JPS57195736A - Vacuum treatment apparatus - Google Patents

Vacuum treatment apparatus

Info

Publication number
JPS57195736A
JPS57195736A JP56080889A JP8088981A JPS57195736A JP S57195736 A JPS57195736 A JP S57195736A JP 56080889 A JP56080889 A JP 56080889A JP 8088981 A JP8088981 A JP 8088981A JP S57195736 A JPS57195736 A JP S57195736A
Authority
JP
Japan
Prior art keywords
vacuum
chamber
degree
evacuation
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56080889A
Other languages
Japanese (ja)
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP56080889A priority Critical patent/JPS57195736A/en
Publication of JPS57195736A publication Critical patent/JPS57195736A/en
Pending legal-status Critical Current

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Landscapes

  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE: To reduce the time for attaining a required degree of vacuum of a vacuum treating chamber, by providing a by-pass circuit for using a main pump at an initial evacuating stage and using both main and booster vacuum pumps when approaching to the required degree of vacuum.
CONSTITUTION: In an apparatus by which a plastic molded product, e.g., vinyl chloride resin film, is treated by plasma in a vacuum chamber, at initial stage evacuation is carried out by a pump 4 through a by-pass circuit 22 by opening a valve 23 in the circuit 22. When a degree of vacuum of the chamber 1 approaches to the required value, a booster pump 21 begins to operate and the valve 23 in the by-pass circuit 22 is closed. When a degree of vacuum of the chamber 1 reached required value and ready for treating the molded product, both main and booster pumps are allowed to operate for evacuation, thus reducing the time of evacuation remarkably.
COPYRIGHT: (C)1982,JPO&Japio
JP56080889A 1981-05-29 1981-05-29 Vacuum treatment apparatus Pending JPS57195736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56080889A JPS57195736A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56080889A JPS57195736A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Publications (1)

Publication Number Publication Date
JPS57195736A true JPS57195736A (en) 1982-12-01

Family

ID=13730912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56080889A Pending JPS57195736A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195736A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0242186A (en) * 1988-05-24 1990-02-13 Boc Group Inc:The Control device for booster pump
JP2009248281A (en) * 2008-04-10 2009-10-29 Panasonic Electric Works Co Ltd Sliding control switch and power tool using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0242186A (en) * 1988-05-24 1990-02-13 Boc Group Inc:The Control device for booster pump
JP2009248281A (en) * 2008-04-10 2009-10-29 Panasonic Electric Works Co Ltd Sliding control switch and power tool using the same

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