DE60204397D1 - Magnetoresistiver Abtastkopf und Herstellungsverfahren dafür - Google Patents
Magnetoresistiver Abtastkopf und Herstellungsverfahren dafürInfo
- Publication number
- DE60204397D1 DE60204397D1 DE60204397T DE60204397T DE60204397D1 DE 60204397 D1 DE60204397 D1 DE 60204397D1 DE 60204397 T DE60204397 T DE 60204397T DE 60204397 T DE60204397 T DE 60204397T DE 60204397 D1 DE60204397 D1 DE 60204397D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- method therefor
- scanning head
- magnetoresistive
- magnetoresistive scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001246695A JP3877985B2 (ja) | 2001-08-15 | 2001-08-15 | 磁気抵抗ヘッド及びその製造方法 |
JP2001246695 | 2001-08-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60204397D1 true DE60204397D1 (de) | 2005-07-07 |
DE60204397T2 DE60204397T2 (de) | 2005-11-10 |
Family
ID=19076186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60204397T Expired - Fee Related DE60204397T2 (de) | 2001-08-15 | 2002-03-28 | Magnetoresistiver Abtastkopf und Herstellungsverfahren dafür |
Country Status (6)
Country | Link |
---|---|
US (1) | US6754052B2 (de) |
EP (1) | EP1286337B1 (de) |
JP (1) | JP3877985B2 (de) |
KR (1) | KR100739848B1 (de) |
CN (1) | CN100367351C (de) |
DE (1) | DE60204397T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3647736B2 (ja) * | 2000-09-29 | 2005-05-18 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP2004056037A (ja) * | 2002-07-24 | 2004-02-19 | Fujitsu Ltd | Cpp構造磁気抵抗効果素子 |
US7050272B1 (en) * | 2002-12-30 | 2006-05-23 | Storage Technology Corporation | Reduction of contact noise in single-ended magnetoresistive read elements |
JP2005122818A (ja) * | 2003-10-16 | 2005-05-12 | Headway Technol Inc | 薄膜磁気ヘッド、これを用いた磁気記録装置及びその製造方法 |
US7360301B2 (en) * | 2003-10-20 | 2008-04-22 | Headway Technologies, Inc. | Method of manufacturing a thin film magnetic head |
US7384567B2 (en) | 2003-12-22 | 2008-06-10 | Electronics And Telecommunications Research Institute | Method of manufacturing thin film magnetic head |
KR100609384B1 (ko) * | 2003-12-22 | 2006-08-08 | 한국전자통신연구원 | 박막 자기 헤드의 제조방법 |
JP4015135B2 (ja) | 2004-05-31 | 2007-11-28 | アルプス電気株式会社 | Cpp型薄膜磁気ヘッドの製造方法 |
US7368299B2 (en) * | 2004-07-14 | 2008-05-06 | Infineon Technologies Ag | MTJ patterning using free layer wet etching and lift off techniques |
JP4377777B2 (ja) * | 2004-08-31 | 2009-12-02 | 株式会社東芝 | 磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置 |
US7595967B1 (en) | 2004-09-07 | 2009-09-29 | Western Digital (Fremont), Llp | Method for fabricating a spacer layer for a magnetoresistive element |
US7301225B2 (en) * | 2006-02-28 | 2007-11-27 | Freescale Semiconductor, Inc. | Multi-row lead frame |
US8108985B2 (en) * | 2007-11-02 | 2012-02-07 | Hitachi Global Storage Technologies Netherlands B.V. | Method for manufacturing a perpendicular magnetic write head |
US10943783B2 (en) * | 2018-08-31 | 2021-03-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for manufacturing a semiconductor device |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438470A (en) * | 1994-05-13 | 1995-08-01 | Read-Rite Corporation | Magnetoresistive structure with contiguous junction hard bias design with low lead resistance |
EP0801380A3 (de) | 1996-04-10 | 1998-03-04 | Read-Rite Corporation | Riesenmagnetoresistive Wandler mit erhöhtem Ausgangssignal |
US5668688A (en) * | 1996-05-24 | 1997-09-16 | Quantum Peripherals Colorado, Inc. | Current perpendicular-to-the-plane spin valve type magnetoresistive transducer |
JPH11154309A (ja) * | 1997-11-20 | 1999-06-08 | Sony Corp | 磁気抵抗効果型磁気ヘッド |
JPH11316919A (ja) * | 1998-04-30 | 1999-11-16 | Hitachi Ltd | スピントンネル磁気抵抗効果型磁気ヘッド |
US6587315B1 (en) * | 1999-01-20 | 2003-07-01 | Alps Electric Co., Ltd. | Magnetoresistive-effect device with a magnetic coupling junction |
US6134089A (en) | 1999-03-11 | 2000-10-17 | Read-Rite Corporation | Current perpendicular to plane magnetoresistive device with low resistance lead |
JP3331334B2 (ja) * | 1999-05-14 | 2002-10-07 | 株式会社東芝 | 半導体装置の製造方法 |
JP2001006130A (ja) | 1999-06-24 | 2001-01-12 | Tdk Corp | トンネル磁気抵抗効果型ヘッド |
US6574079B2 (en) * | 2000-11-09 | 2003-06-03 | Tdk Corporation | Magnetic tunnel junction device and method including a tunneling barrier layer formed by oxidations of metallic alloys |
-
2001
- 2001-08-15 JP JP2001246695A patent/JP3877985B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-27 US US10/107,084 patent/US6754052B2/en not_active Expired - Fee Related
- 2002-03-28 EP EP02252329A patent/EP1286337B1/de not_active Expired - Fee Related
- 2002-03-28 DE DE60204397T patent/DE60204397T2/de not_active Expired - Fee Related
- 2002-04-11 KR KR1020020019731A patent/KR100739848B1/ko not_active IP Right Cessation
- 2002-04-18 CN CNB021057982A patent/CN100367351C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20030015820A (ko) | 2003-02-25 |
EP1286337B1 (de) | 2005-06-01 |
US6754052B2 (en) | 2004-06-22 |
EP1286337A3 (de) | 2003-10-22 |
EP1286337A2 (de) | 2003-02-26 |
KR100739848B1 (ko) | 2007-07-16 |
JP2003059008A (ja) | 2003-02-28 |
JP3877985B2 (ja) | 2007-02-07 |
DE60204397T2 (de) | 2005-11-10 |
CN100367351C (zh) | 2008-02-06 |
CN1402224A (zh) | 2003-03-12 |
US20030035251A1 (en) | 2003-02-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |