DE60307522D1 - Verfahren zur Überprüfung transparenter Substrate - Google Patents

Verfahren zur Überprüfung transparenter Substrate

Info

Publication number
DE60307522D1
DE60307522D1 DE60307522T DE60307522T DE60307522D1 DE 60307522 D1 DE60307522 D1 DE 60307522D1 DE 60307522 T DE60307522 T DE 60307522T DE 60307522 T DE60307522 T DE 60307522T DE 60307522 D1 DE60307522 D1 DE 60307522D1
Authority
DE
Germany
Prior art keywords
transparent substrates
checking
checking transparent
substrates
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60307522T
Other languages
English (en)
Other versions
DE60307522T2 (de
Inventor
Masao Ozeki
Werner Fertig
Christian Lauenstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Automotive and Industrial Solutions GmbH
Kyocera Display Corp
Original Assignee
Optrex Europe GmbH
Kyocera Display Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optrex Europe GmbH, Kyocera Display Corp filed Critical Optrex Europe GmbH
Application granted granted Critical
Publication of DE60307522D1 publication Critical patent/DE60307522D1/de
Publication of DE60307522T2 publication Critical patent/DE60307522T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13363—Birefringent elements, e.g. for optical compensation
    • G02F1/133636—Birefringent elements, e.g. for optical compensation with twisted orientation, e.g. comprising helically oriented LC-molecules or a plurality of twisted birefringent sublayers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/64—Normally black display, i.e. the off state being black

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
DE60307522T 2002-04-26 2003-04-28 Verfahren zur Überprüfung transparenter Substrate Expired - Fee Related DE60307522T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002126916 2002-04-26
JP2002126916 2002-04-26

Publications (2)

Publication Number Publication Date
DE60307522D1 true DE60307522D1 (de) 2006-09-21
DE60307522T2 DE60307522T2 (de) 2007-06-06

Family

ID=29208166

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60307522T Expired - Fee Related DE60307522T2 (de) 2002-04-26 2003-04-28 Verfahren zur Überprüfung transparenter Substrate
DE60302698T Expired - Lifetime DE60302698T2 (de) 2002-04-26 2003-04-28 Nematische Flüssigkristallanzeigevorrichtung vom Doppelschichttyp

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60302698T Expired - Lifetime DE60302698T2 (de) 2002-04-26 2003-04-28 Nematische Flüssigkristallanzeigevorrichtung vom Doppelschichttyp

Country Status (4)

Country Link
US (2) US6906763B2 (de)
EP (2) EP1607789B1 (de)
JP (1) JP4795414B2 (de)
DE (2) DE60307522T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI241437B (en) * 2003-05-30 2005-10-11 Toppoly Optoelectronics Corp Dual liquid crystal display
CN101223471A (zh) * 2005-07-22 2008-07-16 旭硝子株式会社 液晶显示元件
US20070151296A1 (en) * 2005-12-22 2007-07-05 Photon Dynamics, Inc. Method and apparatus for handling and aligning glass substrates
GB0611156D0 (en) * 2006-06-07 2006-07-19 Qinetiq Ltd Optical inspection
KR101280505B1 (ko) * 2008-03-03 2013-07-05 엘지디스플레이 주식회사 표준 셀을 이용한 우네리 측정 장비 및 그 측정 방법
WO2010011779A2 (en) * 2008-07-23 2010-01-28 Flextronics Ap, Llc Integration design for capacitive touch panels and liquid crystal displays
KR101250126B1 (ko) 2010-07-14 2013-04-03 (주)쎄미시스코 복수의 기판들을 검사하는 방법 및 시스템
CN102736312B (zh) * 2012-06-15 2014-11-26 深圳市华星光电技术有限公司 液晶显示装置及其制造方法
KR20140078299A (ko) * 2012-12-17 2014-06-25 삼성디스플레이 주식회사 표시기판의 검사 장치
CN107331693B (zh) 2017-08-31 2022-06-07 京东方科技集团股份有限公司 一种有机电致发光显示面板及其制备方法
WO2020126011A1 (de) * 2018-12-20 2020-06-25 Webasto SE Fahrzeugscheibe mit verbund, der eine flüssigkristallanordnung umfasst
KR20220023874A (ko) * 2020-08-20 2022-03-03 삼성디스플레이 주식회사 표시 장치 광학 성능 테스트용 광학 검사 기기 및 이를 이용한 광학 검사 방법
CN115469472B (zh) * 2021-06-10 2024-09-17 重庆康佳光电技术研究院有限公司 键合检测装置及方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5265467A (en) * 1975-11-26 1977-05-30 Canon Inc Measuring method
US4523812A (en) 1982-11-23 1985-06-18 Texas Instruments Incorporated Plastic liquid crystal devices with unequal substrate thicknesses
JPS6171305A (ja) * 1984-09-14 1986-04-12 Agency Of Ind Science & Technol 膜厚測定装置
JPS63271423A (ja) * 1987-04-30 1988-11-09 Seiko Epson Corp 液晶表示装置
ATE186125T1 (de) * 1993-09-29 1999-11-15 Akzo Nobel Nv Verzögerungsschicht mit einer an die aktive flüssigkristalzelle angepassten dispersion
JPH0861938A (ja) * 1994-08-18 1996-03-08 Dainippon Printing Co Ltd 肉厚分布検査方法及び検査装置
US5502564A (en) * 1994-09-13 1996-03-26 Hughes Aircraft Company Substrate thickness measurement using oblique incidence multispectral interferometry
JP3071658B2 (ja) * 1994-11-02 2000-07-31 シャープ株式会社 液晶表示素子
JP3065494B2 (ja) * 1994-12-02 2000-07-17 東芝ライテック株式会社 蛍光ランプおよびこれを用いたカラー液晶表示装置
JPH08219729A (ja) * 1995-02-14 1996-08-30 Jeol Ltd 膜厚測定装置
WO1996041232A1 (en) 1995-06-07 1996-12-19 Asahi Glass Company Ltd. Reflection type color liquid crystal display apparatus
JPH0961125A (ja) * 1995-08-25 1997-03-07 Fuji Photo Optical Co Ltd 積層板検査システム
JP3624359B2 (ja) * 1995-10-18 2005-03-02 富士通株式会社 光変調素子、その製造方法、及び、光学装置
JPH11259007A (ja) 1998-03-10 1999-09-24 Sony Corp 反射型表示装置
JPH11344314A (ja) * 1998-05-29 1999-12-14 Optrex Corp 膜厚測定装置
JP2000221008A (ja) * 1999-02-02 2000-08-11 Nippon Maxis:Kk 透明基板の検査方法および透明基板の検査装置
JP3813800B2 (ja) * 1999-09-24 2006-08-23 佐藤 進 液晶セルパラメータ検出装置
JP2002107119A (ja) * 2000-07-26 2002-04-10 Nippi:Kk 被測定物の厚さ測定方法及びその装置
US6882432B2 (en) 2000-08-08 2005-04-19 Zygo Corporation Frequency transform phase shifting interferometry
JP2002286409A (ja) * 2001-03-26 2002-10-03 Fuji Photo Optical Co Ltd 干渉計装置

Also Published As

Publication number Publication date
EP1359460A3 (de) 2004-01-14
DE60307522T2 (de) 2007-06-06
US20050140853A1 (en) 2005-06-30
JP4795414B2 (ja) 2011-10-19
EP1607789B1 (de) 2006-08-09
US6906763B2 (en) 2005-06-14
DE60302698T2 (de) 2006-08-24
JP2009080120A (ja) 2009-04-16
EP1359460B1 (de) 2005-12-14
US20040008297A1 (en) 2004-01-15
EP1359460A2 (de) 2003-11-05
EP1607789A1 (de) 2005-12-21
DE60302698D1 (de) 2006-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee