DE602007004137D1 - Abformung von Mikrostrukturen mit einem Werkzeug mit integrierten Abstandselementen - Google Patents

Abformung von Mikrostrukturen mit einem Werkzeug mit integrierten Abstandselementen

Info

Publication number
DE602007004137D1
DE602007004137D1 DE602007004137T DE602007004137T DE602007004137D1 DE 602007004137 D1 DE602007004137 D1 DE 602007004137D1 DE 602007004137 T DE602007004137 T DE 602007004137T DE 602007004137 T DE602007004137 T DE 602007004137T DE 602007004137 D1 DE602007004137 D1 DE 602007004137D1
Authority
DE
Germany
Prior art keywords
substrate
tool
replication
moving
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007004137T
Other languages
English (en)
Inventor
Hartmut Rudmann
Stephan Heimgartner
Susanne Westenhoefer
Markus Rossi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Sensors Singapore Pte Ltd
Original Assignee
Heptagon Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heptagon Oy filed Critical Heptagon Oy
Publication of DE602007004137D1 publication Critical patent/DE602007004137D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00278—Lenticular sheets
    • B29D11/00307—Producing lens wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/0048—Moulds for lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Micromachines (AREA)
  • Prostheses (AREA)
DE602007004137T 2006-03-20 2007-03-20 Abformung von Mikrostrukturen mit einem Werkzeug mit integrierten Abstandselementen Active DE602007004137D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/384,537 US20070216046A1 (en) 2006-03-20 2006-03-20 Manufacturing miniature structured elements with tool incorporating spacer elements

Publications (1)

Publication Number Publication Date
DE602007004137D1 true DE602007004137D1 (de) 2010-02-25

Family

ID=38055310

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007004137T Active DE602007004137D1 (de) 2006-03-20 2007-03-20 Abformung von Mikrostrukturen mit einem Werkzeug mit integrierten Abstandselementen

Country Status (9)

Country Link
US (2) US20070216046A1 (de)
EP (1) EP1837166B1 (de)
JP (1) JP5162573B2 (de)
KR (1) KR101382855B1 (de)
CN (1) CN101432126B (de)
AT (1) ATE454261T1 (de)
DE (1) DE602007004137D1 (de)
TW (2) TWI446020B (de)
WO (1) WO2007107026A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7692256B2 (en) * 2007-03-23 2010-04-06 Heptagon Oy Method of producing a wafer scale package
KR100867520B1 (ko) * 2007-04-23 2008-11-07 삼성전기주식회사 결상 렌즈 및 그 제조 방법
EP2147339A1 (de) * 2007-05-14 2010-01-27 Heptagon OY Beleuchtungssystem
TWI481496B (zh) * 2007-12-19 2015-04-21 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
TWI505703B (zh) * 2007-12-19 2015-10-21 Heptagon Micro Optics Pte Ltd 光學模組，晶圓等級的封裝及其製造方法
TWI478808B (zh) * 2007-12-19 2015-04-01 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
WO2010020062A1 (en) 2008-08-20 2010-02-25 Heptagon Oy Method of manufacturing a pluralty of optical devices
CN101885577A (zh) * 2009-05-14 2010-11-17 鸿富锦精密工业（深圳）有限公司 压印成型微小凹透镜阵列的模仁、模压装置及方法
JP5447925B2 (ja) * 2009-06-01 2014-03-19 東洋合成工業株式会社 光硬化物複合体及び該光硬化物複合体を形成するための光硬化性組成物並びに光硬化物複合体の製造方法
EP2281681B1 (de) * 2009-08-04 2018-10-17 FLIR Systems Trading Belgium BVBA Steuerung der Oberflächenglätte mittels Lichtausrichtung
JP2011098487A (ja) * 2009-11-05 2011-05-19 Fujifilm Corp 素子アレイ成形型、及び該成形型を用いて成形された素子アレイ
TW201141340A (en) * 2009-12-28 2011-11-16 Fujikura Ltd Die and manufacturing method therefor
JP5647808B2 (ja) * 2010-03-30 2015-01-07 富士フイルム株式会社 レンズアレイのマスタの製造方法
US8834988B2 (en) 2010-04-21 2014-09-16 Empire Technology Development Llc Precision spacing for stacked wafer assemblies
JP5654938B2 (ja) * 2011-04-20 2015-01-14 株式会社フジクラ インプリント装置
WO2012161220A1 (ja) * 2011-05-26 2012-11-29 コニカミノルタアドバンストレイヤー株式会社 ウェハーレンズの製造方法、ウェハーレンズの製造装置及び光学素子
US8593330B2 (en) 2011-07-11 2013-11-26 Honeywell International Inc. Multichannel, multimode, multifunction L-band radio transceiver
GB2496835B (en) 2011-09-23 2015-12-30 Radio Physics Solutions Ltd Package for high frequency circuits
CN103372941A (zh) * 2012-04-23 2013-10-30 鸿富锦精密工业（深圳）有限公司 微结构光学元件制造方法
US8606057B1 (en) 2012-11-02 2013-12-10 Heptagon Micro Optics Pte. Ltd. Opto-electronic modules including electrically conductive connections for integration with an electronic device
JP2015021804A (ja) * 2013-07-18 2015-02-02 株式会社日立ハイテクノロジーズ レプリカ採取装置および採取方法
TWI710455B (zh) * 2014-05-16 2020-11-21 新加坡商恒立私人有限公司 晶圓等級的光學裝置製造方法
WO2017034402A1 (en) * 2015-08-21 2017-03-02 Anteryon Wafer Optics B.V. A method of fabricating an array of optical lens elements
NL2015330B1 (en) 2015-08-21 2017-03-13 Anteryon Wafer Optics B V A method of fabricating an array of optical lens elements
CN111246989B (zh) * 2017-08-22 2022-04-01 赫普塔冈微光有限公司 复制的改进以及相关方法和装置，特别是用于最小化不对称形式误差
DE112019006488T5 (de) * 2018-12-27 2022-01-05 Ams Sensors Singapore Pte. Ltd. Verfahren zur Herstellung einer Vielzahl von optischen Elementen
WO2020185167A1 (en) * 2019-03-12 2020-09-17 Ams Sensors Singapore Pte. Ltd. Yard control features

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3767445A (en) * 1971-10-14 1973-10-23 Bell Telephone Labor Inc Embossing techniques for producing integrated optical circuits
US4197266A (en) * 1974-05-06 1980-04-08 Bausch & Lomb Incorporated Method for forming optical lenses
JPS6334108A (ja) * 1986-07-30 1988-02-13 Hitachi Ltd 光デイスク用基板の製造方法および装置
US20020053742A1 (en) * 1995-09-01 2002-05-09 Fumio Hata IC package and its assembly method
US6096155A (en) * 1996-09-27 2000-08-01 Digital Optics Corporation Method of dicing wafer level integrated multiple optical elements
US6235141B1 (en) * 1996-09-27 2001-05-22 Digital Optics Corporation Method of mass producing and packaging integrated optical subsystems
US6297911B1 (en) * 1998-08-27 2001-10-02 Seiko Epson Corporation Micro lens array, method of fabricating the same, and display device
US6805902B1 (en) * 2000-02-28 2004-10-19 Microfab Technologies, Inc. Precision micro-optical elements and the method of making precision micro-optical elements
JP2002205312A (ja) * 2000-11-10 2002-07-23 Dainippon Printing Co Ltd レンズシートの製造方法及び製造装置
WO2003001722A2 (en) * 2001-06-22 2003-01-03 Canesta, Inc. Method and system to display a virtual input device
JP2003011150A (ja) * 2001-07-04 2003-01-15 Canon Inc 金型及び光学素子の製造方法及び光学素子
US20030017424A1 (en) * 2001-07-18 2003-01-23 Miri Park Method and apparatus for fabricating complex grating structures
US6894840B2 (en) * 2002-05-13 2005-05-17 Sony Corporation Production method of microlens array, liquid crystal display device and production method thereof, and projector
WO2003100487A1 (en) * 2002-05-24 2003-12-04 The Regents Of The University Of Michigan Polymer micro-ring resonator device and fabrication method
US7195732B2 (en) * 2002-09-18 2007-03-27 Ricoh Optical Industries Co., Ltd. Method and mold for fabricating article having fine surface structure
EP1443344A1 (de) * 2003-01-29 2004-08-04 Heptagon Oy Herstellung von mikrostrukturierten Teilen
JP2004268401A (ja) * 2003-03-07 2004-09-30 Sharp Corp マイクロレンズアレイの成形型およびマイクロレンズアレイ基板の製造方法
KR100911421B1 (ko) * 2003-05-16 2009-08-11 엘지디스플레이 주식회사 몰드를 이용한 컬러필터 형성방법과 이를 포함한액정표시장치 제조방법
KR100675632B1 (ko) * 2003-09-08 2007-02-01 엘지.필립스 엘시디 주식회사 패턴형성방법 및 이를 이용한 액정표시장치의 제조방법
US7867695B2 (en) * 2003-09-11 2011-01-11 Bright View Technologies Corporation Methods for mastering microstructures through a substrate using negative photoresist
US7094304B2 (en) * 2003-10-31 2006-08-22 Agilent Technologies, Inc. Method for selective area stamping of optical elements on a substrate
JP4371777B2 (ja) * 2003-11-12 2009-11-25 リコー光学株式会社 樹脂硬化方法及び樹脂成型品の製造方法
JP5128047B2 (ja) * 2004-10-07 2013-01-23 Ｔｏｗａ株式会社 光デバイス及び光デバイスの生産方法

Also Published As

Publication number Publication date
EP1837166A1 (de) 2007-09-26
TW201433831A (zh) 2014-09-01
US20080054507A1 (en) 2008-03-06
JP5162573B2 (ja) 2013-03-13
US20070216046A1 (en) 2007-09-20
CN101432126B (zh) 2012-08-29
CN101432126A (zh) 2009-05-13
EP1837166B1 (de) 2010-01-06
KR101382855B1 (ko) 2014-04-08
TW200741257A (en) 2007-11-01
WO2007107026A1 (en) 2007-09-27
JP2009530136A (ja) 2009-08-27
TWI446020B (zh) 2014-07-21
KR20090018025A (ko) 2009-02-19
TWI504943B (zh) 2015-10-21
ATE454261T1 (de) 2010-01-15

Similar Documents

Publication Publication Date Title
DE602007004137D1 (de) Abformung von Mikrostrukturen mit einem Werkzeug mit integrierten Abstandselementen
TW200740597A (en) Method and tool for manufacturing optical elements
WO2009017982A3 (en) Methods for device fabrication using pitch reduction and associated structures
TW200740583A (en) Manufacturing optical elements
WO2017076872A3 (de) Verfahren und applikationsvorrichtung zum applizieren einer übertragungslage einer folie auf ein substrat
TW200740584A (en) Manufacturing an optical element
JP2008525206A5 (de)
WO2008060322A3 (en) Nano-fabrication method and system
TW200724479A (en) Nano-array and fabrication method thereof
WO2009083146A3 (de) Verfahren zum erzeugen einer mikrostruktur
WO2008156977A3 (en) Methods of fabricating nanostructures by use of thin films of self-assembling of diblock copolymers, and devices resulting from those methods
WO2008068701A3 (en) Method and apparatus for applying a sheet to a substrate
WO2008009803A3 (fr) Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee
BR112015012419A2 (pt) método para fabricar corpo estrutural e aparelho de fabricação para o mesmo
WO2007127976A3 (en) Particle based molding
BRPI0816426A2 (pt) Dispositivo para investigar uma molécula, método para investigar uma molécula, substrato adequado para uso no dispositivo para investigar moléculas, método para sequenciar um ácido nucléico.
WO2014094729A3 (de) Verfahren zur metallisierung eines werkstückes sowie ein schichtaufbau aus einem werkstück und einer metallschicht
BRPI0919207A2 (pt) método e sistema implementado por computador para uso na modelagem de um sistema de reservatório geomecânico, e , método implementado por computador para uso na modelagem de uma ruptura.
WO2010047769A8 (en) Reduction of stress during template separation from substrate
WO2010047788A3 (en) Imprint lithography system and method
TW200732556A (en) Apparatus for driving microfluid and the method thereof
WO2006072306A8 (de) Dreidimensionale nano- und mikrostrukturierte träger
TW200633580A (en) Display device and method for manufacturing the same
ES2375231B8 (es) Método, célula y dispositivo para purificar aire ambiental y superficies.
WO2010063504A3 (en) Imprint lithography apparatus and method

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
R082 Change of representative

Ref document number: 1837166

Country of ref document: EP

Representative=s name: JAN HENDRIK NESTLER, DE

R081 Change of applicant/patentee

Ref document number: 1837166

Country of ref document: EP

Owner name: HEPTAGON MICRO OPTICS PTE. LTD., SG

Free format text: FORMER OWNER: HEPTAGON OY, ESPOO, FI

Effective date: 20120822

R082 Change of representative

Ref document number: 1837166

Country of ref document: EP

Representative=s name: JAN HENDRIK NESTLER, DE

Effective date: 20120822