DE68919084D1 - Metalloxydierungsanordnung und verfahren. - Google Patents

Metalloxydierungsanordnung und verfahren.

Info

Publication number
DE68919084D1
DE68919084D1 DE68919084T DE68919084T DE68919084D1 DE 68919084 D1 DE68919084 D1 DE 68919084D1 DE 68919084 T DE68919084 T DE 68919084T DE 68919084 T DE68919084 T DE 68919084T DE 68919084 D1 DE68919084 D1 DE 68919084D1
Authority
DE
Germany
Prior art keywords
metal
gas
oxidized
oxidation
oxidation furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68919084T
Other languages
English (en)
Other versions
DE68919084T2 (de
Inventor
Tadahiro - - Ohmi
Kazuhiko Sanraifu-Nag Sugiyama
Fumio Sanken-Haitsu-K Nakahara
Satoshi Saiwai-Garden Mizokami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Oxygen Industries Ltd
Original Assignee
Osaka Oxygen Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Oxygen Industries Ltd filed Critical Osaka Oxygen Industries Ltd
Publication of DE68919084D1 publication Critical patent/DE68919084D1/de
Application granted granted Critical
Publication of DE68919084T2 publication Critical patent/DE68919084T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/16—Oxidising using oxygen-containing compounds, e.g. water, carbon dioxide
    • C23C8/18—Oxidising of ferrous surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Signal Processing For Digital Recording And Reproducing (AREA)
  • Heat Treatment Of Articles (AREA)
  • Chemical Vapour Deposition (AREA)
DE68919084T 1988-08-04 1989-08-02 Metalloxydierungsanordnung und verfahren. Expired - Fee Related DE68919084T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63195185A JP2768952B2 (ja) 1988-08-04 1988-08-04 金属酸化処理装置及び金属酸化処理方法
PCT/JP1989/000793 WO1990001569A1 (en) 1988-08-04 1989-08-02 Metal oxidation apparatus and method

Publications (2)

Publication Number Publication Date
DE68919084D1 true DE68919084D1 (de) 1994-12-01
DE68919084T2 DE68919084T2 (de) 1995-04-20

Family

ID=16336867

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68919084T Expired - Fee Related DE68919084T2 (de) 1988-08-04 1989-08-02 Metalloxydierungsanordnung und verfahren.

Country Status (7)

Country Link
US (1) US5226968A (de)
EP (1) EP0427853B1 (de)
JP (1) JP2768952B2 (de)
KR (1) KR900702070A (de)
AT (1) ATE113324T1 (de)
DE (1) DE68919084T2 (de)
WO (1) WO1990001569A1 (de)

Families Citing this family (32)

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US5906688A (en) * 1989-01-11 1999-05-25 Ohmi; Tadahiro Method of forming a passivation film
US5591267A (en) * 1988-01-11 1997-01-07 Ohmi; Tadahiro Reduced pressure device
JP3037768B2 (ja) * 1991-02-18 2000-05-08 大阪酸素工業株式会社 不動態化処理装置
JP3017301B2 (ja) * 1991-02-18 2000-03-06 大阪酸素工業株式会社 不動態膜の形成方法
WO1992014858A1 (fr) * 1991-02-18 1992-09-03 Osaka Sanso Kogyo Kabushiki-Kaisha Procede d'elaboration de film passive
JP3045576B2 (ja) * 1991-05-28 2000-05-29 忠弘 大見 ステンレス鋼の不動態膜形成方法及びステンレス鋼
WO1993010274A1 (en) * 1991-11-20 1993-05-27 Tadahiro Ohmi Method of forming passive oxide film based on chromium oxide and stainless steel
JP3379070B2 (ja) * 1992-10-05 2003-02-17 忠弘 大見 クロム酸化物層を表面に有する酸化不動態膜の形成方法
US5569334A (en) * 1992-12-08 1996-10-29 Hitachi Metals, Ltd. Stainless steel member for semiconductor fabrication equipment and surface treatment method therefor
US5551982A (en) * 1994-03-31 1996-09-03 Applied Materials, Inc. Semiconductor wafer process chamber with susceptor back coating
DE4437050A1 (de) * 1994-10-17 1996-04-18 Leybold Ag Vorrichtung zum Behandeln von Oberflächen von Hohlkörpern, insbesondere von Innenflächen von Kraftstofftanks
JP2987754B2 (ja) * 1996-01-17 1999-12-06 岩谷産業株式会社 高純度ガスの配管路での不動態化処理方法
JP4104026B2 (ja) * 1996-06-20 2008-06-18 財団法人国際科学振興財団 酸化不働態膜の形成方法並びに接流体部品及び流体供給・排気システム
JP3020873B2 (ja) * 1996-07-11 2000-03-15 神鋼パンテツク株式会社 有機アミン系薬剤使用機器用材料
TW426753B (en) 1997-06-30 2001-03-21 Sumitomo Metal Ind Method of oxidizing inner surface of ferritic stainless steel pipe
JP4125406B2 (ja) * 1997-08-08 2008-07-30 忠弘 大見 フッ化不働態処理が施された溶接部材の溶接方法および再フッ化不働態処理方法ならびに溶接部品
DE19845803C2 (de) * 1998-09-30 2002-10-17 Siemens Ag Verfahren zum Vakuumbeschichten von Metallbauteilen
JP3864585B2 (ja) * 1998-11-04 2007-01-10 住友金属工業株式会社 ステンレス鋼管内面の酸化処理方法
TWI222958B (en) * 1999-09-27 2004-11-01 Mitsubishi Gas Chemical Co Method for producing hydrocyanic acid synthesis catalyst
TW524890B (en) * 2001-02-13 2003-03-21 United Microelectronics Corp Method for preventing corrosion of a furnace and preventing corrodent furnace
JP5001489B2 (ja) * 2001-03-19 2012-08-15 東京エレクトロン株式会社 処理装置
US6488783B1 (en) 2001-03-30 2002-12-03 Babcock & Wilcox Canada, Ltd. High temperature gaseous oxidation for passivation of austenitic alloys
JP3960069B2 (ja) * 2002-02-13 2007-08-15 住友金属工業株式会社 Ｎｉ基合金管の熱処理方法
KR20080044260A (ko) * 2005-09-05 2008-05-20 가부시키가이샤 이디알 스타 플러렌류 또는 나노 튜브, 및 플러렌류 또는 나노 튜브의제조 방법
US8524003B2 (en) * 2009-08-31 2013-09-03 E I Du Pont De Nemours And Company Loaded film cassette for gaseous vapor deposition
US8529700B2 (en) * 2009-08-31 2013-09-10 E I Du Pont De Nemours And Company Apparatus for gaseous vapor deposition
US8534591B2 (en) * 2009-08-31 2013-09-17 E I Du Pont De Nemours And Company Apparatus and method for loading a film cassette for gaseous vapor deposition
US8551249B2 (en) * 2009-08-31 2013-10-08 E I Du Pont De Nemours And Company Film cassette for gaseous vapor deposition
FR2976349B1 (fr) * 2011-06-09 2018-03-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de realisation d'un element absorbeur de rayonnements solaires pour centrale solaire thermique a concentration.
CN103806007B (zh) * 2014-02-21 2015-10-28 南京航空航天大学 预防奥氏体不锈钢冷弯开裂及提高耐蚀性能的预处理方法
WO2019053836A1 (ja) * 2017-09-14 2019-03-21 株式会社日立ハイテクノロジーズ プラズマ処理装置およびウェットクリーニング方法
CN107841727A (zh) * 2017-12-15 2018-03-27 北京创昱科技有限公司 一种冷却构件及真空镀膜设备

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1097818A (fr) * 1954-01-20 1955-07-11 Mepaco Soc Procédé d'isolement par oxydation des alliages cupro-nickel pour résistances électriques
US3164493A (en) * 1962-04-23 1965-01-05 John E Lindberg Method of applying an oxide coating to a metal tube
FR1396405A (fr) * 1964-03-09 1965-04-23 Csf Procédé de formation d'une couche d'oxyde sur une surface d'un dispositif à semiconducteur en germanium
US3647535A (en) * 1969-10-27 1972-03-07 Ncr Co Method of controllably oxidizing a silicon wafer
DE2536446C2 (de) * 1975-08-16 1985-01-10 Uranit GmbH, 5170 Jülich Vorrichtung zur Durchführung eines Verfahrens zur Bildung einer korrosionsverhütenden, oxidischen Schutzschicht auf korrosionsempfindlichen Stählen
SE407081B (sv) * 1977-07-27 1979-03-12 Hultquist Gunnar B Sett att framstella ytskikt med forbettrade korrosionsegenskaper pa foremal av jernkromlegerigar
US4293594A (en) * 1980-08-22 1981-10-06 Westinghouse Electric Corp. Method for forming conductive, transparent coating on a substrate
LU83165A1 (fr) * 1981-02-25 1982-09-10 Liege Usines Cuivre Zinc Tubes pour condenseurs ou echangeurs de chaleur en alliages de cuivre resistant a la corrosion et procede pour leur fabrication
DE3476818D1 (en) * 1983-12-16 1989-03-30 Showa Aluminum Corp Process for producing aluminum material for use in vacuum
US4636266A (en) * 1984-06-06 1987-01-13 Radiological & Chemical Technology, Inc. Reactor pipe treatment
JPH0680183B2 (ja) * 1984-09-26 1994-10-12 株式会社東芝 原子炉計測素子用案内管の内面窒化装置
FR2574221B1 (fr) * 1984-12-05 1988-06-24 Montaudon Patrick Procede et dispositif permettant l'attaque chimique d'une seule face d'un substrat
JPS61194168A (ja) * 1985-02-20 1986-08-28 Ishikawajima Harima Heavy Ind Co Ltd ステンレス鋼管の不働態化処理方法
JPS61281864A (ja) * 1985-06-07 1986-12-12 Nisshin Steel Co Ltd テンパ−カラ−を付与したステンレス鋼帯およびその製造方法
JPS6213563A (ja) * 1985-07-11 1987-01-22 Shinko Fuaudoraa Kk ステンレス鋼の着色処理方法
DE3614444A1 (de) * 1986-04-29 1987-01-02 Reiner Sarnes Verfahren zum oxydieren von sintereisenteilen

Also Published As

Publication number Publication date
ATE113324T1 (de) 1994-11-15
EP0427853B1 (de) 1994-10-26
JP2768952B2 (ja) 1998-06-25
KR900702070A (ko) 1990-12-05
DE68919084T2 (de) 1995-04-20
WO1990001569A1 (en) 1990-02-22
US5226968A (en) 1993-07-13
JPH0243353A (ja) 1990-02-13
EP0427853A4 (en) 1991-11-13
EP0427853A1 (de) 1991-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee