DE602007001728D1 - Hängefahrzeugsystem und Transportverfahren damit - Google Patents

Hängefahrzeugsystem und Transportverfahren damit

Info

Publication number
DE602007001728D1
DE602007001728D1 DE602007001728T DE602007001728T DE602007001728D1 DE 602007001728 D1 DE602007001728 D1 DE 602007001728D1 DE 602007001728 T DE602007001728 T DE 602007001728T DE 602007001728 T DE602007001728 T DE 602007001728T DE 602007001728 D1 DE602007001728 D1 DE 602007001728D1
Authority
DE
Germany
Prior art keywords
vehicle system
transport method
hanging vehicle
hanging
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007001728T
Other languages
English (en)
Inventor
Takanori Izumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of DE602007001728D1 publication Critical patent/DE602007001728D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Leg Units, Guards, And Driving Tracks Of Cranes (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
DE602007001728T 2006-06-16 2007-06-15 Hängefahrzeugsystem und Transportverfahren damit Active DE602007001728D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006167384A JP2007331906A (ja) 2006-06-16 2006-06-16 天井走行車システム

Publications (1)

Publication Number Publication Date
DE602007001728D1 true DE602007001728D1 (de) 2009-09-10

Family

ID=38544040

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007001728T Active DE602007001728D1 (de) 2006-06-16 2007-06-15 Hängefahrzeugsystem und Transportverfahren damit

Country Status (8)

Country Link
US (1) US20080014061A1 (de)
EP (1) EP1868236B1 (de)
JP (1) JP2007331906A (de)
KR (1) KR20070120020A (de)
CN (1) CN101088905B (de)
DE (1) DE602007001728D1 (de)
HK (1) HK1110057A1 (de)
TW (1) TW200806548A (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688824B2 (ja) * 2007-01-12 2011-05-25 村田機械株式会社 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法
JP2010184760A (ja) * 2009-02-10 2010-08-26 Muratec Automation Co Ltd 移載システム
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP5445015B2 (ja) * 2009-10-14 2014-03-19 シンフォニアテクノロジー株式会社 キャリア移載促進装置
JP5429570B2 (ja) 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
EP2554494B1 (de) * 2010-04-02 2020-02-05 Murata Machinery, Ltd. Seitlicher dämpfer für ein entlang einer decke fahrendes transportfahrzeug und transportfahrzeugsystem
JP5229363B2 (ja) * 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法
KR101533366B1 (ko) 2010-11-04 2015-07-02 무라다기카이가부시끼가이샤 반송 시스템 및 반송 방법
JP5382470B2 (ja) * 2010-11-04 2014-01-08 村田機械株式会社 搬送システム及び搬送方法
TWI447058B (zh) * 2011-11-30 2014-08-01 Inotera Memories Inc 天車輸送系統及其運轉方法
CN104395207B (zh) * 2012-07-26 2016-07-06 村田机械株式会社 桥式行驶车系统以及桥式行驶车系统中的移载控制方法
EP3336018B1 (de) * 2015-08-14 2021-12-15 Murata Machinery, Ltd. Fördersystem
WO2018003287A1 (ja) 2016-06-27 2018-01-04 村田機械株式会社 搬送システム
DE102017119928A1 (de) * 2016-09-27 2018-03-29 Westfalia Intralogistic Gmbh Logistiksystem
JP6766584B2 (ja) * 2016-10-19 2020-10-14 株式会社ダイフク 物品搬送設備
WO2018088089A1 (ja) * 2016-11-08 2018-05-17 村田機械株式会社 天井搬送車、及び天井搬送車の制御方法
JP6883120B2 (ja) * 2017-03-03 2021-06-09 パーキンエルマー インフォマティクス， インコーポレイテッド 化学情報を含む文書の検索および索引付けのためのシステムおよび方法
KR102270043B1 (ko) 2017-08-29 2021-06-28 세메스 주식회사 이송 장치
JP6704423B2 (ja) * 2018-01-17 2020-06-03 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
CN108821125B (zh) * 2018-06-25 2020-04-14 芜湖中铁科吉富轨道有限公司 一种钢轨输送加工用悬吊装置及其使用方法
WO2020095571A1 (ja) 2018-11-06 2020-05-14 村田機械株式会社 天井吊下棚
US11673741B2 (en) 2019-01-25 2023-06-13 Murata Machinery, Ltd. Storage system
WO2020153039A1 (ja) * 2019-01-25 2020-07-30 村田機械株式会社 保管システム
KR102252736B1 (ko) * 2019-07-29 2021-05-17 세메스 주식회사 반도체 제조 설비용 이송 장치
TWI714472B (zh) * 2020-03-12 2020-12-21 力晶積成電子製造股份有限公司 晶圓載具運輸系統

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970011065B1 (ko) * 1992-12-21 1997-07-05 다이닛뽕 스크린 세이조오 가부시키가이샤 기판처리장치와 기판처리장치에 있어서 기판교환장치 및 기판교환방법
JP4648190B2 (ja) * 2003-03-28 2011-03-09 平田機工株式会社 基板搬送システム
JP4045451B2 (ja) * 2003-12-26 2008-02-13 村田機械株式会社 天井走行車システム
JP4337683B2 (ja) * 2004-08-16 2009-09-30 村田機械株式会社 搬送システム
JP4221603B2 (ja) * 2005-03-31 2009-02-12 村田機械株式会社 天井走行車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム

Also Published As

Publication number Publication date
TW200806548A (en) 2008-02-01
EP1868236A1 (de) 2007-12-19
HK1110057A1 (en) 2008-07-04
EP1868236B1 (de) 2009-07-29
US20080014061A1 (en) 2008-01-17
CN101088905B (zh) 2010-06-23
KR20070120020A (ko) 2007-12-21
CN101088905A (zh) 2007-12-19
JP2007331906A (ja) 2007-12-27

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