DE602007013260D1 - Sensor für physikalische grösse - Google Patents

Sensor für physikalische grösse

Info

Publication number
DE602007013260D1
DE602007013260D1 DE602007013260T DE602007013260T DE602007013260D1 DE 602007013260 D1 DE602007013260 D1 DE 602007013260D1 DE 602007013260 T DE602007013260 T DE 602007013260T DE 602007013260 T DE602007013260 T DE 602007013260T DE 602007013260 D1 DE602007013260 D1 DE 602007013260D1
Authority
DE
Germany
Prior art keywords
sensor
physical size
physical
size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007013260T
Other languages
English (en)
Inventor
Yoichi Nagata
Tohru Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd filed Critical Citizen Holdings Co Ltd
Publication of DE602007013260D1 publication Critical patent/DE602007013260D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
    • G01D3/021—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation using purely analogue techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Technology Law (AREA)
  • Gyroscopes (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Amplifiers (AREA)
DE602007013260T 2006-09-27 2007-09-21 Sensor für physikalische grösse Active DE602007013260D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006262761A JP5294228B2 (ja) 2006-09-27 2006-09-27 物理量センサ
PCT/JP2007/068430 WO2008038595A1 (fr) 2006-09-27 2007-09-21 Capteur de quantité physique

Publications (1)

Publication Number Publication Date
DE602007013260D1 true DE602007013260D1 (de) 2011-04-28

Family

ID=39230030

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007013260T Active DE602007013260D1 (de) 2006-09-27 2007-09-21 Sensor für physikalische grösse

Country Status (5)

Country Link
US (1) US8037755B2 (de)
EP (1) EP2068119B1 (de)
JP (1) JP5294228B2 (de)
DE (1) DE602007013260D1 (de)
WO (1) WO2008038595A1 (de)

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WO2012040245A2 (en) 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Through silicon via with reduced shunt capacitance
US10065851B2 (en) 2010-09-20 2018-09-04 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
JP5774016B2 (ja) * 2010-09-30 2015-09-02 シチズンホールディングス株式会社 物理量センサ
CN103535116B (zh) * 2011-02-09 2016-11-09 欧司朗股份有限公司 占用传感器
JP2012202872A (ja) * 2011-03-25 2012-10-22 Toshiba Corp センサ制御回路およびセンサシステム
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
KR101999745B1 (ko) * 2012-04-12 2019-10-01 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템 구동기
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9716477B2 (en) 2012-12-28 2017-07-25 Peregrine Semiconductor Corporation Bias control for stacked transistor configuration
US11128261B2 (en) 2012-12-28 2021-09-21 Psemi Corporation Constant Vds1 bias control for stacked transistor configuration
US9413298B2 (en) 2012-12-28 2016-08-09 Peregrine Semiconductor Corporation Amplifier dynamic bias adjustment for envelope tracking
US9759564B2 (en) 2013-03-15 2017-09-12 Fairchild Semiconductor Corporation Temperature and power supply calibration
FR3004532B1 (fr) * 2013-04-10 2016-12-09 Vishay S A Circuit electrique pour faire fonctionner un capteur ratiometrique
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JP6303411B2 (ja) * 2013-11-07 2018-04-04 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
US9835647B2 (en) 2014-03-18 2017-12-05 Fairchild Semiconductor Corporation Apparatus and method for extending analog front end sense range of a high-Q MEMS sensor
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US9960737B1 (en) 2017-03-06 2018-05-01 Psemi Corporation Stacked PA power control
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Also Published As

Publication number Publication date
JP2008082866A (ja) 2008-04-10
EP2068119A1 (de) 2009-06-10
US8037755B2 (en) 2011-10-18
US20100039094A1 (en) 2010-02-18
JP5294228B2 (ja) 2013-09-18
EP2068119B1 (de) 2011-03-16
WO2008038595A1 (fr) 2008-04-03
EP2068119A4 (de) 2010-02-17

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