DE60325158D1 - Turbomolekularpumpe und Flansch - Google Patents

Turbomolekularpumpe und Flansch

Info

Publication number
DE60325158D1
DE60325158D1 DE60325158T DE60325158T DE60325158D1 DE 60325158 D1 DE60325158 D1 DE 60325158D1 DE 60325158 T DE60325158 T DE 60325158T DE 60325158 T DE60325158 T DE 60325158T DE 60325158 D1 DE60325158 D1 DE 60325158D1
Authority
DE
Germany
Prior art keywords
flange
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60325158T
Other languages
German (de)
English (en)
Inventor
Yoshiyuki Sakaguchi
Satoshi Okudera
Hirotaka Namiki
Takashi Kabasawa
Tooru Miwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Application granted granted Critical
Publication of DE60325158D1 publication Critical patent/DE60325158D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE60325158T 2002-10-23 2003-10-15 Turbomolekularpumpe und Flansch Expired - Lifetime DE60325158D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002308829 2002-10-23
JP2003296803A JP4484470B2 (ja) 2002-10-23 2003-08-20 分子ポンプ、及びフランジ

Publications (1)

Publication Number Publication Date
DE60325158D1 true DE60325158D1 (de) 2009-01-22

Family

ID=32072540

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60325158T Expired - Lifetime DE60325158D1 (de) 2002-10-23 2003-10-15 Turbomolekularpumpe und Flansch

Country Status (5)

Country Link
US (1) US7059823B2 (enExample)
EP (1) EP1413761B1 (enExample)
JP (1) JP4484470B2 (enExample)
KR (1) KR100997015B1 (enExample)
DE (1) DE60325158D1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4499388B2 (ja) * 2003-08-27 2010-07-07 エドワーズ株式会社 分子ポンプおよび結合装置
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
JP4609082B2 (ja) * 2005-01-25 2011-01-12 株式会社島津製作所 フランジおよびこのフランジを備えたターボ分子ポンプ
GB0520750D0 (en) 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102005059636A1 (de) * 2005-12-14 2007-06-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP4949746B2 (ja) * 2006-03-15 2012-06-13 エドワーズ株式会社 分子ポンプ、及びフランジ
JP2007278163A (ja) * 2006-04-06 2007-10-25 Shimadzu Corp 締結構造および回転式真空ポンプ
JP2007278164A (ja) * 2006-04-06 2007-10-25 Shimadzu Corp 締結構造および回転式真空ポンプ
EP2017480A1 (en) * 2007-06-15 2009-01-21 VARIAN S.p.A. Split joint for vacuum pumps and method for obtaining said joint
DE102007059257A1 (de) * 2007-12-08 2009-06-10 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
JP4978489B2 (ja) * 2008-01-30 2012-07-18 株式会社島津製作所 ケーシングのフランジ構造、ターボ分子ポンプおよび真空ポンプ
DE102008035972A1 (de) * 2008-07-31 2010-02-04 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
DE102008058151A1 (de) 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008058149A1 (de) 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE202008016905U1 (de) 2008-12-19 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
KR101133432B1 (ko) * 2009-10-30 2012-04-09 한국전력공사 응력 저감형 회전체
CN102597528B (zh) * 2009-11-02 2015-06-17 株式会社岛津制作所 真空泵
EP2775148B1 (en) * 2011-10-31 2019-03-27 Edwards Japan Limited Stationary member and vacuum pump
NL2008180C2 (en) * 2012-01-25 2013-07-29 Ihc Holland Ie Bv Pump and a method of manufacturing such a pump.
JP6992569B2 (ja) * 2018-02-14 2022-01-13 株式会社島津製作所 真空ポンプおよびバランス調整方法
JP7377640B2 (ja) 2019-07-22 2023-11-10 エドワーズ株式会社 真空ポンプ、及び、真空ポンプに用いられるロータ並びに回転翼
GB2592043A (en) * 2020-02-13 2021-08-18 Edwards Ltd Axial flow vacuum pump
JP7766998B2 (ja) 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4086012A (en) * 1976-09-20 1978-04-25 The United States Of America As Represented By The Secretary Of The Navy Rotational energy absorbing coupling
JPS59147673U (ja) 1983-03-25 1984-10-02 三菱自動車工業株式会社 ステアリング装置
JP3426734B2 (ja) * 1994-10-17 2003-07-14 三菱重工業株式会社 ターボ分子ポンプ
JP3879169B2 (ja) * 1997-03-31 2007-02-07 株式会社島津製作所 ターボ分子ポンプ
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4004779B2 (ja) 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP4126212B2 (ja) 2001-11-19 2008-07-30 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
US20040081569A1 (en) 2004-04-29
EP1413761B1 (en) 2008-12-10
KR20040036594A (ko) 2004-04-30
EP1413761A3 (en) 2005-06-15
EP1413761A2 (en) 2004-04-28
JP4484470B2 (ja) 2010-06-16
JP2004162696A (ja) 2004-06-10
KR100997015B1 (ko) 2010-11-25
US7059823B2 (en) 2006-06-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition