JPS5265467A - Measuring method - Google Patents

Measuring method

Info

Publication number
JPS5265467A
JPS5265467A JP14151175A JP14151175A JPS5265467A JP S5265467 A JPS5265467 A JP S5265467A JP 14151175 A JP14151175 A JP 14151175A JP 14151175 A JP14151175 A JP 14151175A JP S5265467 A JPS5265467 A JP S5265467A
Authority
JP
Japan
Prior art keywords
measuring method
round
film
rediating
unilaterally
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14151175A
Other languages
Japanese (ja)
Inventor
Noritaka Mochizuki
Nobuyoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP14151175A priority Critical patent/JPS5265467A/en
Publication of JPS5265467A publication Critical patent/JPS5265467A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To measure the physical attribute such as the thickness of film, by rediating the wide light flux to the wave length distribution of the same source of light, and conducting to the interference optical system the beam which has unilaterally passed through between the opposite faces of the transparent film, the beam which has made one round, and the beam which has made one and half round.
COPYRIGHT: (C)1977,JPO&Japio
JP14151175A 1975-11-26 1975-11-26 Measuring method Pending JPS5265467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14151175A JPS5265467A (en) 1975-11-26 1975-11-26 Measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14151175A JPS5265467A (en) 1975-11-26 1975-11-26 Measuring method

Publications (1)

Publication Number Publication Date
JPS5265467A true JPS5265467A (en) 1977-05-30

Family

ID=15293648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14151175A Pending JPS5265467A (en) 1975-11-26 1975-11-26 Measuring method

Country Status (1)

Country Link
JP (1) JPS5265467A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007114206A (en) * 2006-11-30 2007-05-10 National Institute Of Advanced Industrial & Technology Method for precision measurement of group refractive index of optical material
JP2009080120A (en) * 2002-04-26 2009-04-16 Optrex Corp Method of inspecting transparent substrates

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009080120A (en) * 2002-04-26 2009-04-16 Optrex Corp Method of inspecting transparent substrates
JP2007114206A (en) * 2006-11-30 2007-05-10 National Institute Of Advanced Industrial & Technology Method for precision measurement of group refractive index of optical material

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