DE602006004331D1 - Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts - Google Patents

Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts

Info

Publication number
DE602006004331D1
DE602006004331D1 DE602006004331T DE602006004331T DE602006004331D1 DE 602006004331 D1 DE602006004331 D1 DE 602006004331D1 DE 602006004331 T DE602006004331 T DE 602006004331T DE 602006004331 T DE602006004331 T DE 602006004331T DE 602006004331 D1 DE602006004331 D1 DE 602006004331D1
Authority
DE
Germany
Prior art keywords
radiation
optical element
layer
radiation beam
originating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006004331T
Other languages
English (en)
Inventor
Jacobus H Neijzen
Santen Helmar Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE602006004331D1 publication Critical patent/DE602006004331D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70583—Speckle reduction, e.g. coherence control or amplitude/wavefront splitting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Head (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Radiation-Therapy Devices (AREA)
DE602006004331T 2005-04-19 2006-04-13 Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts Active DE602006004331D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05103140 2005-04-19
PCT/IB2006/051149 WO2006111896A2 (en) 2005-04-19 2006-04-13 Device for directing radiation to a layer, apparatus with such device and method using such apparatus

Publications (1)

Publication Number Publication Date
DE602006004331D1 true DE602006004331D1 (de) 2009-01-29

Family

ID=36955044

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006004331T Active DE602006004331D1 (de) 2005-04-19 2006-04-13 Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts

Country Status (9)

Country Link
US (1) US7605979B2 (de)
EP (1) EP1875469B1 (de)
JP (1) JP2008537178A (de)
KR (1) KR20070122548A (de)
CN (1) CN101164111B (de)
AT (1) ATE418143T1 (de)
DE (1) DE602006004331D1 (de)
TW (1) TW200727292A (de)
WO (1) WO2006111896A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220141930A (ko) * 2016-09-15 2022-10-20 케이엘에이 코포레이션 이미징 기반 오버레이 계측을 위한 포커스 최적화를 위한 시스템 및 방법
CN114460740B (zh) * 2022-01-21 2023-03-28 华中科技大学 一种单镜环形光斑光学系统

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2624121A1 (de) 1976-05-28 1977-12-15 Siemens Ag Verfahren zum genauen bearbeiten eines im arbeitsfeld eines bearbeitungslasers angeordneten werkstueckes sowie vorrichtung zur ausuebung des verfahrens
JPS5641088A (en) 1979-09-12 1981-04-17 Hitachi Ltd Monitoring device for laser light axis
JPS5843420A (ja) 1981-09-08 1983-03-14 Matsushita Electric Ind Co Ltd レ−ザ用外部光学装置
JPS60254109A (ja) * 1984-05-31 1985-12-14 Canon Inc 光学装置
JPS6047482A (ja) 1983-08-26 1985-03-14 Toshiba Corp レ−ザ照射装置
JPS60216988A (ja) 1984-04-13 1985-10-30 Hitachi Ltd 高出力レ−ザ加工装置
JPS63273587A (ja) 1987-04-30 1988-11-10 Toshiba Corp レ−ザ加工方法
FR2627874B1 (fr) * 1988-02-29 1995-06-16 Framatome Sa Systeme d'alignement d'un faisceau de puissance
JPH0722685A (ja) 1993-06-21 1995-01-24 Mitsubishi Heavy Ind Ltd 光線の焦点合成方法及びその焦点合成装置
JPH09128818A (ja) 1995-11-02 1997-05-16 Sony Corp 露光装置
JP3179322B2 (ja) 1995-12-06 2001-06-25 新日本製鐵株式会社 高出力レーザ伝送方法及び装置
JPH09288850A (ja) 1996-04-18 1997-11-04 Sony Disc Technol:Kk 露光装置及び露光方法
JP3872871B2 (ja) * 1996-07-29 2007-01-24 オリンパス株式会社 対物レンズ及び顕微鏡
KR100205428B1 (ko) * 1996-12-27 1999-07-01 구자홍 멀티포커싱 레이저 빔 레코더 및 그의 멀티포커싱 방법
JPH10289475A (ja) * 1997-04-16 1998-10-27 Sony Corp 露光装置
JP2001504974A (ja) 1997-08-26 2001-04-10 オーエムデイ・デバイシズ・エルエルシー 三次元の情報担体用の読取り方法およびその装置
NL1007068C2 (nl) * 1997-09-18 1999-03-22 Nl Laser Res Laserbewerkingsapparaat.
DE19852302A1 (de) * 1998-11-12 2000-05-25 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Bearbeiten von Werkstücken mit Hochenergiestrahlung
JP2000306274A (ja) 1999-04-23 2000-11-02 Nippon Columbia Co Ltd 光ディスク用原盤の記録装置
NL1013003C2 (nl) * 1999-09-08 2001-03-12 Odme Internat B V Inrichting geschikt voor het vervaardigen van een optische registratiedrager zoals bijvoorbeeld een moederplaat.
JP2002008254A (ja) 2000-06-22 2002-01-11 Matsushita Electric Ind Co Ltd 情報記録装置
US6596961B2 (en) * 2001-09-12 2003-07-22 Fraunhofer Usa, Inc. Method and apparatus for monitoring and adjusting a laser welding process
JP3683851B2 (ja) * 2001-11-29 2005-08-17 哲也 牧村 光パターニングにより無機透明材料を加工する光加工装置及び光加工方法
JP2003272187A (ja) 2002-03-20 2003-09-26 Hitachi Ltd フォーカス制御装置及び光ディスク原盤露光装置
EP1349008A1 (de) * 2002-03-28 2003-10-01 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
WO2006067723A1 (en) * 2004-12-22 2006-06-29 Arima Devices Corporation Optical scanning device with low building height

Also Published As

Publication number Publication date
JP2008537178A (ja) 2008-09-11
TW200727292A (en) 2007-07-16
ATE418143T1 (de) 2009-01-15
WO2006111896A3 (en) 2006-12-07
CN101164111B (zh) 2010-06-16
WO2006111896A2 (en) 2006-10-26
KR20070122548A (ko) 2007-12-31
EP1875469B1 (de) 2008-12-17
EP1875469A2 (de) 2008-01-09
US7605979B2 (en) 2009-10-20
US20080186549A1 (en) 2008-08-07
CN101164111A (zh) 2008-04-16

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