US6214687B1 (en) | 1999-02-17 | 2001-04-10 | Micron Technology, Inc. | Method of forming a capacitor and a capacitor construction |
GB2367428B (en) * | 2001-12-19 | 2002-10-09 | Zarlink Semiconductor Ltd | Integrated circuit |
US6897508B2 (en) * | 2002-05-01 | 2005-05-24 | Sundew Technologies, Llc | Integrated capacitor with enhanced capacitance density and method of fabricating same |
US9530834B1 (en) * | 2015-12-13 | 2016-12-27 | United Microelectronics Corp. | Capacitor and method for fabricating the same |
US11508719B2 (en) * | 2019-05-13 | 2022-11-22 | Ememory Technology Inc. | Electrostatic discharge circuit |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4475118A (en) * | 1978-12-21 | 1984-10-02 | National Semiconductor Corporation | Dynamic MOS RAM with storage cells having a mainly insulated first plate |
US4403394A (en) * | 1980-12-17 | 1983-09-13 | International Business Machines Corporation | Formation of bit lines for ram device |
JPS61183952A (ja) * | 1985-02-09 | 1986-08-16 | Fujitsu Ltd | 半導体記憶装置及びその製造方法 |
JPH0682783B2 (ja) * | 1985-03-29 | 1994-10-19 | 三菱電機株式会社 | 容量およびその製造方法 |
US4855801A (en) * | 1986-08-22 | 1989-08-08 | Siemens Aktiengesellschaft | Transistor varactor for dynamics semiconductor storage means |
JPH01154551A (ja) * | 1987-12-11 | 1989-06-16 | Oki Electric Ind Co Ltd | 半導体メモリ集積回路装置及びその製造方法 |
EP0370407A1 (de) * | 1988-11-18 | 1990-05-30 | Nec Corporation | Halbleiterspeicherbauteil vom Typ 1-transistor-1-Kondensator-Speicherzelle |
JP2950550B2 (ja) * | 1989-07-03 | 1999-09-20 | 沖電気工業株式会社 | 半導体記憶装置の製造方法 |
-
1989
- 1989-11-30 US US07/443,897 patent/US5116776A/en not_active Expired - Lifetime
-
1990
- 1990-08-30 DE DE69015135T patent/DE69015135T2/de not_active Expired - Fee Related
- 1990-08-30 EP EP90309525A patent/EP0430404B1/de not_active Expired - Lifetime
- 1990-11-21 JP JP2314449A patent/JP2798300B2/ja not_active Expired - Fee Related
- 1990-11-21 KR KR1019900018950A patent/KR910010751A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0430404B1 (de) | 1994-12-14 |
JP2798300B2 (ja) | 1998-09-17 |
EP0430404A1 (de) | 1991-06-05 |
US5116776A (en) | 1992-05-26 |
DE69015135T2 (de) | 1995-06-14 |
KR910010751A (ko) | 1991-06-29 |
JPH03209868A (ja) | 1991-09-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |