DE60329033D1 - Scanning-sondeninspektionsvorrichtung - Google Patents

Scanning-sondeninspektionsvorrichtung

Info

Publication number
DE60329033D1
DE60329033D1 DE60329033T DE60329033T DE60329033D1 DE 60329033 D1 DE60329033 D1 DE 60329033D1 DE 60329033 T DE60329033 T DE 60329033T DE 60329033 T DE60329033 T DE 60329033T DE 60329033 D1 DE60329033 D1 DE 60329033D1
Authority
DE
Germany
Prior art keywords
inspection device
scanning probe
probe inspection
scanning
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60329033T
Other languages
English (en)
Inventor
Yorinobu Kunimune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Electronics Corp
Original Assignee
NEC Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Electronics Corp filed Critical NEC Electronics Corp
Application granted granted Critical
Publication of DE60329033D1 publication Critical patent/DE60329033D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/40—Conductive probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
DE60329033T 2003-08-07 2003-09-29 Scanning-sondeninspektionsvorrichtung Expired - Lifetime DE60329033D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003289031A JP4360863B2 (ja) 2003-08-07 2003-08-07 走査型プローブ検査装置
PCT/JP2003/012389 WO2005015188A1 (en) 2003-08-07 2003-09-29 Scanning probe inspection apparatus

Publications (1)

Publication Number Publication Date
DE60329033D1 true DE60329033D1 (de) 2009-10-08

Family

ID=34131539

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60329033T Expired - Lifetime DE60329033D1 (de) 2003-08-07 2003-09-29 Scanning-sondeninspektionsvorrichtung

Country Status (7)

Country Link
US (1) US7309991B2 (de)
EP (1) EP1651948B1 (de)
JP (1) JP4360863B2 (de)
CN (1) CN100465627C (de)
DE (1) DE60329033D1 (de)
TW (1) TWI232305B (de)
WO (1) WO2005015188A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008128650A (ja) * 2006-11-16 2008-06-05 Kyushu Institute Of Technology プローブカード用接触子及びその製造方法
WO2009128500A1 (ja) * 2008-04-17 2009-10-22 オリンパス株式会社 カーボンナノファイバー探針カンチレバー
LU91561B1 (en) * 2009-04-30 2010-11-02 Univ Luxembourg Electrical and opto-electrical characterisation oflarge-area semiconductor devices.
CN103137606A (zh) * 2011-12-05 2013-06-05 上海北京大学微电子研究院 电阻测试结构及方法
TWI472782B (zh) * 2013-04-10 2015-02-11 Inotera Memories Inc 半導體裝置之檢測方法以及半導體裝置之檢測系統
CN104465420B (zh) * 2013-09-18 2017-06-16 中芯国际集成电路制造(上海)有限公司 用于获取晶圆级键合结构电阻的方法及其半导体结构
CN104849880B (zh) * 2014-02-14 2018-04-10 上海和辉光电有限公司 显示器面板teg测试组件及其形成方法和测试方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4988799A (en) * 1987-08-11 1991-01-29 Daishowa Chemicals Inc. Lignosulfonate based pharmacologic agent with anti-coagulant and anti-thrombotic activity
DE3856336T2 (de) 1987-09-24 2000-01-27 Canon Kk Mikrosonde
CN1015839B (zh) * 1989-07-08 1992-03-11 中国科学院化学研究所 扫描隧道显微镜多元探头
US5214389A (en) * 1992-01-06 1993-05-25 Motorola, Inc. Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position
US6139759A (en) * 1997-07-08 2000-10-31 International Business Machines Corporation Method of manufacturing silicided silicon microtips for scanning probe microscopy
US6057171A (en) * 1997-09-25 2000-05-02 Frequency Technology, Inc. Methods for determining on-chip interconnect process parameters
CN1328634A (zh) * 1998-05-13 2001-12-26 结晶及技术有限公司 具有晶须探针的悬臂和制造该悬臂的方法
CN2383063Y (zh) * 1999-05-26 2000-06-14 华中理工大学 计量型扫描探针显微镜
JP2002076076A (ja) 2000-09-05 2002-03-15 Sony Corp プローブカードおよび試験方法
JP3852287B2 (ja) 2001-01-15 2006-11-29 富士ゼロックス株式会社 走査型プローブ顕微鏡
US6913982B2 (en) * 2001-05-08 2005-07-05 Geunbae Lim Method of fabricating a probe of a scanning probe microscope (SPM) having a field-effect transistor channel
US6636063B2 (en) * 2001-10-02 2003-10-21 Texas Instruments Incorporated Probe card with contact apparatus and method of manufacture
US6771077B2 (en) * 2002-04-19 2004-08-03 Hitachi, Ltd. Method of testing electronic devices indicating short-circuit
DE10255378B4 (de) * 2002-11-27 2006-03-23 Advanced Micro Devices, Inc., Sunnyvale Teststruktur zum Bestimmen der Stabilität elektronischer Vorrichtungen die miteinander verbundene Substrate umfassen
JP4444734B2 (ja) * 2004-06-07 2010-03-31 キヤノン株式会社 微細パターン形成装置

Also Published As

Publication number Publication date
TWI232305B (en) 2005-05-11
EP1651948B1 (de) 2009-08-26
US20060119373A1 (en) 2006-06-08
WO2005015188A1 (en) 2005-02-17
TW200506386A (en) 2005-02-16
US7309991B2 (en) 2007-12-18
EP1651948A1 (de) 2006-05-03
CN1820193A (zh) 2006-08-16
CN100465627C (zh) 2009-03-04
JP4360863B2 (ja) 2009-11-11
JP2005057194A (ja) 2005-03-03

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