DE60317408D1 - Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf - Google Patents

Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf

Info

Publication number
DE60317408D1
DE60317408D1 DE60317408T DE60317408T DE60317408D1 DE 60317408 D1 DE60317408 D1 DE 60317408D1 DE 60317408 T DE60317408 T DE 60317408T DE 60317408 T DE60317408 T DE 60317408T DE 60317408 D1 DE60317408 D1 DE 60317408D1
Authority
DE
Germany
Prior art keywords
substrate
outside surface
nozzle plate
wetting
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60317408T
Other languages
English (en)
Other versions
DE60317408T2 (de
Inventor
Atsushi Ito
Tsuyoshi Eguchi
Toshiya Matsuyama
Yasunori Kobayashi
Yumiko Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002186091A external-priority patent/JP2004025657A/ja
Priority claimed from JP2002328221A external-priority patent/JP4123904B2/ja
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Application granted granted Critical
Publication of DE60317408D1 publication Critical patent/DE60317408D1/de
Publication of DE60317408T2 publication Critical patent/DE60317408T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14225—Finger type piezoelectric element on only one side of the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2002/14306—Flow passage between manifold and chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking
DE60317408T 2002-06-26 2003-06-25 Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf Expired - Lifetime DE60317408T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002186091 2002-06-26
JP2002186091A JP2004025657A (ja) 2002-06-26 2002-06-26 インクジェットヘッド
JP2002328221 2002-11-12
JP2002328221A JP4123904B2 (ja) 2002-11-12 2002-11-12 ノズルプレートの製造方法

Publications (2)

Publication Number Publication Date
DE60317408D1 true DE60317408D1 (de) 2007-12-27
DE60317408T2 DE60317408T2 (de) 2008-03-06

Family

ID=29718442

Family Applications (3)

Application Number Title Priority Date Filing Date
DE60323411T Expired - Lifetime DE60323411D1 (de) 2002-06-26 2003-06-25 Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf
DE60323697T Expired - Lifetime DE60323697D1 (de) 2002-06-26 2003-06-25 Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf
DE60317408T Expired - Lifetime DE60317408T2 (de) 2002-06-26 2003-06-25 Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE60323411T Expired - Lifetime DE60323411D1 (de) 2002-06-26 2003-06-25 Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf
DE60323697T Expired - Lifetime DE60323697D1 (de) 2002-06-26 2003-06-25 Verfahren zur Herstellung einer Düsenplatte für einen Tintenstrahldruckkopf

Country Status (5)

Country Link
US (1) US7086154B2 (de)
EP (3) EP1780021B1 (de)
CN (1) CN1246152C (de)
AT (1) ATE378180T1 (de)
DE (3) DE60323411D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6951778B2 (en) * 2002-10-31 2005-10-04 Hewlett-Packard Development Company, L.P. Edge-sealed substrates and methods for effecting the same
JP2005022179A (ja) * 2003-06-30 2005-01-27 Brother Ind Ltd インクジェットヘッド及びその製造方法並びに撥水処理方法
GB0316934D0 (en) * 2003-07-19 2003-08-27 Xaar Technology Ltd Method of manufacturing a component for droplet deposition apparatus
US7052122B2 (en) * 2004-02-19 2006-05-30 Dimatix, Inc. Printhead
JP4639718B2 (ja) * 2004-09-22 2011-02-23 セイコーエプソン株式会社 液体噴射ヘッドの圧力発生室形成板製造装置、液体噴射ヘッドの圧力発生室形成板製造方法及び液体噴射ヘッド
JP4277810B2 (ja) * 2005-02-21 2009-06-10 ブラザー工業株式会社 ノズルプレートの製造方法及びノズルプレート
EP1910085B1 (de) * 2005-07-01 2012-08-01 Fujifilm Dimatix, Inc. Nicht benetzender überzug auf einem fluidejektor
JP2008062568A (ja) * 2006-09-08 2008-03-21 Seiko Epson Corp 液体噴射ヘッドのアライメント治具及びアライメント装置
JP5357768B2 (ja) 2006-12-01 2013-12-04 フジフィルム ディマティックス， インコーポレイテッド 液体吐出装置上への非湿潤性コーティング
SG176493A1 (en) * 2007-03-12 2011-12-29 Silverbrook Res Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
BRPI0920169A2 (pt) 2008-10-30 2016-08-30 Fujifilm Corp revestimento não-umectante sobre um ejetor de fluido
US8262200B2 (en) 2009-09-15 2012-09-11 Fujifilm Corporation Non-wetting coating on a fluid ejector
US8499453B2 (en) * 2009-11-26 2013-08-06 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
US8454108B2 (en) * 2011-08-25 2013-06-04 Eastman Kodak Company Printhead support structure including thermal insulator
CN103184772B (zh) * 2013-03-19 2016-01-20 辽宁超烁图码科技板业有限公司 一种适用于建筑物外墙的图码保温板的丝网印刷生产方法
EP3342593B1 (de) * 2015-09-28 2019-10-09 Kyocera Corporation Düsenplatte, flüssigkeitsausstosskopf damit und aufzeichnungsvorrichtung
ITUB20159729A1 (it) * 2015-12-29 2017-06-29 St Microelectronics Srl Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido
IT201900007196A1 (it) 2019-05-24 2020-11-24 St Microelectronics Srl Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
DE69227659T2 (de) 1991-02-04 1999-06-17 Seiko Epson Corp Farbstrahldruckkopf und herstellungsverfahren
JP3389256B2 (ja) 1992-02-19 2003-03-24 セイコーエプソン株式会社 ノズルプレートとその製造方法
JP3144948B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 インクジェットプリントヘッド
JP3317308B2 (ja) * 1992-08-26 2002-08-26 セイコーエプソン株式会社 積層型インクジェット記録ヘッド、及びその製造方法
JPH05338180A (ja) 1992-06-05 1993-12-21 Seiko Epson Corp インクジェット記録ヘッドの表面処理方法
JP3169032B2 (ja) * 1993-02-25 2001-05-21 セイコーエプソン株式会社 ノズルプレートとその表面処理方法
US5378504A (en) * 1993-08-12 1995-01-03 Bayard; Michel L. Method for modifying phase change ink jet printing heads to prevent degradation of ink contact angles
JPH0985956A (ja) 1995-09-21 1997-03-31 Rohm Co Ltd インクジェットノズルの形成方法
JP3474389B2 (ja) 1997-02-18 2003-12-08 富士通株式会社 ノズル板の製造装置
US6179978B1 (en) * 1999-02-12 2001-01-30 Eastman Kodak Company Mandrel for forming a nozzle plate having a non-wetting surface of uniform thickness and an orifice wall of tapered contour, and method of making the mandrel
JP3826608B2 (ja) 1999-03-17 2006-09-27 富士写真フイルム株式会社 液体吐出部表面の撥水膜形成
JP3755332B2 (ja) 1999-04-08 2006-03-15 コニカミノルタホールディングス株式会社 インクジェットヘッド用ノズルの形成方法
JP2000318163A (ja) 1999-05-13 2000-11-21 Ricoh Co Ltd インクジェットヘッド及びその製造方法並びにノズル形成部材及びその製造方法
JP2001018398A (ja) 1999-07-09 2001-01-23 Konica Corp インクジェットヘッドのノズルプレートの製造方法
JP2001310471A (ja) 1999-11-17 2001-11-06 Konica Corp ノズルプレートの処理方法及びノズルプレートの製造方法並びにノズルプレート
JP2002113529A (ja) 2000-10-04 2002-04-16 Matsushita Electric Ind Co Ltd プレートの製造方法、並びに該製造方法により製造したプレートを用いたインクジェットヘッド及びインクジェット式記録装置

Also Published As

Publication number Publication date
EP1717036A2 (de) 2006-11-02
DE60317408T2 (de) 2008-03-06
EP1717036B1 (de) 2008-09-03
EP1375154B1 (de) 2007-11-14
DE60323411D1 (de) 2008-10-16
EP1375154A2 (de) 2004-01-02
EP1780021A1 (de) 2007-05-02
EP1375154A3 (de) 2004-04-14
US20040088859A1 (en) 2004-05-13
EP1780021B1 (de) 2008-09-17
DE60323697D1 (de) 2008-10-30
ATE378180T1 (de) 2007-11-15
EP1717036A3 (de) 2006-11-15
US7086154B2 (en) 2006-08-08
CN1472074A (zh) 2004-02-04
CN1246152C (zh) 2006-03-22

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