DE60137401D1 - Verfahren zur Selektion von Quartzglassubstraten - Google Patents

Verfahren zur Selektion von Quartzglassubstraten

Info

Publication number
DE60137401D1
DE60137401D1 DE60137401T DE60137401T DE60137401D1 DE 60137401 D1 DE60137401 D1 DE 60137401D1 DE 60137401 T DE60137401 T DE 60137401T DE 60137401 T DE60137401 T DE 60137401T DE 60137401 D1 DE60137401 D1 DE 60137401D1
Authority
DE
Germany
Prior art keywords
quartz glass
glass substrates
selecting quartz
selecting
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60137401T
Other languages
English (en)
Inventor
Masaki Takeuchi
Atsushi Watabe
Tetsushi Tsukamoto
Yukio Shibano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE60137401D1 publication Critical patent/DE60137401D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
DE60137401T 2000-12-27 2001-12-21 Verfahren zur Selektion von Quartzglassubstraten Expired - Lifetime DE60137401D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000397364A JP3874066B2 (ja) 2000-12-27 2000-12-27 シリカガラス基板の選別方法

Publications (1)

Publication Number Publication Date
DE60137401D1 true DE60137401D1 (de) 2009-03-05

Family

ID=18862496

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60137401T Expired - Lifetime DE60137401D1 (de) 2000-12-27 2001-12-21 Verfahren zur Selektion von Quartzglassubstraten

Country Status (4)

Country Link
US (1) US6928837B2 (de)
EP (1) EP1219575B1 (de)
JP (1) JP3874066B2 (de)
DE (1) DE60137401D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4170569B2 (ja) * 2000-06-02 2008-10-22 大日本印刷株式会社 基板選択装置
AUPQ922000A0 (en) * 2000-08-04 2000-08-31 Bae Systems Australia Limited Method of constructing an optical parametric oscillator
TWI250133B (en) * 2002-01-31 2006-03-01 Shinetsu Chemical Co Large-sized substrate and method of producing the same
US20040137828A1 (en) * 2002-07-17 2004-07-15 Hoya Corporation Glass substrate for a mask blank, method of producing a glass substrate for a mask blank, mask blank, method of producing the mask blank, transfer mask, and method of producing a transfer mask
US7691279B2 (en) * 2003-03-27 2010-04-06 Hoya Corporation Method of producing a glass substrate for a mask blank and method of producing a mask blank
KR20100007461A (ko) * 2008-07-14 2010-01-22 삼성전자주식회사 석영 부품용 세정액 및 이를 이용한 석영 부품 세정방법
JP5251861B2 (ja) * 2009-12-28 2013-07-31 信越化学工業株式会社 合成石英ガラス基板の製造方法
KR101353525B1 (ko) * 2010-02-09 2014-01-21 주식회사 엘지화학 유리판 제조 시스템용 레이-아웃 및 유리판 처리 방법 및 그에 따른 유리판
US20130130508A1 (en) * 2011-09-02 2013-05-23 Air Products And Chemicals, Inc. Compositions and Methods for Texturing of Silicon Wafers
JP6173733B2 (ja) * 2012-03-23 2017-08-02 Hoya株式会社 マスクブランク、転写用マスク及びこれらの製造方法
EP2781880B1 (de) 2013-03-19 2019-01-16 Leica Geosystems AG Konstruktionslasersystem mit zumindest teilweise automatisch ablaufender Rekalibrierungsfunktionalität für eine Strahlhorizontierfunktionalität

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4274907A (en) * 1980-05-08 1981-06-23 The United States Of America As Represented By The Secretary Of The Army Method of chemically polishing a doubly rotated quartz plate
USH532H (en) * 1986-10-20 1988-10-04 The United States Of America As Represented By The Secretary Of The Army Method of chemically polishing fused quartz
FR2706445B1 (fr) * 1993-06-18 1995-09-08 Holophane Procédé de fabrication de glace de phare, glace ainsi obtenue et moule pour la mise en Óoeuvre de ce procédé.
JP3827446B2 (ja) * 1998-05-26 2006-09-27 東芝セラミックス株式会社 光学用合成石英ガラスの製造方法
JP2000302482A (ja) * 1999-04-23 2000-10-31 Nippon Sheet Glass Co Ltd ガラス基板の製造方法およびそれにより得られる磁気記録媒体用ガラス基板

Also Published As

Publication number Publication date
US6928837B2 (en) 2005-08-16
JP3874066B2 (ja) 2007-01-31
JP2002201042A (ja) 2002-07-16
EP1219575A1 (de) 2002-07-03
US20020078710A1 (en) 2002-06-27
EP1219575B1 (de) 2009-01-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition