DE60201914D1 - Herstellungsverfahren eines magnetkopfes - Google Patents

Herstellungsverfahren eines magnetkopfes

Info

Publication number
DE60201914D1
DE60201914D1 DE60201914T DE60201914T DE60201914D1 DE 60201914 D1 DE60201914 D1 DE 60201914D1 DE 60201914 T DE60201914 T DE 60201914T DE 60201914 T DE60201914 T DE 60201914T DE 60201914 D1 DE60201914 D1 DE 60201914D1
Authority
DE
Germany
Prior art keywords
producing
magnetic head
magnetic
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60201914T
Other languages
English (en)
Other versions
DE60201914T2 (de
Inventor
Richard Hsiao
Alberto Santini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HGST Netherlands BV
Original Assignee
Hitachi Global Storage Technologies Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Global Storage Technologies Netherlands BV filed Critical Hitachi Global Storage Technologies Netherlands BV
Publication of DE60201914D1 publication Critical patent/DE60201914D1/de
Application granted granted Critical
Publication of DE60201914T2 publication Critical patent/DE60201914T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/012—Recording on, or reproducing or erasing from, magnetic disks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/17—Construction or disposition of windings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
DE60201914T 2001-06-18 2002-05-29 Herstellungsverfahren eines magnetkopfes Expired - Fee Related DE60201914T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US884574 2001-06-18
US09/884,574 US6741422B2 (en) 2001-06-18 2001-06-18 Method of making magnetic head having narrow pole tip and fine pitch coil
PCT/GB2002/002660 WO2002103687A2 (en) 2001-06-18 2002-05-29 Method of making a magnetic head

Publications (2)

Publication Number Publication Date
DE60201914D1 true DE60201914D1 (de) 2004-12-16
DE60201914T2 DE60201914T2 (de) 2005-11-03

Family

ID=25384917

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60201914T Expired - Fee Related DE60201914T2 (de) 2001-06-18 2002-05-29 Herstellungsverfahren eines magnetkopfes

Country Status (5)

Country Link
US (2) US6741422B2 (de)
EP (1) EP1407448B1 (de)
KR (1) KR100537579B1 (de)
DE (1) DE60201914T2 (de)
WO (1) WO2002103687A2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003045539A (ja) * 2001-05-22 2003-02-14 Enplas Corp コンタクトピン及び電気部品用ソケット
US6741422B2 (en) * 2001-06-18 2004-05-25 Hitachi Global Storage Technologies Netherlands, B.V. Method of making magnetic head having narrow pole tip and fine pitch coil
US7117583B2 (en) * 2002-03-18 2006-10-10 International Business Machines Corporation Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure
US6901653B2 (en) * 2002-04-02 2005-06-07 Hitachi Global Storage Technologies Netherlands B.V. Process for manufacturing a magnetic head coil structure
US6696226B1 (en) * 2002-11-08 2004-02-24 International Business Machines Corporation Simultaneous definition and direct transfer of a write head pole and coil for a magnetic read/write head
US7287314B2 (en) 2004-02-27 2007-10-30 Hitachi Global Storage Technologies Netherlands B.V. One step copper damascene CMP process and slurry
US7296339B1 (en) 2004-09-08 2007-11-20 Western Digital (Fremont), Llc Method for manufacturing a perpendicular magnetic recording head
US7363698B2 (en) * 2004-09-30 2008-04-29 Hitachi Gobal Storage Technologies Inc. Process for creating a write head by forming a bump after the top pole is formed
US7444740B1 (en) 2005-01-31 2008-11-04 Western Digital (Fremont), Llc Damascene process for fabricating poles in recording heads
US7552523B1 (en) 2005-07-01 2009-06-30 Western Digital (Fremont), Llc Method for manufacturing a perpendicular magnetic recording transducer
US8333008B1 (en) 2005-07-29 2012-12-18 Western Digital (Fremont), Llc Method for manufacturing a perpendicular magnetic recording transducer
US7551397B2 (en) * 2005-09-02 2009-06-23 Hitachi Global Storage Technologies Netherlands B.V. Magnetic write head having a first magnetic pole with a self aligned stepped notch
US7508627B1 (en) 2006-03-03 2009-03-24 Western Digital (Fremont), Llc Method and system for providing perpendicular magnetic recording transducers
US7536774B2 (en) * 2006-04-07 2009-05-26 Hitachi Global Storage Technologies B.V. Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head
US8141235B1 (en) 2006-06-09 2012-03-27 Western Digital (Fremont), Llc Method for manufacturing a perpendicular magnetic recording transducers
JP4691003B2 (ja) * 2006-12-01 2011-06-01 株式会社東芝 ディスク記憶装置のサーボ書込み方法及び装置
US8015692B1 (en) 2007-11-07 2011-09-13 Western Digital (Fremont), Llc Method for providing a perpendicular magnetic recording (PMR) head
US9099118B1 (en) 2009-05-26 2015-08-04 Western Digital (Fremont), Llc Dual damascene process for producing a PMR write pole
US8486285B2 (en) 2009-08-20 2013-07-16 Western Digital (Fremont), Llc Damascene write poles produced via full film plating

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872079A (en) * 1987-07-28 1989-10-03 Applied Magnetics Corporation Thin film magnetic head with a leveler layer
US5155646A (en) * 1989-07-26 1992-10-13 Victor Company Of Japan, Ltd. Multiple layered thin-film magnetic head for magnetic recording and reproducing apparatus
JPH06212458A (ja) * 1993-01-14 1994-08-02 Nikon Corp 反応性イオンエッチングによるパターニング 加工物の製造方法
JP3230313B2 (ja) * 1993-01-14 2001-11-19 株式会社ニコン 反応性イオンエッチングによるパターニング加工物の製造方法
US6198597B1 (en) * 1993-08-10 2001-03-06 Kabushiki Kaisha Toshiba Thin-film magnetic head having improved magnetic pole structure
JP2784431B2 (ja) 1994-04-19 1998-08-06 インターナショナル・ビジネス・マシーンズ・コーポレイション 薄膜磁気書込みヘッド、読取り／書込み磁気ヘッド、ディスク駆動装置及び薄膜磁気書込みヘッドの製造方法
US5414580A (en) 1994-05-13 1995-05-09 International Business Machines Corporation Magnetic storage system using thin film magnetic recording heads using phase-shifting mask
US5665251A (en) 1994-11-23 1997-09-09 International Business Machines Corporation RIE image transfer process for plating
US5926350A (en) 1996-03-15 1999-07-20 International Business Machines Corporation Dual gap horizontal thin film inductive head
US5726841A (en) 1996-06-11 1998-03-10 Read-Rite Corporation Thin film magnetic head with trimmed pole tips etched by focused ion beam for undershoot reduction
US5874010A (en) 1996-07-17 1999-02-23 Headway Technologies, Inc. Pole trimming technique for high data rate thin film heads
US6032353A (en) * 1997-05-15 2000-03-07 Read-Rite Corporation Magnetic head with low stack height and self-aligned pole tips
US6204997B1 (en) * 1998-05-19 2001-03-20 Tdk Corporation Thin film magnetic head with a plurality of engaged thin-film coils and method of manufacturing the same
US6226149B1 (en) * 1998-12-15 2001-05-01 International Business Machines Corporation Planar stitched write head having write coil insulated with inorganic insulation
JP2000215411A (ja) * 1999-01-14 2000-08-04 Read Rite Smi Kk 薄膜磁気ヘッド、並びに、その製造方法
JP2000242911A (ja) * 1999-02-22 2000-09-08 Tdk Corp 複合型薄膜磁気ヘッドの製造方法
JP2001084535A (ja) * 1999-09-16 2001-03-30 Tdk Corp 薄膜磁気ヘッドの製造方法および磁気抵抗効果装置の製造方法
JP2001167406A (ja) * 1999-12-07 2001-06-22 Tdk Corp 薄膜磁気ヘッドおよびその製造方法
JP3499490B2 (ja) * 2000-02-16 2004-02-23 Ｔｄｋ株式会社 薄膜磁気ヘッドの製造方法
JP3539630B2 (ja) * 2000-03-22 2004-07-07 Ｔｄｋ株式会社 薄膜磁気ヘッドの製造方法
US6819527B1 (en) * 2000-03-23 2004-11-16 Hitachi Global Storage Technologies, Inc. Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement
US6687096B2 (en) * 2000-06-21 2004-02-03 Tdk Corporation Thin-film magnetic head and method of manufacturing same
US6507456B1 (en) * 2000-08-30 2003-01-14 International Business Machines Corporation Dual coil and lead connections fabricated by image transfer and selective etch
US6741422B2 (en) * 2001-06-18 2004-05-25 Hitachi Global Storage Technologies Netherlands, B.V. Method of making magnetic head having narrow pole tip and fine pitch coil

Also Published As

Publication number Publication date
US20020191336A1 (en) 2002-12-19
US20040070875A1 (en) 2004-04-15
KR100537579B1 (ko) 2005-12-20
EP1407448B1 (de) 2004-11-10
WO2002103687A3 (en) 2003-04-10
EP1407448A2 (de) 2004-04-14
KR20030097875A (ko) 2003-12-31
WO2002103687A2 (en) 2002-12-27
DE60201914T2 (de) 2005-11-03
US6987646B2 (en) 2006-01-17
US6741422B2 (en) 2004-05-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee