ES2049814T3 - Aparato y metodo para evacuacion. - Google Patents

Aparato y metodo para evacuacion.

Info

Publication number
ES2049814T3
ES2049814T3 ES89305183T ES89305183T ES2049814T3 ES 2049814 T3 ES2049814 T3 ES 2049814T3 ES 89305183 T ES89305183 T ES 89305183T ES 89305183 T ES89305183 T ES 89305183T ES 2049814 T3 ES2049814 T3 ES 2049814T3
Authority
ES
Spain
Prior art keywords
pump
bypass
chamber
reinforced
evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES89305183T
Other languages
English (en)
Inventor
Steven V Morgan
John E Madocks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Inc filed Critical BOC Group Inc
Application granted granted Critical
Publication of ES2049814T3 publication Critical patent/ES2049814T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Compressor (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

METODO Y APARATO PARA EVACUAR UNA CAMARA CERRADA (11) QUE UTILIZA LA CONEXION DOBLE DE UNA BOMBA REFORZADA (21) Y UNA BOMBA MECANICA (23) DE FORMA QUE MAXIMICE LA VELOCIDAD DE EVACUACION DE LA CAMARA (11) PERO SIN SOBREPASAR LA DE LA BOMBA REFORZADA (21) Y DAÑARLA. UNA DERIVACION (43) ALREDEDOR DE LA BOMBA REFORZADA (21) ESTA DOTADA DE UNA VALVULA PROPORCIONAL (45) QUE ES PUESTA EN FUNCIONAMIENTO PARA INICIAR LA EVACUACION DE LA CAMARA (11) CON LA DERIVACION (43) COMPLETAMENTE ABIERTA PERO CERRANDO GRADUALMENTE ESTE PASO DE FORMA QUE SE MANTENGA UNA PRESION DIFERENCIAL A TRAVES DE LA BOMBA REFORZADA (21) A UN NIVEL PREDETERMINADO, HASTA QUE LA DERIVACION (43) SE HAYA CERRADO POR COMPLETO.
ES89305183T 1988-05-24 1989-05-23 Aparato y metodo para evacuacion. Expired - Lifetime ES2049814T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/197,937 US4850806A (en) 1988-05-24 1988-05-24 Controlled by-pass for a booster pump

Publications (1)

Publication Number Publication Date
ES2049814T3 true ES2049814T3 (es) 1994-05-01

Family

ID=22731348

Family Applications (1)

Application Number Title Priority Date Filing Date
ES89305183T Expired - Lifetime ES2049814T3 (es) 1988-05-24 1989-05-23 Aparato y metodo para evacuacion.

Country Status (7)

Country Link
US (1) US4850806A (es)
EP (1) EP0343914B1 (es)
JP (1) JPH0242186A (es)
AT (1) ATE102295T1 (es)
CA (1) CA1322740C (es)
DE (1) DE68913351T2 (es)
ES (1) ES2049814T3 (es)

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DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
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JP3038432B2 (ja) 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
US6672171B2 (en) * 2001-07-16 2004-01-06 Mks Instruments, Inc. Combination differential and absolute pressure transducer for load lock control
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US6648609B2 (en) * 2002-04-05 2003-11-18 Berger Instruments, Inc. Pump as a pressure source for supercritical fluid chromatography involving pressure regulators and a precision orifice
GB0212757D0 (en) 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
US20040025940A1 (en) * 2002-08-06 2004-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Balance switch for controlling gas
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
ES2316892T3 (es) * 2004-03-31 2009-04-16 APPLIED MATERIALS GMBH & CO. KG Disposicion de esclusa para una instalacion de tratamiento al vacio y procedimiento para su operacion.
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
GB0424198D0 (en) 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
US7585141B2 (en) * 2005-02-01 2009-09-08 Varian Semiconductor Equipment Associates, Inc. Load lock system for ion beam processing
US20090140444A1 (en) * 2007-11-29 2009-06-04 Total Separation Solutions, Llc Compressed gas system useful for producing light weight drilling fluids
JP2009191754A (ja) * 2008-02-15 2009-08-27 Toyota Industries Corp 可変容量ギヤポンプ
US9163618B2 (en) 2008-06-24 2015-10-20 Agilent Technologies, Inc. Automated conversion between SFC and HPLC
US8215922B2 (en) 2008-06-24 2012-07-10 Aurora Sfc Systems, Inc. Compressible fluid pumping system for dynamically compensating compressible fluids over large pressure ranges
KR101506026B1 (ko) * 2009-12-24 2015-03-25 스미토모 세이카 가부시키가이샤 2연형 진공 펌프 장치, 및 그것을 구비한 가스 정제 시스템, 그리고 2연형 진공 펌프 장치에 있어서의 배기 가스 진동 억제 장치
US8419936B2 (en) 2010-03-23 2013-04-16 Agilent Technologies, Inc. Low noise back pressure regulator for supercritical fluid chromatography
EA023484B1 (ru) 2010-04-20 2016-06-30 Сандвик Интеллекчуал Проперти Аб Компрессорная установка
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US20130017317A1 (en) * 2011-07-13 2013-01-17 Ring Kenneth M Load lock control method and apparatus
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
GB2497957B (en) * 2011-12-23 2018-06-27 Edwards Ltd Vacuum pumping
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
WO2014001090A1 (de) * 2012-06-28 2014-01-03 Sterling Industry Consult Gmbh Verfahren und pumpenanordnung zum evakuieren einer kammer
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system
US9175528B2 (en) 2013-03-15 2015-11-03 Hydril USA Distribution LLC Decompression to fill pressure
US20150221487A9 (en) * 2013-05-09 2015-08-06 Arash Akhavan Fomani Surface adsorption vacuum pumps and methods for producing adsorbate-free surfaces
CN104988462B (zh) * 2015-07-23 2017-05-31 京东方科技集团股份有限公司 一种坩埚装置
EP3491243A1 (en) * 2016-07-12 2019-06-05 Dr.-ing. K. Busch GmbH Evacuation system
KR20200138187A (ko) 2018-02-09 2020-12-09 폴 네이저 필터 장치 및 방법
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
WO2019161297A1 (en) 2018-02-15 2019-08-22 Neiser Paul Apparatus and methods for selectively transmitting objects
WO2019165391A1 (en) * 2018-02-23 2019-08-29 Neiser Paul Interaction method and apparatus
WO2020101973A1 (en) * 2018-11-15 2020-05-22 Flowserve Management Company Apparatus and method for evacuating very large volumes
GB2579360A (en) * 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system
KR20220107211A (ko) * 2019-12-04 2022-08-02 아뜰리에 부쉬 에스.아. 중복 펌핑 시스템과 이 펌핑 시스템에 의한 펌핑 방법

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JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法

Also Published As

Publication number Publication date
EP0343914B1 (en) 1994-03-02
ATE102295T1 (de) 1994-03-15
CA1322740C (en) 1993-10-05
DE68913351D1 (de) 1994-04-07
DE68913351T2 (de) 1994-08-04
JPH0242186A (ja) 1990-02-13
US4850806A (en) 1989-07-25
EP0343914A1 (en) 1989-11-29

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