WO2008009803A4 - Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee - Google Patents
Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee Download PDFInfo
- Publication number
- WO2008009803A4 WO2008009803A4 PCT/FR2007/001212 FR2007001212W WO2008009803A4 WO 2008009803 A4 WO2008009803 A4 WO 2008009803A4 FR 2007001212 W FR2007001212 W FR 2007001212W WO 2008009803 A4 WO2008009803 A4 WO 2008009803A4
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resin
- base
- stamp
- support
- channel
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0323—Grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/03—Processes for manufacturing substrate-free structures
- B81C2201/036—Hot embossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/032—Gluing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0402—Cleaning, repairing, or assembling
- Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/2224—Structure of body of device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/598—With repair, tapping, assembly, or disassembly means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Abstract
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07823286A EP2046676A2 (fr) | 2006-07-17 | 2007-07-16 | Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee |
JP2009520008A JP5684985B2 (ja) | 2006-07-17 | 2007-07-16 | 光補助および/または熱補助された印刷によるマイクロ流体ポリマーデバイスの製造 |
US12/374,180 US8636022B2 (en) | 2006-07-17 | 2007-07-16 | Production of microfluidic polymeric devices by photo-assisted and/or thermally assisted printing |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0606457A FR2903679B1 (fr) | 2006-07-17 | 2006-07-17 | Fabrication de dispositifs microfluidiques polymeriques par impression photo-assistee. |
FR0606457 | 2006-07-17 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2008009803A2 WO2008009803A2 (fr) | 2008-01-24 |
WO2008009803A3 WO2008009803A3 (fr) | 2008-12-31 |
WO2008009803A4 true WO2008009803A4 (fr) | 2009-03-19 |
Family
ID=37872261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2007/001212 WO2008009803A2 (fr) | 2006-07-17 | 2007-07-16 | Fabrication de dispositifs microfluidiques polymeriques par impression photo- et/ou thermo-assistee |
Country Status (5)
Country | Link |
---|---|
US (1) | US8636022B2 (fr) |
EP (1) | EP2046676A2 (fr) |
JP (1) | JP5684985B2 (fr) |
FR (1) | FR2903679B1 (fr) |
WO (1) | WO2008009803A2 (fr) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9520314B2 (en) * | 2008-12-19 | 2016-12-13 | Applied Materials, Inc. | High temperature electrostatic chuck bonding adhesive |
WO2012004423A1 (fr) * | 2010-07-07 | 2012-01-12 | Ikerlan, S.Coop | Procédé de fabrication de dispositifs microfluidiques |
ES2564855T3 (es) * | 2010-11-12 | 2016-03-29 | Abbvie Inc. | Método y sistema óptico de alto rendimiento para determinar el efecto de una sustancia de ensayo sobre las células vivas |
FR2972117B1 (fr) | 2011-03-04 | 2013-12-20 | Centre Nat Rech Scient | Systeme microfluidique pour controler un profil de concentration de molecules susceptibles de stimuler une cible |
CA2830103C (fr) | 2011-03-15 | 2020-03-24 | National Research Council Of Canada | Systeme microfluidique ayant des structures monolithiques nanoplasmoniques |
US20120280284A1 (en) * | 2011-04-08 | 2012-11-08 | Agency For Science, Technology And Research | Micro-fluidic electronic devices and method for producing such devices |
FR2974360B1 (fr) | 2011-04-22 | 2014-09-12 | Centre Nat Rech Scient | Systeme microfluidique pour controler une carte de concentration de molecules susceptibles de stimuler une cible |
FR2988087B1 (fr) | 2012-03-13 | 2019-08-30 | Total Petrochemicals France | Traitement de surface de dispositifs microfluidiques |
FR2993665B1 (fr) | 2012-07-19 | 2015-10-16 | Commissariat Energie Atomique | Procede de fabrication d'une colonne d'analyse de chromatographie |
FR2993666B1 (fr) * | 2012-07-19 | 2015-03-27 | Commissariat Energie Atomique | Procede de fabrication d'une colonne d'enrichissement de chromatographie |
CA2912947C (fr) * | 2013-05-22 | 2017-06-20 | Imec Vzw | Dispositif d'analyse de fluide compact et son procede de fabrication |
US10391485B2 (en) * | 2013-09-25 | 2019-08-27 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona, Acting For And On Behalf Of Arizona State University | Microfluidic electrocage device and cell medium for trapping and rotating cells for live-cell computed tomography (CT) |
CN108348912B (zh) * | 2015-10-30 | 2021-01-01 | 惠普发展公司,有限责任合伙企业 | 微流体通道过滤器 |
US10570257B2 (en) | 2015-11-16 | 2020-02-25 | Applied Materials, Inc. | Copolymerized high temperature bonding component |
US20170198303A1 (en) * | 2015-12-04 | 2017-07-13 | Emory University | Methods, Devices and Systems for Enhanced Transduction Efficiency |
CN109387423B (zh) * | 2018-11-01 | 2023-10-27 | 中国人民解放军第五七一九工厂 | 一种使用光敏树脂的金相冷镶嵌装置及其方法 |
EP3839626B1 (fr) * | 2019-12-18 | 2023-10-11 | Nivarox-FAR S.A. | Procede de fabrication d'un composant horloger |
CN111834048B (zh) * | 2020-08-07 | 2022-08-05 | 杭州师范大学 | 基于离子液体的多功能柔性透明传感材料的制备方法 |
CN113731519A (zh) * | 2021-09-27 | 2021-12-03 | 上海化工研究院有限公司 | 一种热固性树脂微流控芯片及其制备方法 |
CN114434709B (zh) * | 2021-12-28 | 2024-04-30 | 汕头大学 | 一种凹形微井和微通道的快速制作方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3568692A (en) * | 1967-11-27 | 1971-03-09 | Bowles Eng Corp | Optical machining process |
JPH02289311A (ja) * | 1989-01-25 | 1990-11-29 | Hoya Corp | スタンパーおよびこのスタンパーを用いる情報記録媒体用基板の製造方法 |
JP3372258B2 (ja) * | 1995-08-04 | 2003-01-27 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | リソグラフィ・プロセス用のスタンプ |
EP0802170A3 (fr) * | 1996-04-16 | 1997-11-05 | Corning Incorporated | Procédé et appareil de formage de structures nervurées en verre |
US6572830B1 (en) * | 1998-10-09 | 2003-06-03 | Motorola, Inc. | Integrated multilayered microfludic devices and methods for making the same |
JP2000194142A (ja) * | 1998-12-25 | 2000-07-14 | Fujitsu Ltd | パタ―ン形成方法及び半導体装置の製造方法 |
FR2830206B1 (fr) * | 2001-09-28 | 2004-07-23 | Corning Inc | Dispositif microfluidique et sa fabrication |
DE10238825A1 (de) * | 2002-08-23 | 2004-03-11 | Roche Diagnostics Gmbh | Mikrofluidische Systeme mit hohem Aspektverhältnis |
JP4090374B2 (ja) * | 2003-03-20 | 2008-05-28 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
CN1997691B (zh) * | 2003-09-23 | 2011-07-20 | 北卡罗来纳大学查珀尔希尔分校 | 光固化的全氟聚醚用作微流体器件中的新材料 |
JP4726419B2 (ja) * | 2004-02-24 | 2011-07-20 | 京セラ株式会社 | 流路部材及び流路装置 |
WO2005108963A1 (fr) | 2004-05-06 | 2005-11-17 | Nanyang Technological University | Systeme microfluidicque de tri de cellules |
JP2006181407A (ja) * | 2004-12-27 | 2006-07-13 | Pentax Corp | Pdms製シート |
US7479404B2 (en) * | 2005-07-08 | 2009-01-20 | The Board Of Trustees Of The University Of Illinois | Photonic crystal biosensor structure and fabrication method |
-
2006
- 2006-07-17 FR FR0606457A patent/FR2903679B1/fr not_active Expired - Fee Related
-
2007
- 2007-07-16 JP JP2009520008A patent/JP5684985B2/ja not_active Expired - Fee Related
- 2007-07-16 EP EP07823286A patent/EP2046676A2/fr not_active Ceased
- 2007-07-16 US US12/374,180 patent/US8636022B2/en not_active Expired - Fee Related
- 2007-07-16 WO PCT/FR2007/001212 patent/WO2008009803A2/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2009543702A (ja) | 2009-12-10 |
FR2903679B1 (fr) | 2014-07-04 |
US20090250130A1 (en) | 2009-10-08 |
US8636022B2 (en) | 2014-01-28 |
FR2903679A1 (fr) | 2008-01-18 |
JP5684985B2 (ja) | 2015-03-18 |
WO2008009803A2 (fr) | 2008-01-24 |
EP2046676A2 (fr) | 2009-04-15 |
WO2008009803A3 (fr) | 2008-12-31 |
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