DE60226554D1 - Belichtungsvorrichtung für ein streifenförmiges Werkstück mit Meanderkorrekturvorrichtung - Google Patents
Belichtungsvorrichtung für ein streifenförmiges Werkstück mit MeanderkorrekturvorrichtungInfo
- Publication number
- DE60226554D1 DE60226554D1 DE60226554T DE60226554T DE60226554D1 DE 60226554 D1 DE60226554 D1 DE 60226554D1 DE 60226554 T DE60226554 T DE 60226554T DE 60226554 T DE60226554 T DE 60226554T DE 60226554 D1 DE60226554 D1 DE 60226554D1
- Authority
- DE
- Germany
- Prior art keywords
- strip
- shaped workpiece
- meander correction
- exposure device
- correction device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/0204—Sensing transverse register of web
- B65H23/0216—Sensing transverse register of web with an element utilising photoelectric effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/032—Controlling transverse register of web
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001281286A JP3741013B2 (ja) | 2001-09-17 | 2001-09-17 | 蛇行修正機構を備えた帯状ワークの露光装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60226554D1 true DE60226554D1 (de) | 2008-06-26 |
Family
ID=19105136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60226554T Expired - Lifetime DE60226554D1 (de) | 2001-09-17 | 2002-09-13 | Belichtungsvorrichtung für ein streifenförmiges Werkstück mit Meanderkorrekturvorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US7020348B2 (de) |
EP (1) | EP1293836B1 (de) |
JP (1) | JP3741013B2 (de) |
KR (1) | KR100544380B1 (de) |
DE (1) | DE60226554D1 (de) |
TW (1) | TW564198B (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007310209A (ja) * | 2006-05-19 | 2007-11-29 | Nsk Ltd | 露光装置 |
JP4888002B2 (ja) * | 2006-09-25 | 2012-02-29 | 凸版印刷株式会社 | アライメント用フィルム固定位置決め装置 |
KR100891553B1 (ko) * | 2007-11-08 | 2009-04-03 | (주)와이티에스 | 선영역 스캔을 이용한 디스플레이용 글라스 기판의 에지점검출방법 |
JP5180624B2 (ja) * | 2008-03-10 | 2013-04-10 | 東レエンジニアリング株式会社 | 帯状ワークの露光方法および露光装置 |
JP5117243B2 (ja) * | 2008-03-27 | 2013-01-16 | 株式会社オーク製作所 | 露光装置 |
EP2163499A1 (de) * | 2008-09-12 | 2010-03-17 | Uhlmann Pac-Systeme GmbH & Co. KG | Vorrichtung zur Bahnkantensteuerung |
KR101829308B1 (ko) * | 2011-04-22 | 2018-02-20 | 동우 화인켐 주식회사 | 필름의 패턴의 사행 제어 장치 |
CN108919607B (zh) * | 2013-07-08 | 2020-10-30 | 株式会社尼康 | 基板处理装置 |
JP6510768B2 (ja) * | 2014-05-23 | 2019-05-08 | 株式会社オーク製作所 | 露光装置 |
CN104096982B (zh) * | 2014-07-02 | 2016-12-07 | 深圳市泰智科技有限公司 | 一种传动皮带轨迹错位的处理方法 |
KR101548299B1 (ko) * | 2015-04-08 | 2015-09-07 | 배종외 | 공작기계 좌표설정장치 및 방법 |
NL2016271B1 (en) * | 2016-02-16 | 2017-08-22 | Liteq B V | Lithographic apparatus and method for preventing peripheral exposure of a substrate. |
KR102469408B1 (ko) * | 2017-03-03 | 2022-11-22 | 스미또모 가가꾸 가부시키가이샤 | 결함 검사 시스템, 필름 제조 장치, 필름 제조 방법, 인자 장치 및 인자 방법 |
CN111135984A (zh) * | 2020-02-13 | 2020-05-12 | 天津百利泰为科技有限公司 | 一种视觉点胶系统及利用该系统的实现高精度点胶方法 |
KR102621589B1 (ko) | 2021-09-27 | 2024-01-05 | 크린테크 주식회사 | 소음기 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4485982A (en) * | 1982-11-24 | 1984-12-04 | Xerox Corporation | Web tracking system |
JPS6180282A (ja) * | 1984-09-28 | 1986-04-23 | Canon Inc | 画像表示装置 |
US4975716A (en) * | 1988-01-29 | 1990-12-04 | Konica Corporation | Thermal development image forming apparatus |
EP0604052B1 (de) * | 1992-12-23 | 2001-08-08 | AT&T Corp. | Verfahren und System zum Lokalisieren von Objekten mit einer Unterpixelpräzision |
US5818976A (en) * | 1993-10-25 | 1998-10-06 | Visioneer, Inc. | Method and apparatus for document skew and size/shape detection |
US5510877A (en) * | 1994-04-20 | 1996-04-23 | Xerox Corporation | Method and apparatus for lateral registration control in color printing |
JPH0970731A (ja) * | 1995-09-07 | 1997-03-18 | Ushio Inc | 搬送ステージ |
JP3307295B2 (ja) | 1997-09-29 | 2002-07-24 | ウシオ電機株式会社 | 帯状ワークの搬送・位置決め方法および装置 |
JPH11334953A (ja) * | 1998-05-26 | 1999-12-07 | Ushio Inc | 帯状ワークの搬送・加工装置 |
JP3417313B2 (ja) * | 1998-09-28 | 2003-06-16 | ウシオ電機株式会社 | 帯状ワークの露光装置 |
JP4610687B2 (ja) * | 1999-11-15 | 2011-01-12 | コニカミノルタホールディングス株式会社 | 原稿読み取り装置 |
JP3409769B2 (ja) * | 2000-03-17 | 2003-05-26 | ウシオ電機株式会社 | 帯状ワークの露光装置 |
-
2001
- 2001-09-17 JP JP2001281286A patent/JP3741013B2/ja not_active Expired - Fee Related
-
2002
- 2002-07-24 TW TW091116492A patent/TW564198B/zh not_active IP Right Cessation
- 2002-09-04 KR KR1020020053182A patent/KR100544380B1/ko active IP Right Grant
- 2002-09-13 DE DE60226554T patent/DE60226554D1/de not_active Expired - Lifetime
- 2002-09-13 EP EP02020696A patent/EP1293836B1/de not_active Expired - Fee Related
- 2002-09-16 US US10/243,710 patent/US7020348B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20030053678A1 (en) | 2003-03-20 |
JP2003091069A (ja) | 2003-03-28 |
EP1293836A2 (de) | 2003-03-19 |
US7020348B2 (en) | 2006-03-28 |
TW564198B (en) | 2003-12-01 |
KR20030024575A (ko) | 2003-03-26 |
EP1293836A3 (de) | 2007-02-28 |
EP1293836B1 (de) | 2008-05-14 |
KR100544380B1 (ko) | 2006-01-23 |
JP3741013B2 (ja) | 2006-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |