DE60309699D1 - Ein bewegbares mikroelektronisches gerät - Google Patents

Ein bewegbares mikroelektronisches gerät

Info

Publication number
DE60309699D1
DE60309699D1 DE60309699T DE60309699T DE60309699D1 DE 60309699 D1 DE60309699 D1 DE 60309699D1 DE 60309699 T DE60309699 T DE 60309699T DE 60309699 T DE60309699 T DE 60309699T DE 60309699 D1 DE60309699 D1 DE 60309699D1
Authority
DE
Germany
Prior art keywords
movable
microelectronic device
microelectronic
movable microelectronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60309699T
Other languages
English (en)
Other versions
DE60309699T2 (de
Inventor
Robert G Walmsley
Donald J Milligan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Application granted granted Critical
Publication of DE60309699D1 publication Critical patent/DE60309699D1/de
Publication of DE60309699T2 publication Critical patent/DE60309699T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/02—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon
    • G11B33/08—Insulation or absorption of undesired vibrations or sounds
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Micromachines (AREA)
  • Motorcycle And Bicycle Frame (AREA)
DE60309699T 2002-05-28 2003-05-27 Ein bewegbares mikroelektronisches gerät Expired - Lifetime DE60309699T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US157254 2002-05-28
US10/157,254 US6882019B2 (en) 2002-05-28 2002-05-28 Movable micro-electromechanical device
PCT/US2003/016805 WO2003100778A1 (en) 2002-05-28 2003-05-27 A movable micro-electromechanical device

Publications (2)

Publication Number Publication Date
DE60309699D1 true DE60309699D1 (de) 2006-12-28
DE60309699T2 DE60309699T2 (de) 2007-09-13

Family

ID=29582421

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60309699T Expired - Lifetime DE60309699T2 (de) 2002-05-28 2003-05-27 Ein bewegbares mikroelektronisches gerät

Country Status (8)

Country Link
US (1) US6882019B2 (de)
EP (1) EP1508142B1 (de)
JP (1) JP4275066B2 (de)
CN (1) CN1656549B (de)
AU (1) AU2003234674A1 (de)
DE (1) DE60309699T2 (de)
TW (1) TWI310020B (de)
WO (1) WO2003100778A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6952041B2 (en) * 2003-07-25 2005-10-04 Robert Bosch Gmbh Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
US7549064B2 (en) * 2005-05-10 2009-06-16 Hewlett-Packard Development Company, L.P. Secure circuit assembly
EP2003645A4 (de) * 2006-03-31 2009-05-27 Pioneer Corp Informationsspeichervorrichtung, die eine sonde einsetzt
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US20080074792A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Control scheme for a memory device
US7983138B2 (en) * 2006-10-11 2011-07-19 Seagate Technology Llc Surface spacing using rigid spacers
US7903532B2 (en) * 2006-10-11 2011-03-08 Seagate Technology Llc Elevated electrodes for probe position sensing
US7924692B2 (en) * 2007-01-18 2011-04-12 Seagate Technology Llc Actuator assembly providing two-dimensional movement of a moveable element in a data storage device
US20100110849A1 (en) * 2007-03-19 2010-05-06 Pioneer Corporation Information recording/reproducing device and method
US7948337B2 (en) * 2007-05-31 2011-05-24 Seagate Technology Llc Simultaneous rotational control using offset linear actuators
US20090190254A1 (en) * 2008-01-29 2009-07-30 Seagate Technology Llc Micromachined mover
US20130320466A1 (en) * 2012-05-31 2013-12-05 Analog Devices, Inc. Package for Damping Inertial Sensor
FR3046223B1 (fr) * 2015-12-23 2018-02-16 Safran Systeme de suspension d'une masse mobile comprenant des moyens de liaison de la masse mobile a linearite optimisee

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940007518B1 (ko) * 1989-03-15 1994-08-18 인터내셔널 비지네스 머신즈 코포레이션 디스크 파일 조립 방법
US5557596A (en) 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
US6735163B2 (en) 2001-03-02 2004-05-11 Hewlett-Packard Development Company, L.P. Ultra-high density storage device with resonant scanning micromover
US6583524B2 (en) 2001-03-07 2003-06-24 Hewlett-Packard Company Micro-mover with balanced dynamics
US6643248B2 (en) 2001-04-16 2003-11-04 Hewlett-Packard Development Company, L.P. Data storage device

Also Published As

Publication number Publication date
CN1656549A (zh) 2005-08-17
DE60309699T2 (de) 2007-09-13
JP2005527929A (ja) 2005-09-15
TWI310020B (en) 2009-05-21
JP4275066B2 (ja) 2009-06-10
TW200306944A (en) 2003-12-01
AU2003234674A1 (en) 2003-12-12
EP1508142A1 (de) 2005-02-23
CN1656549B (zh) 2010-12-29
US20030222430A1 (en) 2003-12-04
EP1508142B1 (de) 2006-11-15
US6882019B2 (en) 2005-04-19
WO2003100778A1 (en) 2003-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition