DE60222073D1 - Verfahren zu Modifizierung einer Oberfläche eines Tiegels aus Quarzglas - Google Patents

Verfahren zu Modifizierung einer Oberfläche eines Tiegels aus Quarzglas

Info

Publication number
DE60222073D1
DE60222073D1 DE60222073T DE60222073T DE60222073D1 DE 60222073 D1 DE60222073 D1 DE 60222073D1 DE 60222073 T DE60222073 T DE 60222073T DE 60222073 T DE60222073 T DE 60222073T DE 60222073 D1 DE60222073 D1 DE 60222073D1
Authority
DE
Germany
Prior art keywords
modifying
quartz glass
glass crucible
crucible
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60222073T
Other languages
English (en)
Other versions
DE60222073T2 (de
Inventor
Toshio Tsujimoto
Yoshiyuki Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Super Quartz Corp
Original Assignee
Japan Super Quartz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Super Quartz Corp filed Critical Japan Super Quartz Corp
Publication of DE60222073D1 publication Critical patent/DE60222073D1/de
Application granted granted Critical
Publication of DE60222073T2 publication Critical patent/DE60222073T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Silicon Compounds (AREA)
DE60222073T 2001-10-16 2002-10-09 Verfahren zu Modifizierung einer Oberfläche eines Tiegels aus Quarzglas Expired - Lifetime DE60222073T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001318032 2001-10-16
JP2001318032 2001-10-16
JP2002157232A JP4288646B2 (ja) 2001-10-16 2002-05-30 石英ガラスルツボの表面改質方法と表面改質ルツボ
JP2002157232 2002-05-30

Publications (2)

Publication Number Publication Date
DE60222073D1 true DE60222073D1 (de) 2007-10-11
DE60222073T2 DE60222073T2 (de) 2008-05-21

Family

ID=26623917

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60222073T Expired - Lifetime DE60222073T2 (de) 2001-10-16 2002-10-09 Verfahren zu Modifizierung einer Oberfläche eines Tiegels aus Quarzglas

Country Status (6)

Country Link
EP (1) EP1304399B1 (de)
JP (1) JP4288646B2 (de)
KR (2) KR100897016B1 (de)
CN (1) CN1315748C (de)
DE (1) DE60222073T2 (de)
TW (2) TWI262968B (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6875515B2 (en) * 2002-05-10 2005-04-05 General Electric Company Fused quartz article having controlled devitrification
DE10327496A1 (de) * 2003-06-17 2005-01-20 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Quarzglasbauteils mit hoher thermischer Stabilität
US7497907B2 (en) * 2004-07-23 2009-03-03 Memc Electronic Materials, Inc. Partially devitrified crucible
JP2007091562A (ja) * 2005-09-30 2007-04-12 Toshiba Ceramics Co Ltd 結晶化促進コーティング用シリカガラスルツボ
US20070084400A1 (en) * 2005-10-19 2007-04-19 General Electric Company Quartz glass crucible and method for treating surface of quartz glass crucible
JP4788445B2 (ja) * 2006-04-04 2011-10-05 株式会社Ｓｕｍｃｏ シリコン単結晶の引上げ方法
JP4807130B2 (ja) * 2006-04-04 2011-11-02 株式会社Ｓｕｍｃｏ シリコン単結晶の引上げ方法
US9139932B2 (en) * 2006-10-18 2015-09-22 Richard Lee Hansen Quartz glass crucible and method for treating surface of quartz glass crucible
JP5108803B2 (ja) * 2009-02-16 2012-12-26 信越石英株式会社 シリカ容器の製造方法
JP5449808B2 (ja) * 2009-03-11 2014-03-19 信越石英株式会社 シリカ容器及びその製造方法
DE102009013715B4 (de) * 2009-03-20 2013-07-18 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Quarzglaskörpers, insbesondere eines Quarzglastiegels
JP5130323B2 (ja) * 2010-05-07 2013-01-30 信越石英株式会社 多結晶シリコンインゴット製造用角形シリカ容器及びその製造方法
JP5610570B2 (ja) 2010-07-20 2014-10-22 株式会社Sumco シリカガラスルツボ、シリコンインゴットの製造方法
CN102453956B (zh) * 2010-10-27 2016-03-23 杭州先进石英材料有限公司 一种石英玻璃坩埚及其制备方法
CN102031488A (zh) * 2010-12-23 2011-04-27 福建福晶科技股份有限公司 一种提高膜层损伤阈值的坩埚
JP5793034B2 (ja) * 2011-09-08 2015-10-14 三菱マテリアル電子化成株式会社 シリコンインゴット鋳造用積層ルツボ及びその製造方法
JP5793036B2 (ja) * 2011-09-08 2015-10-14 三菱マテリアル電子化成株式会社 シリコンインゴット鋳造用積層ルツボ及びその製造方法
JP5793035B2 (ja) * 2011-09-08 2015-10-14 三菱マテリアル電子化成株式会社 シリコンインゴット鋳造用積層ルツボ及びその製造方法
CN103130512B (zh) * 2011-11-25 2014-10-15 浙江昱辉阳光能源有限公司 一种氮化硅坩埚及其制备方法
DE102012100147A1 (de) 2012-01-10 2012-12-13 Schott Solar Ag Verfahren zur Herstellung von mono-, quasimono- oder multikristallinen Metall- oder Halbmetallkörpern
JP5487259B2 (ja) * 2012-08-07 2014-05-07 信越石英株式会社 シリカ容器
CN103849925A (zh) * 2012-11-30 2014-06-11 王金青 一种改进的铸锭用坩埚
WO2014113617A1 (en) 2013-01-21 2014-07-24 Innovative Finishes LLC Refurbished component, electronic device including the same, and method of refurbishing a component of an electronic device
US11162186B2 (en) 2016-09-23 2021-11-02 Sumco Corporation Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single crystal using quartz glass crucible
JP6743753B2 (ja) 2017-04-27 2020-08-19 株式会社Sumco シリコン単結晶の引上げ方法
DE112018002317B4 (de) 2017-05-02 2024-08-22 Sumco Corporation Quarzglastiegel und herstellungsverfahren dafür
EP3428132B1 (de) 2017-07-10 2023-08-30 Heraeus Quarzglas GmbH & Co. KG Quarzglasbauteil mit hoher thermischer stabilität, halbzeug dafür und verfahren zur herstellung desselben
CN111936677B (zh) * 2018-02-23 2022-07-15 胜高股份有限公司 石英玻璃坩埚
CN108455874A (zh) * 2018-03-27 2018-08-28 晶科能源有限公司 一种多晶硅铸锭石英坩埚的涂层制作方法
JP7375833B2 (ja) * 2020-01-10 2023-11-08 株式会社Sumco 石英ガラスルツボ
JP2022180696A (ja) * 2021-05-25 2022-12-07 株式会社Sumco 石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法
CN114436506B (zh) * 2021-12-27 2023-11-24 深圳众诚达应用材料股份有限公司 一种玻璃粉熔炼方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4102666A (en) * 1968-02-22 1978-07-25 Heraeus-Schott Quarzschmelze Gmbh Method of surface crystallizing quartz
US5389582A (en) * 1985-11-06 1995-02-14 Loxley; Ted A. Cristobalite reinforcement of quartz glass
FR2704309B1 (fr) * 1993-04-19 1995-06-09 Quartz Silice Sa Creuset comportant un revetement protecteur en couche mince, procede de fabrication et applications.
US6106610A (en) * 1997-09-30 2000-08-22 Heraeus Quarzglas Gmbh & Co. Kg Quartz glass crucible for producing silicone single crystal and method for producing the crucible
CN1072277C (zh) * 1997-11-18 2001-10-03 中国科学院上海技术物理研究所 一种石英坩埚/管涂碳方法
DE10041582B4 (de) * 2000-08-24 2007-01-18 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel sowie Verfahren zur Herstellung desselben
EP1370495B1 (de) * 2001-03-08 2006-11-15 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung eines quarzglastiegels

Also Published As

Publication number Publication date
KR20030031846A (ko) 2003-04-23
TWI293653B (en) 2008-02-21
EP1304399A1 (de) 2003-04-23
KR100897016B1 (ko) 2009-05-14
TWI262968B (en) 2006-10-01
CN1417387A (zh) 2003-05-14
JP4288646B2 (ja) 2009-07-01
TW200634183A (en) 2006-10-01
KR20090028743A (ko) 2009-03-19
CN1315748C (zh) 2007-05-16
JP2003192391A (ja) 2003-07-09
KR100932162B1 (ko) 2009-12-16
EP1304399B1 (de) 2007-08-29
DE60222073T2 (de) 2008-05-21

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