DE60317417D1 - Reformierverfahren eines Quarzglastiegels - Google Patents
Reformierverfahren eines QuarzglastiegelsInfo
- Publication number
- DE60317417D1 DE60317417D1 DE60317417T DE60317417T DE60317417D1 DE 60317417 D1 DE60317417 D1 DE 60317417D1 DE 60317417 T DE60317417 T DE 60317417T DE 60317417 T DE60317417 T DE 60317417T DE 60317417 D1 DE60317417 D1 DE 60317417D1
- Authority
- DE
- Germany
- Prior art keywords
- quartz glass
- glass crucible
- reforming method
- reforming
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
- C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002237039 | 2002-08-15 | ||
JP2002237039 | 2002-08-15 | ||
JP2003021196A JP4300334B2 (ja) | 2002-08-15 | 2003-01-29 | 石英ガラスルツボの再生方法 |
JP2003021196 | 2003-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60317417D1 true DE60317417D1 (de) | 2007-12-27 |
DE60317417T2 DE60317417T2 (de) | 2008-09-18 |
Family
ID=31190375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60317417T Expired - Lifetime DE60317417T2 (de) | 2002-08-15 | 2003-06-30 | Reformierverfahren eines Quarzglastiegels |
Country Status (5)
Country | Link |
---|---|
US (1) | US7905112B2 (de) |
EP (1) | EP1391542B1 (de) |
JP (1) | JP4300334B2 (de) |
CN (1) | CN1323964C (de) |
DE (1) | DE60317417T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4300333B2 (ja) * | 2002-03-14 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | リング状アークによる石英ガラスルツボの製造方法と装置およびその石英ガラスルツボ |
JP4300334B2 (ja) | 2002-08-15 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの再生方法 |
JP2010076949A (ja) * | 2008-09-24 | 2010-04-08 | Japan Siper Quarts Corp | 石英ガラスルツボの製造方法と装置、および石英ガラスルツボ |
JP5377930B2 (ja) * | 2008-10-31 | 2013-12-25 | 株式会社Sumco | シリコン単結晶引上用石英ガラスルツボの製造方法 |
JP5415297B2 (ja) * | 2009-01-08 | 2014-02-12 | 株式会社Sumco | 石英ガラスルツボ製造装置 |
JP5397857B2 (ja) * | 2009-10-20 | 2014-01-22 | 株式会社Sumco | 石英ガラスルツボの製造方法および製造装置 |
DE102010008162B4 (de) * | 2010-02-16 | 2017-03-16 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung von Quarzglas für einen Quarzglastiegel |
JP5500687B2 (ja) * | 2010-12-02 | 2014-05-21 | 株式会社Sumco | シリカガラスルツボの製造方法および製造装置 |
JP5773382B2 (ja) * | 2010-12-29 | 2015-09-02 | 株式会社Sumco | シリカガラスルツボ及びその製造方法 |
US9193620B2 (en) * | 2011-03-31 | 2015-11-24 | Raytheon Company | Fused silica body with vitreous silica inner layer, and method for making same |
US9221709B2 (en) | 2011-03-31 | 2015-12-29 | Raytheon Company | Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same |
KR101202701B1 (ko) | 2011-04-15 | 2012-11-19 | 쟈판 스파 쿼츠 가부시키가이샤 | 실리카 유리 도가니의 제조 방법 및 제조 장치 |
JP6104837B2 (ja) * | 2014-03-17 | 2017-03-29 | クアーズテック株式会社 | 石英ガラスルツボの製造方法 |
CN114671599B (zh) | 2022-03-29 | 2022-11-22 | 锦州佑鑫石英科技有限公司 | 大外径直拉单晶用石英坩埚的制备方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2089690A (en) | 1934-12-24 | 1937-08-10 | Yngve R Cornelius | Electric furnace |
US2993079A (en) | 1957-04-15 | 1961-07-18 | Owens Illinois Glass Co | Electric heating method and apparatus for uniformly heating glass |
US3422206A (en) * | 1965-04-07 | 1969-01-14 | Union Carbide Corp | Method and apparatus for melting metal in an electric furnace |
US3520979A (en) | 1968-02-26 | 1970-07-21 | Penelectro Ltd | Electrode circuit for hex electric furnace |
US3806621A (en) * | 1971-05-17 | 1974-04-23 | Owens Corning Fiberglass Corp | Electric furnace |
US3997316A (en) * | 1976-01-19 | 1976-12-14 | Ppg Industries, Inc. | Use of crossed electrode pairs in a glassmaking furnace |
JPS5849910B2 (ja) | 1979-08-21 | 1983-11-07 | セイコーインスツルメンツ株式会社 | ハンデイコピ− |
US4531218A (en) * | 1983-06-17 | 1985-07-23 | Owens-Corning Fiberglas Corporation | Glass melting furnace |
US4911896A (en) | 1986-07-24 | 1990-03-27 | General Electric Company | Fused quartz member for use in semiconductor manufacture |
JPH01148718A (ja) | 1987-12-03 | 1989-06-12 | Shin Etsu Handotai Co Ltd | 石英るつぼの製造方法 |
US4935046A (en) | 1987-12-03 | 1990-06-19 | Shin-Etsu Handotai Company, Limited | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
JPH0653634B2 (ja) | 1989-01-13 | 1994-07-20 | 三菱マテリアル株式会社 | シリコン単結晶引上げ用石英ルツボの再生方法 |
US5120342A (en) * | 1991-03-07 | 1992-06-09 | Glasstech, Inc. | High shear mixer and glass melting apparatus |
JPH0812359A (ja) | 1994-06-30 | 1996-01-16 | Shinetsu Quartz Prod Co Ltd | 石英ガラスルツボ及びその製造方法 |
CN1189546A (zh) * | 1996-12-17 | 1998-08-05 | 瓦克硅电子半导体材料股份公司 | 硅单晶的生产方法以及实现该方法的加热装置 |
JP2736969B2 (ja) | 1997-03-21 | 1998-04-08 | 三菱マテリアルクォーツ株式会社 | 石英ルツボ製造装置 |
US6044667A (en) * | 1997-08-25 | 2000-04-04 | Guardian Fiberglass, Inc. | Glass melting apparatus and method |
JPH11236233A (ja) * | 1998-02-23 | 1999-08-31 | Sumikin Sekiei Kk | 石英るつぼの製造方法 |
JP4217844B2 (ja) * | 1998-06-18 | 2009-02-04 | ジャパンスーパークォーツ株式会社 | 複合ルツボとその製造方法および再生方法 |
US6143073A (en) * | 1998-11-19 | 2000-11-07 | Heraeus Shin-Etsu America | Methods and apparatus for minimizing white point defects in quartz glass crucibles |
EP1094039B1 (de) * | 1999-04-06 | 2015-04-29 | Wacom Manufacturing Co., Ltd. | Verfahren zur herstellung eines quartzglastiegels |
JP3672460B2 (ja) * | 1999-06-18 | 2005-07-20 | 東芝セラミックス株式会社 | シリコン単結晶引上用石英ガラスルツボの製造方法 |
DE19962449C2 (de) * | 1999-12-22 | 2003-09-25 | Heraeus Quarzglas | Quarzglastiegel und Verfahren für seine Herstellung |
JP4424824B2 (ja) * | 2000-05-30 | 2010-03-03 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの製造方法 |
JP4592037B2 (ja) * | 2000-05-31 | 2010-12-01 | 信越石英株式会社 | 石英ガラスルツボの製造方法 |
JP4300333B2 (ja) * | 2002-03-14 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | リング状アークによる石英ガラスルツボの製造方法と装置およびその石英ガラスルツボ |
JP4300334B2 (ja) | 2002-08-15 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの再生方法 |
JP2010076949A (ja) * | 2008-09-24 | 2010-04-08 | Japan Siper Quarts Corp | 石英ガラスルツボの製造方法と装置、および石英ガラスルツボ |
-
2003
- 2003-01-29 JP JP2003021196A patent/JP4300334B2/ja not_active Expired - Fee Related
- 2003-06-30 DE DE60317417T patent/DE60317417T2/de not_active Expired - Lifetime
- 2003-06-30 EP EP03014432A patent/EP1391542B1/de not_active Expired - Lifetime
- 2003-07-29 US US10/628,350 patent/US7905112B2/en not_active Expired - Lifetime
- 2003-08-15 CN CNB031540848A patent/CN1323964C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60317417T2 (de) | 2008-09-18 |
CN1486946A (zh) | 2004-04-07 |
US7905112B2 (en) | 2011-03-15 |
JP4300334B2 (ja) | 2009-07-22 |
EP1391542B1 (de) | 2007-11-14 |
JP2004131362A (ja) | 2004-04-30 |
CN1323964C (zh) | 2007-07-04 |
US20040050099A1 (en) | 2004-03-18 |
EP1391542A1 (de) | 2004-02-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NO20035669D0 (no) | Kvartsglassdigel og fremgangsmåte for fremstilling derav | |
SG106151A1 (en) | Quartz glass crucible for pulling up single silicon crystal and production method therefor | |
EP1632592A4 (de) | Quarzglastiegel zum hochziehen von siliciumeinkristall und herstellungsverfahren dafür | |
NO20042159L (no) | Cellokulturprosess | |
AU2003273203A8 (en) | A method of updating a data source from transformed data | |
HUP0402415A3 (en) | Method for large scale production of virus antigen | |
HK1078137A1 (en) | Optical substrate and method of making | |
EP1408015B8 (de) | Quarzglastiegel, sein Herstellungsverfahren und seine Verwendung | |
DE60317417D1 (de) | Reformierverfahren eines Quarzglastiegels | |
DE60222073D1 (de) | Verfahren zu Modifizierung einer Oberfläche eines Tiegels aus Quarzglas | |
DE602004029057D1 (de) | Quarzglastiegel zum ziehen von siliciumeinkristall | |
EP1516858A4 (de) | Verfahren zur herstellung von flachglas | |
DE60220112D1 (de) | Verfahren und Zwischenprodukt zur Herstellung eines Tiegels aus Quarzglas | |
DE602004007970D1 (de) | Quarzglastiegel | |
DE60333142D1 (de) | Verfahren zur Modifikation der Oberfläche eines Quarzglastiegels | |
NO20033920L (no) | Fremgangsmåte for fremstilling av en kvartsglassdigel | |
NO20033207D0 (no) | Fremgangsmåte og reaktor for fremstilling av höyrent silisium, samt anvendelse av fremgangsmåten og reaktoren ved fremstilling av höyrentsilisium fra uraffinert silisium | |
DE50212806D1 (de) | Verfahren zur herstellung eines brillenglases | |
AU2003274577A8 (en) | Method for the manufacture of a display | |
NO20023462L (no) | Fremgangsmåte og anordning for å produsere en kvartsglassdigel for å dra opp enkeltkrystallsilisium | |
FI20035080A0 (fi) | Menetelmä reunamuotilla taivutettavan lasilevyn taivutuspussikkuuden mittaamiseksi | |
IL148376A0 (en) | A method for the production of pure silica | |
DE60137401D1 (de) | Verfahren zur Selektion von Quartzglassubstraten | |
DE60330622D1 (de) | Verfahren zur Herstellung eines Quarzglastiegels | |
EP1690840A4 (de) | Herstellungsverfahren für schwer elektrisierbares glassubstrat und danach erhaltenes schwer elektrisierbares glassubstrat |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |