DE69008967T2 - Turbogebläse für laser und laseroszillatoren. - Google Patents

Turbogebläse für laser und laseroszillatoren.

Info

Publication number
DE69008967T2
DE69008967T2 DE69008967T DE69008967T DE69008967T2 DE 69008967 T2 DE69008967 T2 DE 69008967T2 DE 69008967 T DE69008967 T DE 69008967T DE 69008967 T DE69008967 T DE 69008967T DE 69008967 T2 DE69008967 T2 DE 69008967T2
Authority
DE
Germany
Prior art keywords
lasers
laser oscillators
turbo blowers
blowers
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69008967T
Other languages
English (en)
Other versions
DE69008967D1 (de
Inventor
Tsutomu Funakubo
Norio Karube
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Application granted granted Critical
Publication of DE69008967D1 publication Critical patent/DE69008967D1/de
Publication of DE69008967T2 publication Critical patent/DE69008967T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6603—Special parts or details in view of lubrication with grease as lubricant
    • F16C33/6607—Retaining the grease in or near the bearing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
DE69008967T 1989-02-23 1990-02-09 Turbogebläse für laser und laseroszillatoren. Expired - Fee Related DE69008967T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1044223A JPH02222586A (ja) 1989-02-23 1989-02-23 レーザ用ターボブロア及びレーザ発振装置
PCT/JP1990/000170 WO1990010328A1 (en) 1989-02-23 1990-02-09 Turboblower for lasers and laser oscillator

Publications (2)

Publication Number Publication Date
DE69008967D1 DE69008967D1 (de) 1994-06-23
DE69008967T2 true DE69008967T2 (de) 1994-09-01

Family

ID=12685542

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69008967T Expired - Fee Related DE69008967T2 (de) 1989-02-23 1990-02-09 Turbogebläse für laser und laseroszillatoren.

Country Status (5)

Country Link
US (1) US5124997A (de)
EP (1) EP0412165B1 (de)
JP (1) JPH02222586A (de)
DE (1) DE69008967T2 (de)
WO (1) WO1990010328A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10003153A1 (de) * 2000-01-26 2001-08-02 Leybold Vakuum Gmbh Turboradialgebläse

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02169899A (ja) * 1988-12-21 1990-06-29 Fanuc Ltd レーザ用ターボブロア及びそれを用いたレーザ発振装置
DE9102855U1 (de) * 1991-03-09 1991-06-20 Leybold Ag, 6450 Hanau, De
JP2617048B2 (ja) * 1991-04-23 1997-06-04 ファナック株式会社 レーザ加工装置
JPH0590661A (ja) * 1991-04-26 1993-04-09 Fanuc Ltd ガスレーザ装置用ブロアの軸受異常検出方式
DE4118786C2 (de) * 1991-06-07 1998-04-09 Becker Kg Gebr Gaslaser, insbesondere Axialstromgaslaser
US5317579A (en) * 1992-08-07 1994-05-31 Litton Systems, Inc. Laser pump
JP3044983B2 (ja) * 1993-08-25 2000-05-22 株式会社日立製作所 Ａｔｍスイッチングシステムのセル制御方法
US5461636A (en) * 1994-01-24 1995-10-24 Fanuc Ltd. Turbo blower for lasers
JP3427571B2 (ja) * 1995-06-14 2003-07-22 松下電器産業株式会社 高速軸流型ガスレーザ発振器
JP2005123448A (ja) * 2003-10-17 2005-05-12 Fanuc Ltd レーザ発振器用ターボブロワ
JP4249723B2 (ja) * 2005-04-14 2009-04-08 ファナック株式会社 レーザ発振器用ブロワ
JP5026313B2 (ja) * 2008-03-17 2012-09-12 株式会社川本製作所 軸受部材及び立型ポンプ装置
US8792529B2 (en) 2009-02-24 2014-07-29 Panasonic Corporation Gas laser oscillation device and gas laser processing machine
US8509280B2 (en) * 2009-05-21 2013-08-13 Panasonic Corporation Gas laser oscillator apparatus and gas laser machining apparatus
JP5533318B2 (ja) * 2010-06-17 2014-06-25 株式会社Ｉｈｉ ターボ機械
JP5310785B2 (ja) * 2011-05-23 2013-10-09 日本精工株式会社 ステアリング装置
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
JP5659208B2 (ja) * 2012-10-22 2015-01-28 シナノケンシ株式会社 送風機
JP6189890B2 (ja) * 2015-03-25 2017-08-30 ファナック株式会社 軸シールの損傷を抑制する構造を備えた送風機

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5879786A (ja) * 1981-11-06 1983-05-13 Hitachi Ltd 炭酸ガスレ−ザ装置
JPS58160627A (ja) * 1982-03-18 1983-09-24 Nippon Seiko Kk 転がり軸受の潤滑装置
JPS6230387A (ja) * 1985-07-12 1987-02-09 Anretsuto:Kk 炭酸ガスレ−ザ光線発振器用ル−ツブロワ−
DE3600126A1 (de) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser
JPS62137396U (de) * 1986-02-24 1987-08-29
JPS63186034A (ja) * 1987-01-27 1988-08-01 Toshiba Corp 軸受装置
JPH0714089B2 (ja) * 1987-05-18 1995-02-15 ファナック株式会社 レ−ザ発振装置及びレ−ザ発振装置のレ−ザガスの封入方法
WO1990004274A1 (fr) * 1988-10-13 1990-04-19 Fanuc Ltd Oscillateur pour lasers a gaz
JP2533735B2 (ja) * 1993-08-17 1996-09-11 株式会社日立製作所 映像信号の再生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10003153A1 (de) * 2000-01-26 2001-08-02 Leybold Vakuum Gmbh Turboradialgebläse

Also Published As

Publication number Publication date
EP0412165A1 (de) 1991-02-13
WO1990010328A1 (en) 1990-09-07
JPH02222586A (ja) 1990-09-05
EP0412165A4 (en) 1991-04-03
EP0412165B1 (de) 1994-05-18
US5124997A (en) 1992-06-23
DE69008967D1 (de) 1994-06-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee