DE68921655T2 - Verfahren zur Herstellung von Mustern. - Google Patents

Verfahren zur Herstellung von Mustern.

Info

Publication number
DE68921655T2
DE68921655T2 DE68921655T DE68921655T DE68921655T2 DE 68921655 T2 DE68921655 T2 DE 68921655T2 DE 68921655 T DE68921655 T DE 68921655T DE 68921655 T DE68921655 T DE 68921655T DE 68921655 T2 DE68921655 T2 DE 68921655T2
Authority
DE
Germany
Prior art keywords
samples
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921655T
Other languages
English (en)
Other versions
DE68921655D1 (de
Inventor
Christopher Paul Dr Banks
Edward Dr Irving
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huntsman Advanced Materials Switzerland GmbH
Original Assignee
Ciba Geigy AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ciba Geigy AG filed Critical Ciba Geigy AG
Application granted granted Critical
Publication of DE68921655D1 publication Critical patent/DE68921655D1/de
Publication of DE68921655T2 publication Critical patent/DE68921655T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0582—Coating by resist, i.e. resist used as mask for application of insulating coating or of second resist
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0783—Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105—Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1333—Deposition techniques, e.g. coating
    • H05K2203/135—Electrophoretic deposition of insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
DE68921655T 1988-01-27 1989-01-18 Verfahren zur Herstellung von Mustern. Expired - Fee Related DE68921655T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888801736A GB8801736D0 (en) 1988-01-27 1988-01-27 Method of making patterns

Publications (2)

Publication Number Publication Date
DE68921655D1 DE68921655D1 (de) 1995-04-20
DE68921655T2 true DE68921655T2 (de) 1995-08-03

Family

ID=10630574

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921655T Expired - Fee Related DE68921655T2 (de) 1988-01-27 1989-01-18 Verfahren zur Herstellung von Mustern.

Country Status (7)

Country Link
US (1) US4861438A (de)
EP (1) EP0326516B1 (de)
JP (1) JP2791484B2 (de)
KR (1) KR0124934B1 (de)
CA (1) CA1332721C (de)
DE (1) DE68921655T2 (de)
GB (1) GB8801736D0 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994349A (en) * 1988-06-27 1991-02-19 At&T Bell Laboratories Printed wiring board fabrication method
GB8913090D0 (en) * 1989-06-07 1989-07-26 Ciba Geigy Ag Method
EP0410274B1 (de) * 1989-07-25 1995-11-15 Dai Nippon Insatsu Kabushiki Kaisha Verfahren zur Herstellung von Feinmustern
US5268256A (en) * 1990-08-02 1993-12-07 Ppg Industries, Inc. Photoimageable electrodepositable photoresist composition for producing non-tacky films
BR9103260A (pt) * 1990-08-02 1992-02-18 Ppg Industries Inc Composicao de resina fotossensivel que pode ser eletrodepositada e pode receber fotoimagem
JPH04146687A (ja) * 1990-10-08 1992-05-20 Nippon Paint Co Ltd ソルダーマスクされた回路基板の製法
US5202222A (en) * 1991-03-01 1993-04-13 Shipley Company Inc. Selective and precise etching and plating of conductive substrates
US5160579A (en) * 1991-06-05 1992-11-03 Macdermid, Incorporated Process for manufacturing printed circuit employing selective provision of solderable coating
US5288377A (en) * 1991-06-05 1994-02-22 Macdermid, Incorporated Process for the manufacture of printed circuits using electrophoretically deposited organic resists
GB9114098D0 (en) * 1991-06-29 1991-08-14 Ciba Geigy Ag Method of making patterns
HUT71621A (en) * 1993-01-11 1996-01-29 Ppg Industries Inc Phosphating compositions and processes, particularly for use in fabrication of printed circuits utilizing organic resists
DE4311807C2 (de) * 1993-04-03 1998-03-19 Atotech Deutschland Gmbh Verfahren zur Beschichtung von Metallen und Anwendung des Verfahrens in der Leiterplattentechnik
JPH07254550A (ja) * 1994-03-16 1995-10-03 Fujitsu Ltd アクリル系レジストの形成方法
US5730854A (en) * 1996-05-30 1998-03-24 Enthone-Omi, Inc. Alkoxylated dimercaptans as copper additives and de-polarizing additives
JP3320648B2 (ja) * 1997-12-04 2002-09-03 東京エレクトロン株式会社 レジスト膜の形成方法及びレジスト膜の形成装置
JP3233279B2 (ja) * 1998-10-06 2001-11-26 日本アイ・ビー・エム株式会社 洗浄剤組成物および洗浄方法
TWI342172B (en) * 2007-01-02 2011-05-11 Advanced Semiconductor Eng Circuit board and method for manufacturing the same
JP6729335B2 (ja) * 2016-12-07 2020-07-22 東京エレクトロン株式会社 半導体装置の製造方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2882260A (en) * 1954-12-18 1959-04-14 Bayer Ag Crosslinked polymers of ethylenically unsaturated blocked isocyanates
BE634494A (de) * 1962-07-05
NL299626A (de) * 1962-10-24
GB1194826A (en) * 1966-08-09 1970-06-10 Ronson Products Ltd Improvements relating to Electro-Plating and Etching Processes
DE1720610A1 (de) * 1967-01-27 1971-06-16 Bayer Ag Verfahren zur Herstellung von Einkomponenteneinbrennlacken auf Acrylharzbasis
JPS4928653B1 (de) * 1970-04-21 1974-07-29
IE39134B1 (en) * 1972-05-16 1978-08-16 Loctite Ltd Improvements in or relating to photo-initiated optical
CA1030294A (en) * 1972-08-25 1978-04-25 Koichi Tsutsui Process for producing polymeric resin
US4034017A (en) * 1973-08-29 1977-07-05 Ppg Industries, Inc. Composition useful in making extensible films
US4101491A (en) * 1975-02-18 1978-07-18 The B. F. Goodrich Company Ethylenically unsaturated blocked aromatic diisocyanates and polymers thereof
JPS5949243B2 (ja) * 1975-06-17 1984-12-01 キヨウワガスカガクコウギヨウ カブシキガイシヤ 親水性重合体の製造方法
DE2924756A1 (de) * 1979-06-20 1981-01-29 Basf Ag Lackbindemittel und ihre verwendung fuer elektrotauchlacke
GB2066275B (en) * 1979-12-21 1983-06-02 Takeda Chemical Industries Ltd Precoated metal and its production
DE3017603A1 (de) * 1980-05-08 1981-11-19 Basf Ag, 6700 Ludwigshafen Verkappte isocyanatgruppen enthaltende lackbindemittel und ihre verwendung fuer die kathodische elektrotauchlackierung
US4692503A (en) * 1980-12-29 1987-09-08 Ppg Industries, Inc. Coating compositions comprising free radical addition polymers with crosslinkable integral isocyanato groups
US4444954A (en) * 1982-09-30 1984-04-24 The Sherwin-Williams Company Water reducible quaternary ammonium salt containing polymers
US4444955A (en) * 1982-09-30 1984-04-24 The Sherwin-Williams Company Water reducible quaternary ammonium salt containing polymers
DE3245563A1 (de) * 1982-12-09 1984-06-14 Henkel KGaA, 4000 Düsseldorf Verfahren zur herstellung von (meth)acrylsaeureestergruppierungen aufweisenden verbindungen, neue (meth)acrylsaeureester sowie anaerob haertende klebe- und dichtmassen
US4639299A (en) * 1984-12-03 1987-01-27 Scm Corporation Acrylic and acrylic/epoxy copolymer composition as self-curing cathodic electrocoating vehicles
ATE42856T1 (de) * 1985-07-05 1989-05-15 Akzo Nv Verfahren zum ueberziehen von elektrisch leitenden substraten und ein kationisches bindemittel enthaltende waessrige zusammensetzung.
GB8614868D0 (en) * 1986-06-18 1986-07-23 Ciba Geigy Ag Metallic patterns
US4751172A (en) * 1986-08-01 1988-06-14 Shipley Company Inc. Process for forming metal images

Also Published As

Publication number Publication date
CA1332721C (en) 1994-10-25
US4861438A (en) 1989-08-29
KR890012518A (ko) 1989-08-26
KR0124934B1 (ko) 1997-12-05
EP0326516A3 (en) 1990-10-31
JPH01230788A (ja) 1989-09-14
GB8801736D0 (en) 1988-02-24
DE68921655D1 (de) 1995-04-20
JP2791484B2 (ja) 1998-08-27
EP0326516B1 (de) 1995-03-15
EP0326516A2 (de) 1989-08-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NOVARTIS AG, BASEL, CH

8327 Change in the person/name/address of the patent owner

Owner name: CIBA SPECIALTY CHEMICALS HOLDING INC., BASEL, CH

8327 Change in the person/name/address of the patent owner

Owner name: VANTICO AG, BASEL, CH

8339 Ceased/non-payment of the annual fee