WO2008009803A3 - Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee - Google Patents

Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee Download PDF

Info

Publication number
WO2008009803A3
WO2008009803A3 PCT/FR2007/001212 FR2007001212W WO2008009803A3 WO 2008009803 A3 WO2008009803 A3 WO 2008009803A3 FR 2007001212 W FR2007001212 W FR 2007001212W WO 2008009803 A3 WO2008009803 A3 WO 2008009803A3
Authority
WO
WIPO (PCT)
Prior art keywords
assisted
photo
microfluidic
production
printing
Prior art date
Application number
PCT/FR2007/001212
Other languages
English (en)
Other versions
WO2008009803A4 (fr
WO2008009803A2 (fr
Inventor
Vincent Studer
Denis Bartolo
Guillaume Degre
Original Assignee
Centre Nat Rech Scient
Univ Paris Curie
Vincent Studer
Denis Bartolo
Guillaume Degre
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Nat Rech Scient, Univ Paris Curie, Vincent Studer, Denis Bartolo, Guillaume Degre filed Critical Centre Nat Rech Scient
Priority to US12/374,180 priority Critical patent/US8636022B2/en
Priority to EP07823286A priority patent/EP2046676A2/fr
Priority to JP2009520008A priority patent/JP5684985B2/ja
Publication of WO2008009803A2 publication Critical patent/WO2008009803A2/fr
Publication of WO2008009803A3 publication Critical patent/WO2008009803A3/fr
Publication of WO2008009803A4 publication Critical patent/WO2008009803A4/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/036—Hot embossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/598—With repair, tapping, assembly, or disassembly means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)

Abstract

Procédé de fabrication d'un dispositif microfluidique comportant une étape dans laquelle on utilise un timbre en un matériau élastomérique pour imprimer un liquide photodurcissable et/ou thermodurcissable placé sur un support.
PCT/FR2007/001212 2006-07-17 2007-07-16 Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee WO2008009803A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/374,180 US8636022B2 (en) 2006-07-17 2007-07-16 Production of microfluidic polymeric devices by photo-assisted and/or thermally assisted printing
EP07823286A EP2046676A2 (fr) 2006-07-17 2007-07-16 Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee
JP2009520008A JP5684985B2 (ja) 2006-07-17 2007-07-16 光補助および／または熱補助された印刷によるマイクロ流体ポリマーデバイスの製造

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0606457 2006-07-17
FR0606457A FR2903679B1 (fr) 2006-07-17 2006-07-17 Fabrication de dispositifs microfluidiques polymeriques par impression photo-assistee.

Publications (3)

Publication Number Publication Date
WO2008009803A2 WO2008009803A2 (fr) 2008-01-24
WO2008009803A3 true WO2008009803A3 (fr) 2008-12-31
WO2008009803A4 WO2008009803A4 (fr) 2009-03-19

Family

ID=37872261

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2007/001212 WO2008009803A2 (fr) 2006-07-17 2007-07-16 Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee

Country Status (5)

Country Link
US (1) US8636022B2 (fr)
EP (1) EP2046676A2 (fr)
JP (1) JP5684985B2 (fr)
FR (1) FR2903679B1 (fr)
WO (1) WO2008009803A2 (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9520314B2 (en) * 2008-12-19 2016-12-13 Applied Materials, Inc. High temperature electrostatic chuck bonding adhesive
WO2012004423A1 (fr) * 2010-07-07 2012-01-12 Ikerlan, S.Coop Procédé de fabrication de dispositifs microfluidiques
ES2564855T3 (es) * 2010-11-12 2016-03-29 Abbvie Inc. Método y sistema óptico de alto rendimiento para determinar el efecto de una sustancia de ensayo sobre las células vivas
FR2972117B1 (fr) 2011-03-04 2013-12-20 Centre Nat Rech Scient Systeme microfluidique pour controler un profil de concentration de molecules susceptibles de stimuler une cible
EP2686154B1 (fr) 2011-03-15 2018-11-14 National Research Council of Canada Système microfluidique ayant des structures monolithiques nanoplasmoniques
US20120280284A1 (en) * 2011-04-08 2012-11-08 Agency For Science, Technology And Research Micro-fluidic electronic devices and method for producing such devices
FR2974360B1 (fr) 2011-04-22 2014-09-12 Centre Nat Rech Scient Systeme microfluidique pour controler une carte de concentration de molecules susceptibles de stimuler une cible
FR2988087B1 (fr) 2012-03-13 2019-08-30 Total Petrochemicals France Traitement de surface de dispositifs microfluidiques
FR2993666B1 (fr) * 2012-07-19 2015-03-27 Commissariat Energie Atomique Procede de fabrication d'une colonne d'enrichissement de chromatographie
FR2993665B1 (fr) 2012-07-19 2015-10-16 Commissariat Energie Atomique Procede de fabrication d'une colonne d'analyse de chromatographie
JP6006875B2 (ja) * 2013-05-22 2016-10-12 アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ 小型流体分析デバイスおよび製造方法
US10391485B2 (en) * 2013-09-25 2019-08-27 Arizona Board Of Regents, A Body Corporate Of The State Of Arizona, Acting For And On Behalf Of Arizona State University Microfluidic electrocage device and cell medium for trapping and rotating cells for live-cell computed tomography (CT)
US20180318833A1 (en) * 2015-10-30 2018-11-08 Hewlett-Packard Development Company, L.P. Microfluidic channel filter
US10570257B2 (en) 2015-11-16 2020-02-25 Applied Materials, Inc. Copolymerized high temperature bonding component
US20170198303A1 (en) * 2015-12-04 2017-07-13 Emory University Methods, Devices and Systems for Enhanced Transduction Efficiency
CN109387423B (zh) * 2018-11-01 2023-10-27 中国人民解放军第五七一九工厂 一种使用光敏树脂的金相冷镶嵌装置及其方法
EP3839626B1 (fr) * 2019-12-18 2023-10-11 Nivarox-FAR S.A. Procede de fabrication d'un composant horloger
CN111834048B (zh) * 2020-08-07 2022-08-05 杭州师范大学 基于离子液体的多功能柔性透明传感材料的制备方法
CN113731519A (zh) * 2021-09-27 2021-12-03 上海化工研究院有限公司 一种热固性树脂微流控芯片及其制备方法
CN114434709B (zh) * 2021-12-28 2024-04-30 汕头大学 一种凹形微井和微通道的快速制作方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030062089A1 (en) * 2001-09-28 2003-04-03 Guillaume Guzman Microfluidic device and manufacture thereof
WO2005108963A1 (fr) * 2004-05-06 2005-11-17 Nanyang Technological University Systeme microfluidicque de tri de cellules

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3568692A (en) * 1967-11-27 1971-03-09 Bowles Eng Corp Optical machining process
JPH02289311A (ja) * 1989-01-25 1990-11-29 Hoya Corp スタンパーおよびこのスタンパーを用いる情報記録媒体用基板の製造方法
DE69524247T2 (de) * 1995-08-04 2002-08-08 Ibm Stempel für lithographie-verfahren
EP0802170A3 (fr) * 1996-04-16 1997-11-05 Corning Incorporated Procédé et appareil de formage de structures nervurées en verre
US6572830B1 (en) * 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
JP2000194142A (ja) * 1998-12-25 2000-07-14 Fujitsu Ltd パタ―ン形成方法及び半導体装置の製造方法
DE10238825A1 (de) * 2002-08-23 2004-03-11 Roche Diagnostics Gmbh Mikrofluidische Systeme mit hohem Aspektverhältnis
JP4090374B2 (ja) * 2003-03-20 2008-05-28 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法
CN1997691B (zh) * 2003-09-23 2011-07-20 北卡罗来纳大学查珀尔希尔分校 光固化的全氟聚醚用作微流体器件中的新材料
JP4726419B2 (ja) * 2004-02-24 2011-07-20 京セラ株式会社 流路部材及び流路装置
JP2006181407A (ja) * 2004-12-27 2006-07-13 Pentax Corp Ｐｄｍｓ製シート
US7479404B2 (en) * 2005-07-08 2009-01-20 The Board Of Trustees Of The University Of Illinois Photonic crystal biosensor structure and fabrication method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030062089A1 (en) * 2001-09-28 2003-04-03 Guillaume Guzman Microfluidic device and manufacture thereof
WO2005108963A1 (fr) * 2004-05-06 2005-11-17 Nanyang Technological University Systeme microfluidicque de tri de cellules

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
FIORINI ET AL: "Fabrication of Thermoset Polyester Microfluidic Devices and Embossing Masters using Rapid Prototyped Polydimethylsiloyane Molds", LAB CHIP, vol. 3, 7 July 2003 (2003-07-07), pages 158 - 163, XP002501778 *
FIORINI ET AL: "Rapid Prototyping of Thermoset Polyester Microfluidic Devices", ANALYTICAL CHEMISTRY, vol. 76, no. 16, 15 August 2004 (2004-08-15), pages 4697 - 4704, XP002501779 *
HEON LEE ET AL: "Fabrication of Nanosize Patterned Substrates using Nano Imprinting Lithography", MICROTECHNOLOGY IN MEDICINE AND BIOLOGY, 2005. 3RD IEEE/EMBS SPECIAL TOPIC CONFERENCE ON HONOLULU, HI, USA 12-15 MAY 2005, PISCATAWAY, NJ, USA,IEEE, 12 May 2005 (2005-05-12), pages 237 - 240, XP010886988, ISBN: 0-7803-8711-2 *
JAKEWAY S C ET AL: "Transition of MEMS technology to nanofabrication", MEMS, NANO AND SMART SYSTEMS, 2003. PROCEEDINGS. INTERNATIONAL CONFERENCE ON JULY 20-23, 2003, PISCATAWAY, NJ, USA,IEEE, 20 July 2003 (2003-07-20), pages 118 - 122, XP010650509, ISBN: 0-7695-1947-4 *
KARNIK R N ET AL: "Stamp-and-Stick Room-Temperature Bonding Technique for Microdevices", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 14, no. 2, April 2005 (2005-04-01), pages 392 - 399, XP011129674, ISSN: 1057-7157 *
LIU J: "Fabrication of Polymeric Microfluidic Devices for Protein Analysis", DISSERTATION SUBMITTES TO THE FACULTY OF BRIGHAM YOUNG UNIVERSITY IN PARTIAL FULFILMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY,, 1 April 2006 (2006-04-01), pages 9 - 22, XP007906132, Retrieved from the Internet <URL:http://patriot.lib.byu.edu/ETD/image/etd1325.pdf> *
STUDER V ET AL: "NANOEMBOSSING OF THERMOPLASTIC POLYMERS FOR MICROFLUIDIC APPLICATIONS", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 80, no. 19, 13 May 2002 (2002-05-13), pages 3614 - 3616, XP001123382, ISSN: 0003-6951 *
TRUCKENMULLER R ET AL: "A new bonding process for polymer micro- and nanostructures based on near-surface degradation", MICRO ELECTRO MECHANICAL SYSTEMS, 2004. 17TH IEEE INTERNATIONAL CONFERENCE ON. (MEMS) MAASTRICHT, NETHERLANDS 25-29 JAN. 2004, PISCATAWAY, NJ, USA,IEEE, US, 25 January 2004 (2004-01-25), pages 761 - 764, XP010767988, ISBN: 0-7803-8265-X *

Also Published As

Publication number Publication date
EP2046676A2 (fr) 2009-04-15
WO2008009803A4 (fr) 2009-03-19
FR2903679A1 (fr) 2008-01-18
FR2903679B1 (fr) 2014-07-04
WO2008009803A2 (fr) 2008-01-24
US8636022B2 (en) 2014-01-28
JP2009543702A (ja) 2009-12-10
JP5684985B2 (ja) 2015-03-18
US20090250130A1 (en) 2009-10-08

Similar Documents

Publication Publication Date Title
WO2008009803A3 (fr) Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee
TW200732556A (en) Apparatus for driving microfluid and the method thereof
WO2007038494A3 (fr) Procede est dispositif permettant le microsoufflage de verre a l&#39;echelle d&#39;une microplaquette
GB2432257B8 (en) A method of forming nano patterns, thin film transistor using the patterns, and liquid crystal display device having the thin film transistor
WO2006036642A3 (fr) Procede de production d&#39;un dispositif d&#39;affichage reflechissant a l&#39;aide de techniques de production de transistors en couches minces
MXPA05009407A (es) Sistema y metodo para dispositivo de despliegue con desecante activado.
WO2009083146A3 (fr) Procédé de réalisation d&#39;une microstructure
DE602007004137D1 (de) Abformung von Mikrostrukturen mit einem Werkzeug mit integrierten Abstandselementen
WO2008055096A3 (fr) Appareil et procédé à film mince
EP2085811A4 (fr) Élément de modulation optique à cristaux liquides, dispositif de modulation optique à cristaux liquides et procédé de commande d&#39;un élément de modulation optique à cristaux liquides
HK1146015A1 (en) Method for the production of a microfluidic system on a polymer surface
WO2008099795A3 (fr) Procédé et appareil d&#39;empreinte
DE102005061305B8 (de) Vorrichtung zum Ansteuern eines Flüssigkristalldisplays sowie Ansteuerungsverfahren unter Verwendung derselben
WO2006116605A3 (fr) Procede pour former des micro-aiguilles creuses hors plan et dispositifs ainsi formes
WO2010099180A3 (fr) Ensemble support pour oreille
WO2008079882A3 (fr) Dispositif de régulation de débit intégré et élément d&#39;isolation
EP1906236A3 (fr) Appareil d&#39;impression et procédé pour la formation d&#39;un film résiduel sur un substrat
WO2011019516A3 (fr) Dispositif de diagnostic microfluidique
EP1901348A3 (fr) Procédé de scellage d&#39;un microcomposant
TW200801729A (en) Composite retardation plate, its production method, composite optical member and liquid crystal display
GB2439639B (en) Resist for soft mould and method for fabricating liquid crystal display using same
TW200612136A (en) Jig for delivering liquid crystal display plate and method of fabricating liquid crystal display
WO2006076301A3 (fr) Dispositifs microfluidiques fabriques par gravure directe sur film epais et procedes associes
JP2010510091A5 (fr)
TWI347464B (en) Stamper manufacturing system for lcd alignment film printing and manufacture method thereof

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07823286

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2009520008

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2007823286

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: RU

WWE Wipo information: entry into national phase

Ref document number: 12374180

Country of ref document: US