DE602007001424D1 - Verfahren zum Beseitigen von Ausscheidungen aus einem II-VI Halbleitermaterial durch Glühen. - Google Patents
Verfahren zum Beseitigen von Ausscheidungen aus einem II-VI Halbleitermaterial durch Glühen.Info
- Publication number
- DE602007001424D1 DE602007001424D1 DE602007001424T DE602007001424T DE602007001424D1 DE 602007001424 D1 DE602007001424 D1 DE 602007001424D1 DE 602007001424 T DE602007001424 T DE 602007001424T DE 602007001424 T DE602007001424 T DE 602007001424T DE 602007001424 D1 DE602007001424 D1 DE 602007001424D1
- Authority
- DE
- Germany
- Prior art keywords
- temperature
- precipitates
- semiconductor material
- annealing
- eliminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0653612A FR2905706B1 (fr) | 2006-09-07 | 2006-09-07 | Procede d'elimination par recuit des precipites dans un materiau semi conducteur ii vi |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007001424D1 true DE602007001424D1 (de) | 2009-08-13 |
Family
ID=37671109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007001424T Active DE602007001424D1 (de) | 2006-09-07 | 2007-09-05 | Verfahren zum Beseitigen von Ausscheidungen aus einem II-VI Halbleitermaterial durch Glühen. |
Country Status (8)
Country | Link |
---|---|
US (1) | US8021482B2 (de) |
EP (1) | EP1897965B1 (de) |
JP (2) | JP6004601B2 (de) |
AT (1) | ATE435312T1 (de) |
DE (1) | DE602007001424D1 (de) |
ES (1) | ES2329520T3 (de) |
FR (1) | FR2905706B1 (de) |
PL (1) | PL1897965T3 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103114335B (zh) * | 2011-11-17 | 2016-04-27 | 通用电气公司 | 生产碲化镉或碲锌镉单晶体的方法 |
US20140341799A1 (en) * | 2011-12-15 | 2014-11-20 | Midsummer Ab | Recycling of copper indium gallium diselenide |
JP6456782B2 (ja) * | 2015-06-23 | 2019-01-23 | Jx金属株式会社 | CdTe系化合物半導体単結晶及びその製造方法 |
EP3305950B1 (de) * | 2015-07-03 | 2020-02-19 | JX Nippon Mining & Metals Corporation | Einkristall aus cdte-basierter verbindung und verfahren zur herstellung davon |
JP7265004B2 (ja) | 2019-05-17 | 2023-04-25 | Jx金属株式会社 | 半導体ウエハ、放射線検出素子、放射線検出器、及び化合物半導体単結晶基板の製造方法 |
EP3919941A4 (de) | 2019-05-17 | 2022-11-02 | JX Nippon Mining & Metals Corporation | Halbleiterscheibe, strahlungsdetektionselement, strahlungsdetektor und verfahren zur herstellung eines monokristallinen verbindungshalbleitersubstrats |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3870473A (en) * | 1970-09-02 | 1975-03-11 | Hughes Aircraft Co | Tandem furnace crystal growing device |
US4190486A (en) * | 1973-10-04 | 1980-02-26 | Hughes Aircraft Company | Method for obtaining optically clear, high resistivity II-VI, III-V, and IV-VI compounds by heat treatment |
US4012242A (en) * | 1973-11-14 | 1977-03-15 | International Rectifier Corporation | Liquid epitaxy technique |
JPS577171A (en) * | 1980-06-16 | 1982-01-14 | Junichi Nishizawa | Manufacture of znsepn junction |
US4482423A (en) * | 1982-06-25 | 1984-11-13 | At&T Bell Laboratories | Protection of semiconductor substrates during epitaxial growth processes |
US4481044A (en) * | 1982-11-29 | 1984-11-06 | Texas Instruments Incorporated | High-temperature Hg anneal for HgCdTe |
JPS61106498A (ja) * | 1984-07-10 | 1986-05-24 | Yokogawa Hokushin Electric Corp | CdTeの結晶成長法 |
JPS6287499A (ja) * | 1985-10-14 | 1987-04-21 | Nippon Mining Co Ltd | 単結晶CdTeの熱処理方法 |
US4740386A (en) * | 1987-03-30 | 1988-04-26 | Rockwell International Corporation | Method for depositing a ternary compound having a compositional profile |
US4960721A (en) * | 1987-11-10 | 1990-10-02 | Kabushiki Kaisha Toshiba | Method for purifying group II-IV compound semiconductors |
JPH0259485A (ja) * | 1988-08-24 | 1990-02-28 | Matsushita Electric Ind Co Ltd | 結晶成長方法 |
JPH0717477B2 (ja) * | 1989-03-15 | 1995-03-01 | シャープ株式会社 | 化合物半導体のエピタキシャル成長方法 |
US5028296A (en) * | 1989-09-15 | 1991-07-02 | Texas Instruments Incorporated | Annealing method |
JP2832241B2 (ja) * | 1989-10-09 | 1998-12-09 | 株式会社ジャパンエナジー | ▲ii▼―▲vi▼族化合物半導体結晶の製造方法 |
US5041719A (en) * | 1990-06-01 | 1991-08-20 | General Electric Company | Two-zone electrical furnace for molecular beam epitaxial apparatus |
US5201985A (en) * | 1991-03-07 | 1993-04-13 | Harald A.T.O. | Method and apparatus for the purification and control of the composition of non-stoichiometric and stoichiometric crystalline compounds |
JP2746497B2 (ja) * | 1992-03-03 | 1998-05-06 | 三菱電機株式会社 | 半導体装置の製造方法 |
US5599733A (en) * | 1993-10-15 | 1997-02-04 | Texas Instruments Incorporated | Method using cadmium-rich CdTe for lowering the metal vacancy concentrations of HgCdTe surfaces |
DE69609568T2 (de) * | 1995-05-26 | 2001-02-01 | Sumitomo Electric Industries, Ltd. | Verfahren zur Herstellung von einem II-VI oder III-V Halbleitereinkristall |
JP2839027B2 (ja) * | 1997-01-23 | 1998-12-16 | 住友電気工業株式会社 | Ii−vi族化合物半導体の熱処理方法 |
JPH10212192A (ja) * | 1997-01-27 | 1998-08-11 | Japan Energy Corp | バルク結晶の成長方法 |
JP3448688B2 (ja) * | 1998-05-11 | 2003-09-22 | 株式会社ジャパンエナジー | CdTe結晶またはCdZnTe結晶およびその製造方法 |
US6613162B1 (en) * | 1999-10-25 | 2003-09-02 | Rensselaer Polytechnic Institute | Multicomponent homogeneous alloys and method for making same |
JP2001332506A (ja) * | 2000-05-19 | 2001-11-30 | Sumitomo Electric Ind Ltd | ZnSe結晶基板の熱処理方法、熱処理基板及び発光素子 |
JP2003124235A (ja) * | 2001-10-17 | 2003-04-25 | Sumitomo Electric Ind Ltd | Ii−vi族化合物半導体、その熱処理方法およびその熱処理装置 |
-
2006
- 2006-09-07 FR FR0653612A patent/FR2905706B1/fr not_active Expired - Fee Related
-
2007
- 2007-09-05 DE DE602007001424T patent/DE602007001424D1/de active Active
- 2007-09-05 PL PL07115691T patent/PL1897965T3/pl unknown
- 2007-09-05 ES ES07115691T patent/ES2329520T3/es active Active
- 2007-09-05 EP EP07115691A patent/EP1897965B1/de active Active
- 2007-09-05 AT AT07115691T patent/ATE435312T1/de not_active IP Right Cessation
- 2007-09-06 JP JP2007231529A patent/JP6004601B2/ja active Active
- 2007-09-06 US US11/851,051 patent/US8021482B2/en active Active
-
2014
- 2014-10-23 JP JP2014216109A patent/JP2015038035A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2008100900A (ja) | 2008-05-01 |
JP6004601B2 (ja) | 2016-10-12 |
ES2329520T3 (es) | 2009-11-26 |
PL1897965T3 (pl) | 2009-12-31 |
EP1897965B1 (de) | 2009-07-01 |
US20080060729A1 (en) | 2008-03-13 |
FR2905706B1 (fr) | 2009-04-17 |
FR2905706A1 (fr) | 2008-03-14 |
EP1897965A1 (de) | 2008-03-12 |
ATE435312T1 (de) | 2009-07-15 |
US8021482B2 (en) | 2011-09-20 |
JP2015038035A (ja) | 2015-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |