DE68913351T2 - Vorrichtung und Verfahren zur Erzeugung eines Vakuums. - Google Patents

Vorrichtung und Verfahren zur Erzeugung eines Vakuums.

Info

Publication number
DE68913351T2
DE68913351T2 DE68913351T DE68913351T DE68913351T2 DE 68913351 T2 DE68913351 T2 DE 68913351T2 DE 68913351 T DE68913351 T DE 68913351T DE 68913351 T DE68913351 T DE 68913351T DE 68913351 T2 DE68913351 T2 DE 68913351T2
Authority
DE
Germany
Prior art keywords
booster pump
bypass
chamber
evacuation
manner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68913351T
Other languages
English (en)
Other versions
DE68913351D1 (de
Inventor
Steven V Morgan
John E Madocks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Inc filed Critical BOC Group Inc
Application granted granted Critical
Publication of DE68913351D1 publication Critical patent/DE68913351D1/de
Publication of DE68913351T2 publication Critical patent/DE68913351T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Compressor (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Physical Vapour Deposition (AREA)
DE68913351T 1988-05-24 1989-05-23 Vorrichtung und Verfahren zur Erzeugung eines Vakuums. Expired - Fee Related DE68913351T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/197,937 US4850806A (en) 1988-05-24 1988-05-24 Controlled by-pass for a booster pump

Publications (2)

Publication Number Publication Date
DE68913351D1 DE68913351D1 (de) 1994-04-07
DE68913351T2 true DE68913351T2 (de) 1994-08-04

Family

ID=22731348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68913351T Expired - Fee Related DE68913351T2 (de) 1988-05-24 1989-05-23 Vorrichtung und Verfahren zur Erzeugung eines Vakuums.

Country Status (7)

Country Link
US (1) US4850806A (de)
EP (1) EP0343914B1 (de)
JP (1) JPH0242186A (de)
AT (1) ATE102295T1 (de)
CA (1) CA1322740C (de)
DE (1) DE68913351T2 (de)
ES (1) ES2049814T3 (de)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354179A (en) * 1990-08-01 1994-10-11 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
JPH055492A (ja) * 1991-06-28 1993-01-14 Matsushita Electric Ind Co Ltd 流体回転装置
JP3074829B2 (ja) * 1991-09-05 2000-08-07 松下電器産業株式会社 流体回転装置
FR2682164B1 (fr) * 1991-10-07 1995-01-20 Cit Alcatel Installation de pompage de gaz avec regulation de la vitesse de pompage.
JP3074845B2 (ja) * 1991-10-08 2000-08-07 松下電器産業株式会社 流体回転装置
DE4136950A1 (de) * 1991-11-11 1993-05-13 Pfeiffer Vakuumtechnik Mehrstufiges vakuumpumpsystem
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05202855A (ja) * 1992-01-29 1993-08-10 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5374173A (en) * 1992-09-04 1994-12-20 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus with sealing arrangement
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4315165A1 (de) * 1993-05-07 1994-11-10 Leybold Ag Vakuumpumpe
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
JP3331749B2 (ja) * 1994-06-27 2002-10-07 松下電器産業株式会社 真空ポンプ
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
EP1101943B1 (de) 1995-02-28 2003-12-03 Anest Iwata Corporation Kontrollsystem für zweistufige Vakuumpumpe
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
GB9717400D0 (en) * 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
JP3929185B2 (ja) 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法
JP3038432B2 (ja) 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
US6672171B2 (en) * 2001-07-16 2004-01-06 Mks Instruments, Inc. Combination differential and absolute pressure transducer for load lock control
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US6648609B2 (en) * 2002-04-05 2003-11-18 Berger Instruments, Inc. Pump as a pressure source for supercritical fluid chromatography involving pressure regulators and a precision orifice
GB0212757D0 (en) 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
US20040025940A1 (en) * 2002-08-06 2004-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Balance switch for controlling gas
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
DE502004008341D1 (de) * 2004-03-31 2008-12-11 Applied Materials Gmbh & Co Kg Schleusenanordnung für eine Vakuumbehandlungsanlage und Verfahren zum Betreiben von dieser
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
GB0424198D0 (en) 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
US7585141B2 (en) * 2005-02-01 2009-09-08 Varian Semiconductor Equipment Associates, Inc. Load lock system for ion beam processing
US20090140444A1 (en) * 2007-11-29 2009-06-04 Total Separation Solutions, Llc Compressed gas system useful for producing light weight drilling fluids
JP2009191754A (ja) * 2008-02-15 2009-08-27 Toyota Industries Corp 可変容量ギヤポンプ
US8215922B2 (en) 2008-06-24 2012-07-10 Aurora Sfc Systems, Inc. Compressible fluid pumping system for dynamically compensating compressible fluids over large pressure ranges
US9163618B2 (en) 2008-06-24 2015-10-20 Agilent Technologies, Inc. Automated conversion between SFC and HPLC
WO2011078207A1 (ja) * 2009-12-24 2011-06-30 住友精化株式会社 二連型真空ポンプ装置、およびそれを備えるガス精製システム、 ならびに二連型真空ポンプ装置における排ガス振動抑制装置
US8419936B2 (en) * 2010-03-23 2013-04-16 Agilent Technologies, Inc. Low noise back pressure regulator for supercritical fluid chromatography
NZ602761A (en) 2010-04-20 2015-04-24 Sandvik Intellectual Property Air compressor system and method of operation
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US20130017317A1 (en) * 2011-07-13 2013-01-17 Ring Kenneth M Load lock control method and apparatus
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
GB2497957B (en) * 2011-12-23 2018-06-27 Edwards Ltd Vacuum pumping
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
KR101995358B1 (ko) 2012-06-28 2019-07-02 스털링 인더스트리 컨설트 게엠베하 챔버를 배기시키기 위한 방법 및 펌프 장치
GB2510829B (en) 2013-02-13 2015-09-02 Edwards Ltd Pumping system
US9175528B2 (en) 2013-03-15 2015-11-03 Hydril USA Distribution LLC Decompression to fill pressure
WO2014182333A1 (en) * 2013-05-09 2014-11-13 Fomani Arash Akhavan Vacuum pumps for producing adsorbate-free surfaces
CN104988462B (zh) * 2015-07-23 2017-05-31 京东方科技集团股份有限公司 一种坩埚装置
EP3491243A1 (de) * 2016-07-12 2019-06-05 Dr.-ing. K. Busch GmbH Evakuierungssystem
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
JP2021514492A (ja) 2018-02-09 2021-06-10 ニーサー，ポール 濾過装置および方法
WO2019161297A1 (en) 2018-02-15 2019-08-22 Neiser Paul Apparatus and methods for selectively transmitting objects
WO2019165391A1 (en) * 2018-02-23 2019-08-29 Neiser Paul Interaction method and apparatus
EP3880970B1 (de) * 2018-11-15 2023-02-15 Flowserve Management Company Vorrichtung und verfahren zum evakuieren von sehr grossen volumina
GB2579360A (en) * 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system
KR20220107211A (ko) * 2019-12-04 2022-08-02 아뜰리에 부쉬 에스.아. 중복 펌핑 시스템과 이 펌핑 시스템에 의한 펌핑 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB535738A (en) * 1938-12-24 1941-04-21 Sulzer Ag Improvements in or relating to pumps
US2449217A (en) * 1944-06-14 1948-09-14 Republic Flow Meters Co Regulating apparatus
US2492075A (en) * 1945-10-30 1949-12-20 Kinney Mfg Company Vacuum pump
US2971691A (en) * 1955-08-16 1961-02-14 Heraeus Gmbh W C Pumping system
FR1494152A (fr) * 1966-06-27 1967-09-08 Radiotechnique Coprim Rtc Dispositif à vide très poussé
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
DE2430314C3 (de) * 1974-06-24 1982-11-25 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
JPS57195736A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
US4504194A (en) * 1982-05-24 1985-03-12 Varian Associates, Inc. Air lock vacuum pumping methods and apparatus
JPS61192871A (ja) * 1985-02-20 1986-08-27 Tokico Ltd 真空ポンプの圧力制御装置
GB2164093B (en) * 1984-09-05 1988-01-20 Dowty Fuel Syst Ltd Controlling compressors in pure-air generators
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法

Also Published As

Publication number Publication date
CA1322740C (en) 1993-10-05
ES2049814T3 (es) 1994-05-01
US4850806A (en) 1989-07-25
JPH0242186A (ja) 1990-02-13
ATE102295T1 (de) 1994-03-15
EP0343914B1 (de) 1994-03-02
DE68913351D1 (de) 1994-04-07
EP0343914A1 (de) 1989-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee