DE69005393T2 - Gas-Laser-Vorrichtung. - Google Patents

Gas-Laser-Vorrichtung.

Info

Publication number
DE69005393T2
DE69005393T2 DE69005393T DE69005393T DE69005393T2 DE 69005393 T2 DE69005393 T2 DE 69005393T2 DE 69005393 T DE69005393 T DE 69005393T DE 69005393 T DE69005393 T DE 69005393T DE 69005393 T2 DE69005393 T2 DE 69005393T2
Authority
DE
Germany
Prior art keywords
laser device
gas laser
gas
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69005393T
Other languages
English (en)
Other versions
DE69005393D1 (de
Inventor
Junichi Nishimae
Kenji Yoshizawa
Masakazu Taki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27275552&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69005393(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP285990A external-priority patent/JPH03208384A/ja
Priority claimed from JP2003550A external-priority patent/JP2700345B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69005393D1 publication Critical patent/DE69005393D1/de
Publication of DE69005393T2 publication Critical patent/DE69005393T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0315—Waveguide lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H01S3/08068—Holes; Stepped surface; Special cross-section
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0818—Unstable resonators
DE69005393T 1989-08-11 1990-08-10 Gas-Laser-Vorrichtung. Expired - Lifetime DE69005393T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP20697889 1989-08-11
JP285990A JPH03208384A (ja) 1990-01-10 1990-01-10 気体レーザ装置
JP2003550A JP2700345B2 (ja) 1989-08-11 1990-01-12 気体レーザ装置

Publications (2)

Publication Number Publication Date
DE69005393D1 DE69005393D1 (de) 1994-02-03
DE69005393T2 true DE69005393T2 (de) 1994-05-19

Family

ID=27275552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69005393T Expired - Lifetime DE69005393T2 (de) 1989-08-11 1990-08-10 Gas-Laser-Vorrichtung.

Country Status (3)

Country Link
US (1) US5048048A (de)
EP (1) EP0412555B1 (de)
DE (1) DE69005393T2 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216689A (en) 1990-10-12 1993-06-01 Coherent, Inc. Slab laser with enhanced lifetime
US5123028A (en) * 1990-10-12 1992-06-16 Coherent, Inc. RF Excited CO2 slab waveguide laser
IL99607A (en) * 1990-10-12 1994-07-31 Coherent Inc Carbon dioxide laser with tissue treatment pulse
EP0523674A1 (de) * 1991-07-18 1993-01-20 Siemens Aktiengesellschaft Slab- oder Bandleiterlaser für hohe Laserleistungen
DE69306424T2 (de) * 1992-01-22 1997-04-24 Mitsubishi Electric Corp Laser-Apparat
JP3316698B2 (ja) * 1992-10-21 2002-08-19 三菱電機株式会社 レーザ装置
US5353297A (en) * 1993-07-12 1994-10-04 Coherent, Inc. Gas slab laser with folded resonator structure
US5412681A (en) * 1994-03-30 1995-05-02 Carl Zeiss, Inc. Slab-waveguide CO2 laser
DE69624447T2 (de) 1995-11-27 2003-06-18 Qsource Inc Gaslaser mit rechteckigem Entladungsraum
US5596593A (en) * 1996-02-09 1997-01-21 Luxar Corporation Orthogonal RFDC transverse excited gas laser
DE19609851A1 (de) * 1996-03-13 1997-09-18 Rofin Sinar Laser Gmbh Bandleiterlaser
US5822354A (en) * 1996-04-22 1998-10-13 Synrad, Inc. Variable-aperture cavity laser
US5848091A (en) * 1997-01-21 1998-12-08 The Twentyfirst Century Corp. Laser resonator with improved output beam characteristics
US5892782A (en) * 1997-09-16 1999-04-06 Synrad, Inc. Laser with split-wave hybrid resonator
US5953360A (en) * 1997-10-24 1999-09-14 Synrad, Inc. All metal electrode sealed gas laser
US6144687A (en) * 1998-09-04 2000-11-07 Excitation Llc Laser
US6370178B1 (en) * 1998-12-21 2002-04-09 Imed Lasers Wide area laser and multi-pass laser optical cavity for use therein
US6198759B1 (en) 1999-12-27 2001-03-06 Synrad, Inc. Laser system and method for beam enhancement
US6195379B1 (en) 1999-12-27 2001-02-27 Synrad, Inc. Laser assembly system and method
US6198758B1 (en) 1999-12-27 2001-03-06 Synrad, Inc. Laser with heat transfer system and method
US6614826B1 (en) 2000-05-05 2003-09-02 Synrad, Inc. Laser system and method for gain medium with output beam transverse profile tailoring longitudinal strips
GB0211202D0 (en) * 2002-05-16 2002-06-26 Univ Heriot Watt Novel waveguide resonator
CN100468891C (zh) * 2003-05-07 2009-03-11 普瑞玛工业股份有限公司 具有混合式非稳定环形谐振腔的激光器
US8599898B2 (en) 2004-12-22 2013-12-03 Universal Laser Systems, Inc. Slab laser with composite resonator and method of producing high-energy laser radiation
US7756186B2 (en) * 2007-02-23 2010-07-13 Coherent, Inc. Unstable resonator with variable output coupling
US7664159B2 (en) * 2007-07-31 2010-02-16 Coherent, Inc. Thermal distortion compensation for laser mirrors
EP2053708A1 (de) 2007-10-25 2009-04-29 Rofin-Sinar UK Ltd Gaslaservorrichtung
US8201954B2 (en) * 2009-01-08 2012-06-19 Coherent, Inc. Compensation for transient heating of laser mirrors
US8295319B2 (en) 2010-11-23 2012-10-23 Iradion Laser, Inc. Ceramic gas laser having an integrated beam shaping waveguide
US8422528B2 (en) 2011-02-24 2013-04-16 Iradion Laser, Inc. Ceramic slab, free-space and waveguide lasers
US9281651B2 (en) 2014-04-30 2016-03-08 Gsi Group Corporation Laser resonator with parasitic mode suppression
US9231362B2 (en) 2014-06-06 2016-01-05 Synrad, Inc. Multi-pass slab laser with internal beam shaping
US10404030B2 (en) * 2015-02-09 2019-09-03 Iradion Laser, Inc. Flat-folded ceramic slab lasers
JPWO2017029729A1 (ja) * 2015-08-19 2018-05-31 ギガフォトン株式会社 レーザ装置
CN109906534B (zh) 2016-09-20 2021-04-23 依拉迪激光有限公司 具有缩进孔口的激光器
CN108270143A (zh) * 2018-01-28 2018-07-10 北京工业大学 一种板条激光器谐振腔
EP3550678B1 (de) * 2018-04-04 2020-02-26 Kern Technologies, LLC Gefalteter slab-wellenleiterlaser

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969685A (en) * 1974-12-06 1976-07-13 United Technologies Corporation Enhanced radiation coupling from unstable laser resonators
US4123149A (en) * 1977-07-08 1978-10-31 United Technologies Corporation Unstable resonator having high magnification
US4446556A (en) * 1980-10-23 1984-05-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Off-axis coherently pumped laser
DE3639580A1 (de) * 1985-11-20 1987-05-21 Mitsubishi Electric Corp Laseranordnung
US4719639B1 (en) * 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
DE3856348T2 (de) * 1987-01-26 1999-11-25 Mitsubishi Electric Corp Laser Plasmavorrichtung
DE3729053A1 (de) * 1987-08-31 1989-03-16 Deutsche Forsch Luft Raumfahrt Hochleistungs-bandleiterlaser

Also Published As

Publication number Publication date
EP0412555B1 (de) 1993-12-22
EP0412555A1 (de) 1991-02-13
DE69005393D1 (de) 1994-02-03
US5048048A (en) 1991-09-10

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8320 Willingness to grant licences declared (paragraph 23)
8365 Fully valid after opposition proceedings
8321 Willingness to grant licences paragraph 23 withdrawn
8320 Willingness to grant licences declared (paragraph 23)