DE60305985T2 - Thermische Betätigungsvorrichtung mit optimierter Heizelementlänge - Google Patents
Thermische Betätigungsvorrichtung mit optimierter Heizelementlänge Download PDFInfo
- Publication number
- DE60305985T2 DE60305985T2 DE60305985T DE60305985T DE60305985T2 DE 60305985 T2 DE60305985 T2 DE 60305985T2 DE 60305985 T DE60305985 T DE 60305985T DE 60305985 T DE60305985 T DE 60305985T DE 60305985 T2 DE60305985 T2 DE 60305985T2
- Authority
- DE
- Germany
- Prior art keywords
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- uniform
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- resistance
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title claims description 32
- 239000007788 liquid Substances 0.000 claims description 50
- 239000000463 material Substances 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 22
- 239000012530 fluid Substances 0.000 claims description 13
- 238000007639 printing Methods 0.000 claims description 5
- OQPDWFJSZHWILH-UHFFFAOYSA-N [Al].[Al].[Al].[Ti] Chemical compound [Al].[Al].[Al].[Ti] OQPDWFJSZHWILH-UHFFFAOYSA-N 0.000 claims description 4
- 229910021324 titanium aluminide Inorganic materials 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims 2
- 239000003989 dielectric material Substances 0.000 claims 2
- 239000000976 ink Substances 0.000 description 41
- 238000004519 manufacturing process Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 18
- 230000000930 thermomechanical effect Effects 0.000 description 16
- 238000010276 construction Methods 0.000 description 14
- 230000009467 reduction Effects 0.000 description 11
- 238000004377 microelectronic Methods 0.000 description 10
- 238000002161 passivation Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 238000007641 inkjet printing Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000005457 optimization Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000951 Aluminide Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004141 dimensional analysis Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000002664 inhalation therapy Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000012669 liquid formulation Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US50993 | 1979-06-22 | ||
| US10/050,993 US6631979B2 (en) | 2002-01-17 | 2002-01-17 | Thermal actuator with optimized heater length |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60305985D1 DE60305985D1 (de) | 2006-07-27 |
| DE60305985T2 true DE60305985T2 (de) | 2007-01-18 |
Family
ID=21968723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60305985T Expired - Lifetime DE60305985T2 (de) | 2002-01-17 | 2003-01-06 | Thermische Betätigungsvorrichtung mit optimierter Heizelementlänge |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6631979B2 (https=) |
| EP (1) | EP1329319B1 (https=) |
| JP (1) | JP4531336B2 (https=) |
| DE (1) | DE60305985T2 (https=) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6682176B2 (en) * | 1997-07-15 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet printhead chip with nozzle arrangements incorporating spaced actuating arms |
| US7527357B2 (en) | 1997-07-15 | 2009-05-05 | Silverbrook Research Pty Ltd | Inkjet nozzle array with individual feed channel for each nozzle |
| US6742873B1 (en) * | 2001-04-16 | 2004-06-01 | Silverbrook Research Pty Ltd | Inkjet printhead construction |
| AU1139100A (en) | 1998-10-16 | 2000-05-08 | Silverbrook Research Pty Limited | Improvements relating to inkjet printers |
| US6464341B1 (en) * | 2002-02-08 | 2002-10-15 | Eastman Kodak Company | Dual action thermal actuator and method of operating thereof |
| US6688719B2 (en) * | 2002-04-12 | 2004-02-10 | Silverbrook Research Pty Ltd | Thermoelastic inkjet actuator with heat conductive pathways |
| US6644786B1 (en) * | 2002-07-08 | 2003-11-11 | Eastman Kodak Company | Method of manufacturing a thermally actuated liquid control device |
| US6824249B2 (en) * | 2002-08-23 | 2004-11-30 | Eastman Kodak Company | Tapered thermal actuator |
| US6817702B2 (en) * | 2002-11-13 | 2004-11-16 | Eastman Kodak Company | Tapered multi-layer thermal actuator and method of operating same |
| US6755509B2 (en) * | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
| US6767082B1 (en) * | 2003-06-09 | 2004-07-27 | Xerox Corporation | Systems and methods for varying fluid path geometry for fluid ejection system |
| US20050130747A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Video game system including a micromechanical dispensing device |
| US7331650B2 (en) * | 2004-04-08 | 2008-02-19 | Eastman Kodak Company | Printhead having a removable nozzle plate |
| US7374274B2 (en) * | 2004-08-20 | 2008-05-20 | Lexmark International, Inc. | Method of operating a microelectromechanical inkjet ejector to achieve a predetermined mechanical deflection |
| US7283030B2 (en) * | 2004-11-22 | 2007-10-16 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
| US7175258B2 (en) * | 2004-11-22 | 2007-02-13 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
| US7188931B2 (en) * | 2004-11-22 | 2007-03-13 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
| JP2008000960A (ja) * | 2006-06-21 | 2008-01-10 | Canon Inc | 記録ヘッド |
| JP2008055643A (ja) * | 2006-08-29 | 2008-03-13 | Canon Inc | 記録ヘッド |
| ES2393305T3 (es) * | 2006-12-04 | 2012-12-20 | Zamtec Limited | Conjunto de boquilla de chorro de tinta provista de un accionamiento por flexión térmica con una viga activa que define una parte sustancial de una cubierta de la cámara de la boquilla |
| EP2285575B1 (en) * | 2008-05-05 | 2013-09-18 | Zamtec Limited | Thermal bend actuator comprising bent active beam having resistive heating bars |
| US8226213B2 (en) * | 2008-05-05 | 2012-07-24 | Zamtec Limited | Short pulsewidth actuation of thermal bend actuator |
| US7946687B2 (en) * | 2008-05-05 | 2011-05-24 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising bent active beam having resistive heating bars |
| JP5605952B2 (ja) * | 2008-11-26 | 2014-10-15 | フリースケール セミコンダクター インコーポレイテッド | 電気機械トランスデューサデバイスおよびその製造方法 |
| US8513042B2 (en) | 2009-06-29 | 2013-08-20 | Freescale Semiconductor, Inc. | Method of forming an electromechanical transducer device |
| WO2011022750A1 (en) * | 2009-08-25 | 2011-03-03 | Silverbrook Research Pty Ltd | Crack-resistant thermal bend actuator |
| US20110073188A1 (en) * | 2009-09-30 | 2011-03-31 | Marcus Michael A | Microvalve for control of compressed fluids |
| US8864287B2 (en) * | 2011-04-19 | 2014-10-21 | Eastman Kodak Company | Fluid ejection using MEMS composite transducer |
| EP2648005A1 (en) * | 2012-04-02 | 2013-10-09 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Calibration of a mechanical property of SPM cantilevers |
| US9839428B2 (en) | 2013-12-23 | 2017-12-12 | Ethicon Llc | Surgical cutting and stapling instruments with independent jaw control features |
| US10421274B2 (en) | 2014-01-28 | 2019-09-24 | Hewlett-Packard Devleopment Company. L.P. | Printbars and methods of forming printbars |
| KR102115149B1 (ko) | 2016-02-24 | 2020-05-26 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 집적 회로를 포함하는 유체 배출 장치 |
| EP3962748A4 (en) * | 2019-07-24 | 2022-11-23 | Hewlett-Packard Development Company, L.P. | PRINTERS AND CONTROL DEVICES |
| WO2021236071A1 (en) * | 2020-05-19 | 2021-11-25 | Hewlett-Packard Development Company, L.P. | Fluid movement monitoring |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3946398A (en) | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
| SE349676B (https=) | 1971-01-11 | 1972-10-02 | N Stemme | |
| US4296421A (en) | 1978-10-26 | 1981-10-20 | Canon Kabushiki Kaisha | Ink jet recording device using thermal propulsion and mechanical pressure changes |
| JPH0230543A (ja) | 1988-07-21 | 1990-01-31 | Seiko Epson Corp | インクジェットヘッド |
| JPH06267383A (ja) * | 1993-03-16 | 1994-09-22 | Sharp Corp | マイクロリレーおよびその製造方法 |
| US5599695A (en) | 1995-02-27 | 1997-02-04 | Affymetrix, Inc. | Printing molecular library arrays using deprotection agents solely in the vapor phase |
| JP3257340B2 (ja) | 1995-05-24 | 2002-02-18 | 松下電器産業株式会社 | 液体塗布方法、液体塗布装置およびスリットノズル |
| SE9503141D0 (sv) | 1995-09-12 | 1995-09-12 | Siemens Elema Ab | Narkosapparat |
| US5796152A (en) | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
| US5781331A (en) | 1997-01-24 | 1998-07-14 | Roxburgh Ltd. | Optical microshutter array |
| US6435664B2 (en) * | 1997-07-15 | 2002-08-20 | Silverbrook Research Pty Ltd | Nozzle arrangement that includes a thermal actuator for an ink jet printhead |
| AUPO794797A0 (en) | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | A device (MEMS07) |
| AUPP259398A0 (en) | 1998-03-25 | 1998-04-23 | Silverbrook Research Pty Ltd | Image creation method and apparatus (IJ41) |
| US6180427B1 (en) | 1997-07-15 | 2001-01-30 | Silverbrook Research Pty. Ltd. | Method of manufacture of a thermally actuated ink jet including a tapered heater element |
| US6239821B1 (en) | 1997-07-15 | 2001-05-29 | Silverbrook Research Pty Ltd | Direct firing thermal bend actuator ink jet printing mechanism |
| AUPO807497A0 (en) | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | A method of manufacture of an image creation apparatus (IJM23) |
| US6087638A (en) | 1997-07-15 | 2000-07-11 | Silverbrook Research Pty Ltd | Corrugated MEMS heater structure |
| US6254793B1 (en) | 1997-07-15 | 2001-07-03 | Silverbrook Research Pty Ltd | Method of manufacture of high Young's modulus thermoelastic inkjet printer |
| JP3705068B2 (ja) * | 1999-02-23 | 2005-10-12 | 松下電工株式会社 | 半導体装置及びこれを用いた半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー |
| US6211598B1 (en) | 1999-09-13 | 2001-04-03 | Jds Uniphase Inc. | In-plane MEMS thermal actuator and associated fabrication methods |
| JP2001150391A (ja) * | 1999-11-25 | 2001-06-05 | Matsushita Electric Works Ltd | 半導体マイクロアクチュエータ |
| US6474795B1 (en) | 1999-12-21 | 2002-11-05 | Eastman Kodak Company | Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same |
| JP2001290152A (ja) * | 2000-04-06 | 2001-10-19 | Advanced Display Inc | 液晶表示装置 |
| US6561627B2 (en) * | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
-
2002
- 2002-01-17 US US10/050,993 patent/US6631979B2/en not_active Expired - Fee Related
-
2003
- 2003-01-06 DE DE60305985T patent/DE60305985T2/de not_active Expired - Lifetime
- 2003-01-06 EP EP03075024A patent/EP1329319B1/en not_active Expired - Lifetime
- 2003-01-14 JP JP2003005957A patent/JP4531336B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1329319B1 (en) | 2006-06-14 |
| EP1329319A1 (en) | 2003-07-23 |
| US20030137560A1 (en) | 2003-07-24 |
| JP4531336B2 (ja) | 2010-08-25 |
| US6631979B2 (en) | 2003-10-14 |
| DE60305985D1 (de) | 2006-07-27 |
| JP2003260696A (ja) | 2003-09-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |