JPS51134141A - Optical system for multiplication of two beam interference path difference - Google Patents

Optical system for multiplication of two beam interference path difference

Info

Publication number
JPS51134141A
JPS51134141A JP50057433A JP5743375A JPS51134141A JP S51134141 A JPS51134141 A JP S51134141A JP 50057433 A JP50057433 A JP 50057433A JP 5743375 A JP5743375 A JP 5743375A JP S51134141 A JPS51134141 A JP S51134141A
Authority
JP
Japan
Prior art keywords
multiplication
optical system
path difference
beam interference
interference path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50057433A
Other languages
Japanese (ja)
Other versions
JPS5533523B2 (en
Inventor
Chikashi Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50057433A priority Critical patent/JPS51134141A/en
Publication of JPS51134141A publication Critical patent/JPS51134141A/en
Publication of JPS5533523B2 publication Critical patent/JPS5533523B2/ja
Granted legal-status Critical Current

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  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

PURPOSE: To improve interference fringe by moving beam back and forth within many planes parallel to the ray of light incident and shortening the average optical path distance per reciprocating motion.
COPYRIGHT: (C)1976,JPO&Japio
JP50057433A 1975-05-16 1975-05-16 Optical system for multiplication of two beam interference path difference Granted JPS51134141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50057433A JPS51134141A (en) 1975-05-16 1975-05-16 Optical system for multiplication of two beam interference path difference

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50057433A JPS51134141A (en) 1975-05-16 1975-05-16 Optical system for multiplication of two beam interference path difference

Publications (2)

Publication Number Publication Date
JPS51134141A true JPS51134141A (en) 1976-11-20
JPS5533523B2 JPS5533523B2 (en) 1980-09-01

Family

ID=13055507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50057433A Granted JPS51134141A (en) 1975-05-16 1975-05-16 Optical system for multiplication of two beam interference path difference

Country Status (1)

Country Link
JP (1) JPS51134141A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866913A (en) * 1981-10-16 1983-04-21 Agency Of Ind Science & Technol Multiplier for optical path difference for laser interferometer or the like
JPS63172116A (en) * 1987-01-09 1988-07-15 Hamamatsu Photonics Kk Optical delay device
JPH01221602A (en) * 1988-03-01 1989-09-05 Japan Spectroscopic Co Two-beam interference type linear encoder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866913A (en) * 1981-10-16 1983-04-21 Agency Of Ind Science & Technol Multiplier for optical path difference for laser interferometer or the like
JPH0213765B2 (en) * 1981-10-16 1990-04-05 Kogyo Gijutsuin
JPS63172116A (en) * 1987-01-09 1988-07-15 Hamamatsu Photonics Kk Optical delay device
JPH01221602A (en) * 1988-03-01 1989-09-05 Japan Spectroscopic Co Two-beam interference type linear encoder

Also Published As

Publication number Publication date
JPS5533523B2 (en) 1980-09-01

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