HK1110057A1 - Overhead traveling vehicle system - Google Patents

Overhead traveling vehicle system

Info

Publication number
HK1110057A1
HK1110057A1 HK08104500.7A HK08104500A HK1110057A1 HK 1110057 A1 HK1110057 A1 HK 1110057A1 HK 08104500 A HK08104500 A HK 08104500A HK 1110057 A1 HK1110057 A1 HK 1110057A1
Authority
HK
Hong Kong
Prior art keywords
vehicle system
traveling vehicle
overhead traveling
overhead
vehicle
Prior art date
Application number
HK08104500.7A
Other languages
English (en)
Inventor
Takanori Izumi
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of HK1110057A1 publication Critical patent/HK1110057A1/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
HK08104500.7A 2006-06-16 2008-04-23 Overhead traveling vehicle system HK1110057A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006167384A JP2007331906A (ja) 2006-06-16 2006-06-16 天井走行車システム

Publications (1)

Publication Number Publication Date
HK1110057A1 true HK1110057A1 (en) 2008-07-04

Family

ID=38544040

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08104500.7A HK1110057A1 (en) 2006-06-16 2008-04-23 Overhead traveling vehicle system

Country Status (8)

Country Link
US (1) US20080014061A1 (xx)
EP (1) EP1868236B1 (xx)
JP (1) JP2007331906A (xx)
KR (1) KR20070120020A (xx)
CN (1) CN101088905B (xx)
DE (1) DE602007001728D1 (xx)
HK (1) HK1110057A1 (xx)
TW (1) TW200806548A (xx)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688824B2 (ja) * 2007-01-12 2011-05-25 村田機械株式会社 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法
JP2010184760A (ja) * 2009-02-10 2010-08-26 Muratec Automation Co Ltd 移載システム
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP5445015B2 (ja) * 2009-10-14 2014-03-19 シンフォニアテクノロジー株式会社 キャリア移載促進装置
JP5429570B2 (ja) 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
WO2011125097A1 (ja) * 2010-04-02 2011-10-13 ムラテックオートメーション株式会社 天井を走行する搬送車のサイドバッファ及び搬送車システム
JP5382470B2 (ja) * 2010-11-04 2014-01-08 村田機械株式会社 搬送システム及び搬送方法
CN103201198B (zh) * 2010-11-04 2015-03-11 村田机械株式会社 搬运系统以及搬运方法
JP5229363B2 (ja) * 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法
TWI447058B (zh) * 2011-11-30 2014-08-01 Inotera Memories Inc 天車輸送系統及其運轉方法
WO2014017221A1 (ja) * 2012-07-26 2014-01-30 村田機械株式会社 天井走行車システム及び天井走行車システムでの移載制御方法
EP3336018B1 (en) * 2015-08-14 2021-12-15 Murata Machinery, Ltd. Conveyance system
KR20190009371A (ko) 2016-06-27 2019-01-28 무라다기카이가부시끼가이샤 반송 시스템
DE102017119928A1 (de) * 2016-09-27 2018-03-29 Westfalia Intralogistic Gmbh Logistiksystem
JP6766584B2 (ja) * 2016-10-19 2020-10-14 株式会社ダイフク 物品搬送設備
WO2018088089A1 (ja) * 2016-11-08 2018-05-17 村田機械株式会社 天井搬送車、及び天井搬送車の制御方法
CA3055172C (en) * 2017-03-03 2022-03-01 Perkinelmer Informatics, Inc. Systems and methods for searching and indexing documents comprising chemical information
KR102270043B1 (ko) 2017-08-29 2021-06-28 세메스 주식회사 이송 장치
JP6704423B2 (ja) * 2018-01-17 2020-06-03 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
CN108821125B (zh) * 2018-06-25 2020-04-14 芜湖中铁科吉富轨道有限公司 一种钢轨输送加工用悬吊装置及其使用方法
EP3858763B1 (en) * 2018-11-06 2023-06-07 Murata Machinery, Ltd. Ceiling-hung shelf
EP3915901A4 (en) * 2019-01-25 2022-09-28 Murata Machinery, Ltd. STORAGE SYSTEM
JP7136236B2 (ja) * 2019-01-25 2022-09-13 村田機械株式会社 保管システム
KR102252736B1 (ko) * 2019-07-29 2021-05-17 세메스 주식회사 반도체 제조 설비용 이송 장치
TWI714472B (zh) * 2020-03-12 2020-12-21 力晶積成電子製造股份有限公司 晶圓載具運輸系統

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970011065B1 (ko) * 1992-12-21 1997-07-05 다이닛뽕 스크린 세이조오 가부시키가이샤 기판처리장치와 기판처리장치에 있어서 기판교환장치 및 기판교환방법
WO2004088743A1 (ja) * 2003-03-28 2004-10-14 Hirata Corporation 基板搬送システム
JP4045451B2 (ja) * 2003-12-26 2008-02-13 村田機械株式会社 天井走行車システム
JP4337683B2 (ja) * 2004-08-16 2009-09-30 村田機械株式会社 搬送システム
JP4221603B2 (ja) * 2005-03-31 2009-02-12 村田機械株式会社 天井走行車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム

Also Published As

Publication number Publication date
US20080014061A1 (en) 2008-01-17
KR20070120020A (ko) 2007-12-21
CN101088905B (zh) 2010-06-23
EP1868236B1 (en) 2009-07-29
EP1868236A1 (en) 2007-12-19
CN101088905A (zh) 2007-12-19
JP2007331906A (ja) 2007-12-27
TW200806548A (en) 2008-02-01
DE602007001728D1 (de) 2009-09-10

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20140615