JPS57195736A - Vacuum treatment apparatus - Google Patents
Vacuum treatment apparatusInfo
- Publication number
- JPS57195736A JPS57195736A JP56080889A JP8088981A JPS57195736A JP S57195736 A JPS57195736 A JP S57195736A JP 56080889 A JP56080889 A JP 56080889A JP 8088981 A JP8088981 A JP 8088981A JP S57195736 A JPS57195736 A JP S57195736A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- degree
- evacuation
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Plasma Technology (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
PURPOSE: To reduce the time for attaining a required degree of vacuum of a vacuum treating chamber, by providing a by-pass circuit for using a main pump at an initial evacuating stage and using both main and booster vacuum pumps when approaching to the required degree of vacuum.
CONSTITUTION: In an apparatus by which a plastic molded product, e.g., vinyl chloride resin film, is treated by plasma in a vacuum chamber, at initial stage evacuation is carried out by a pump 4 through a by-pass circuit 22 by opening a valve 23 in the circuit 22. When a degree of vacuum of the chamber 1 approaches to the required value, a booster pump 21 begins to operate and the valve 23 in the by-pass circuit 22 is closed. When a degree of vacuum of the chamber 1 reached required value and ready for treating the molded product, both main and booster pumps are allowed to operate for evacuation, thus reducing the time of evacuation remarkably.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56080889A JPS57195736A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56080889A JPS57195736A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57195736A true JPS57195736A (en) | 1982-12-01 |
Family
ID=13730912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56080889A Pending JPS57195736A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57195736A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0242186A (en) * | 1988-05-24 | 1990-02-13 | Boc Group Inc:The | Control device for booster pump |
JP2009248281A (en) * | 2008-04-10 | 2009-10-29 | Panasonic Electric Works Co Ltd | Sliding control switch and power tool using the same |
-
1981
- 1981-05-29 JP JP56080889A patent/JPS57195736A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0242186A (en) * | 1988-05-24 | 1990-02-13 | Boc Group Inc:The | Control device for booster pump |
JP2009248281A (en) * | 2008-04-10 | 2009-10-29 | Panasonic Electric Works Co Ltd | Sliding control switch and power tool using the same |
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