DE602004007970D1 - Quarzglastiegel - Google Patents

Quarzglastiegel

Info

Publication number
DE602004007970D1
DE602004007970D1 DE602004007970T DE602004007970T DE602004007970D1 DE 602004007970 D1 DE602004007970 D1 DE 602004007970D1 DE 602004007970 T DE602004007970 T DE 602004007970T DE 602004007970 T DE602004007970 T DE 602004007970T DE 602004007970 D1 DE602004007970 D1 DE 602004007970D1
Authority
DE
Germany
Prior art keywords
quartz glass
glass crucible
crucible
quartz
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004007970T
Other languages
English (en)
Other versions
DE602004007970T2 (de
Inventor
Yoshiyuki Tsuji
Toshio Tsujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Super Quartz Corp
Original Assignee
Japan Super Quartz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Super Quartz Corp filed Critical Japan Super Quartz Corp
Publication of DE602004007970D1 publication Critical patent/DE602004007970D1/de
Application granted granted Critical
Publication of DE602004007970T2 publication Critical patent/DE602004007970T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/108—Including a solid member other than seed or product contacting the liquid [e.g., crucible, immersed heating element]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Surface Treatment Of Glass (AREA)
DE602004007970T 2003-03-28 2004-03-24 Quarzglastiegel Expired - Lifetime DE602004007970T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003092146 2003-03-28
JP2003092146A JP4330363B2 (ja) 2003-03-28 2003-03-28 石英ガラスルツボ

Publications (2)

Publication Number Publication Date
DE602004007970D1 true DE602004007970D1 (de) 2007-09-20
DE602004007970T2 DE602004007970T2 (de) 2008-04-30

Family

ID=32821628

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004007970T Expired - Lifetime DE602004007970T2 (de) 2003-03-28 2004-03-24 Quarzglastiegel

Country Status (7)

Country Link
US (2) US7695787B2 (de)
EP (1) EP1462421B1 (de)
JP (1) JP4330363B2 (de)
KR (1) KR100919451B1 (de)
CN (1) CN1332071C (de)
DE (1) DE602004007970T2 (de)
TW (1) TWI258458B (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030183161A1 (en) * 2002-03-29 2003-10-02 Japan Super Quartz Corporation Surface modified quartz glass crucible and its modification process
JP4994647B2 (ja) * 2005-11-30 2012-08-08 ジャパンスーパークォーツ株式会社 結晶化し易い石英ガラス部材とその用途
JP4863927B2 (ja) * 2007-04-27 2012-01-25 信越石英株式会社 シリコン単結晶引上用石英ガラスルツボおよびそれを使用したシリコン単結晶の製造方法
JP5229778B2 (ja) 2007-09-28 2013-07-03 株式会社Ｓｕｍｃｏ シリコン単結晶引き上げ用石英ガラスルツボの製造方法
JP4799536B2 (ja) * 2007-12-14 2011-10-26 ジャパンスーパークォーツ株式会社 大径のシリコン単結晶インゴット中のピンホール欠陥の低減を可能とする大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ
US9150447B2 (en) * 2008-02-29 2015-10-06 Japan Super Quartz Corporation Silica crucible for pulling silicon single crystal and method of producing the same
CN101555612A (zh) * 2008-04-11 2009-10-14 深圳富泰宏精密工业有限公司 外壳的表面处理方法
US8496752B2 (en) * 2009-09-02 2013-07-30 Heraeus Shin-Etsu America, Inc. Method and apparatus for venting gas between a crucible and a susceptor
EP2410081B1 (de) * 2009-12-14 2014-11-19 Japan Super Quartz Corporation Verfahren zur herstellung eines siliciumglastiegels
JP5344767B2 (ja) * 2010-06-21 2013-11-20 信越石英株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法
CN102560304B (zh) * 2010-12-28 2014-02-19 鸿富锦精密工业（深圳）有限公司 非晶合金表面处理方法及采用该方法制得的非晶合金件
JP5773382B2 (ja) * 2010-12-29 2015-09-02 株式会社Sumco シリカガラスルツボ及びその製造方法
EP2522764A3 (de) * 2011-05-12 2013-08-14 Korea Institute of Energy Research Doppelter Tiegel zum Schmelzen von Silizium mit Recycle-Funktion und Herstellungsvorrichtung für Silizium-dünnfilm damit
CN103668438A (zh) * 2012-08-30 2014-03-26 上海杰姆斯电子材料有限公司 一种直拉法制备单晶硅所使用的石墨坩埚
CN104685114B (zh) * 2012-09-28 2017-07-28 联合材料公司 蓝宝石单晶生长用坩锅和蓝宝石单晶生长用坩锅的制造方法
CN102941627B (zh) * 2012-11-15 2015-04-08 江西赛维Ldk太阳能高科技有限公司 一种微孔平板的应用方法、及微孔玻璃的制备方法
US20140352605A1 (en) * 2013-05-31 2014-12-04 Heraeus Shin-Etsu America, Inc. Method for making barium-doped crucible and crucible made thereby
JP6324837B2 (ja) * 2014-07-31 2018-05-16 信越石英株式会社 単結晶シリコン引き上げ用石英ガラスるつぼの製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2947114A (en) * 1957-05-09 1960-08-02 Engelhard Ind Inc Composite material
US4010064A (en) * 1975-05-27 1977-03-01 International Business Machines Corporation Controlling the oxygen content of Czochralski process of silicon crystals by sandblasting silica vessel
US4403955A (en) * 1982-02-22 1983-09-13 General Signal Corporation Receptacle for support of a melt containing crucible
JP2962976B2 (ja) 1993-08-10 1999-10-12 東芝セラミックス株式会社 石英ガラスルツボ
US5976247A (en) * 1995-06-14 1999-11-02 Memc Electronic Materials, Inc. Surface-treated crucibles for improved zero dislocation performance
JPH10203893A (ja) 1997-01-20 1998-08-04 Mitsubishi Materials Shilicon Corp 高強度石英ガラスルツボ及びその製造方法
DE19713014C2 (de) * 1997-03-27 1999-01-21 Heraeus Quarzglas Bauteil aus Quarzglas für die Verwendung bei der Halbleiterherstellung
US5913975A (en) * 1998-02-03 1999-06-22 Memc Electronic Materials, Inc. Crucible and method of preparation thereof
JP4217844B2 (ja) * 1998-06-18 2009-02-04 ジャパンスーパークォーツ株式会社 複合ルツボとその製造方法および再生方法
DE19917288C2 (de) * 1999-04-16 2001-06-28 Heraeus Quarzglas Quarzglas-Tiegel
JP2001089198A (ja) 1999-09-22 2001-04-03 Asahi Glass Co Ltd 半導体装置用石英ガラス治具およびその製造方法
DE19962449C2 (de) * 1999-12-22 2003-09-25 Heraeus Quarzglas Quarzglastiegel und Verfahren für seine Herstellung
JP3717151B2 (ja) 2000-03-13 2005-11-16 東芝セラミックス株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法
KR100547743B1 (ko) * 2000-09-28 2006-01-31 신에쯔 세끼에이 가부시키가이샤 반도체공업용 실리카유리지그 및 그 제조방법
US6479108B2 (en) * 2000-11-15 2002-11-12 G.T. Equipment Technologies, Inc. Protective layer for quartz crucibles used for silicon crystallization
US20030024467A1 (en) * 2001-08-02 2003-02-06 Memc Electronic Materials, Inc. Method of eliminating near-surface bubbles in quartz crucibles
JP4076416B2 (ja) 2002-09-20 2008-04-16 コバレントマテリアル株式会社 石英ルツボとその製造方法

Also Published As

Publication number Publication date
EP1462421A2 (de) 2004-09-29
TWI258458B (en) 2006-07-21
KR20040086052A (ko) 2004-10-08
JP2004299927A (ja) 2004-10-28
EP1462421A3 (de) 2006-01-04
EP1462421B1 (de) 2007-08-08
US20040187771A1 (en) 2004-09-30
US7695787B2 (en) 2010-04-13
JP4330363B2 (ja) 2009-09-16
US20100154703A1 (en) 2010-06-24
DE602004007970T2 (de) 2008-04-30
KR100919451B1 (ko) 2009-09-29
CN1332071C (zh) 2007-08-15
US7955511B2 (en) 2011-06-07
CN1570223A (zh) 2005-01-26
TW200508160A (en) 2005-03-01

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Legal Events

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