DE602005021890D1 - Nichtwässrige mikroelektronische reinigungszusammensetzungen mit fructose - Google Patents
Nichtwässrige mikroelektronische reinigungszusammensetzungen mit fructoseInfo
- Publication number
- DE602005021890D1 DE602005021890D1 DE602005021890T DE602005021890T DE602005021890D1 DE 602005021890 D1 DE602005021890 D1 DE 602005021890D1 DE 602005021890 T DE602005021890 T DE 602005021890T DE 602005021890 T DE602005021890 T DE 602005021890T DE 602005021890 D1 DE602005021890 D1 DE 602005021890D1
- Authority
- DE
- Germany
- Prior art keywords
- fructose
- aqueous
- microelectronic
- cleansing compositions
- compositions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000203 mixture Substances 0.000 title abstract 3
- RFSUNEUAIZKAJO-ARQDHWQXSA-N Fructose Chemical compound OC[C@H]1O[C@](O)(CO)[C@@H](O)[C@@H]1O RFSUNEUAIZKAJO-ARQDHWQXSA-N 0.000 title abstract 2
- 229930091371 Fructose Natural products 0.000 title abstract 2
- 239000005715 Fructose Substances 0.000 title abstract 2
- 238000004377 microelectronic Methods 0.000 title 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 150000001412 amines Chemical class 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 239000003112 inhibitor Substances 0.000 abstract 1
- 230000009972 noncorrosive effect Effects 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000003495 polar organic solvent Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0073—Anticorrosion compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2065—Polyhydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2096—Heterocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Detergent Compositions (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US58824804P | 2004-07-15 | 2004-07-15 | |
| PCT/US2005/003422 WO2006019402A1 (en) | 2004-07-15 | 2005-02-01 | Non-aqueous microelectronic cleaning compositions containing fructose |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE602005021890D1 true DE602005021890D1 (de) | 2010-07-29 |
Family
ID=34960702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE602005021890T Active DE602005021890D1 (de) | 2004-07-15 | 2005-02-01 | Nichtwässrige mikroelektronische reinigungszusammensetzungen mit fructose |
Country Status (19)
| Country | Link |
|---|---|
| US (1) | US7825078B2 (de) |
| EP (1) | EP1787168B1 (de) |
| JP (1) | JP4272676B2 (de) |
| KR (1) | KR100642185B1 (de) |
| CN (1) | CN1985217B (de) |
| AT (1) | ATE471537T1 (de) |
| BR (1) | BRPI0513315A (de) |
| CA (1) | CA2573788A1 (de) |
| DE (1) | DE602005021890D1 (de) |
| DK (1) | DK1787168T3 (de) |
| ES (1) | ES2345616T3 (de) |
| IL (1) | IL180532A (de) |
| MY (1) | MY140032A (de) |
| NO (1) | NO20070835L (de) |
| PL (1) | PL1787168T3 (de) |
| PT (1) | PT1787168E (de) |
| TW (1) | TW200613544A (de) |
| WO (1) | WO2006019402A1 (de) |
| ZA (1) | ZA200610563B (de) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060064441A (ko) * | 2004-12-08 | 2006-06-13 | 말린크로트 베이커, 인코포레이티드 | 비수성 비부식성 마이크로전자 세정 조성물 |
| KR101088568B1 (ko) * | 2005-04-19 | 2011-12-05 | 아반토르 퍼포먼스 머티리얼스, 인크. | 갈바닉 부식을 억제하는 비수성 포토레지스트 스트립퍼 |
| KR100829376B1 (ko) * | 2006-12-20 | 2008-05-13 | 동부일렉트로닉스 주식회사 | 반도체 소자의 세정방법 |
| JP2009008768A (ja) * | 2007-06-26 | 2009-01-15 | Kobe Steel Ltd | 表示装置の製造方法 |
| TW200925800A (en) * | 2007-12-06 | 2009-06-16 | Mallinckrodt Baker Inc | Fluoride-free photoresist stripper or residue removing cleaning compositions containing conjugate oligomeric or polymeric material of alpha-hydroxycarbonyl compound/amine or ammonia reaction |
| KR101579846B1 (ko) * | 2008-12-24 | 2015-12-24 | 주식회사 이엔에프테크놀로지 | 포토레지스트 패턴 제거용 조성물 및 이를 이용한 금속 패턴의 형성 방법 |
| WO2010098899A1 (en) * | 2009-02-25 | 2010-09-02 | Mallinckrodt Baker, Inc. | Multipurpose acidic, organic solvent based microelectronic cleaning composition |
| KR101089211B1 (ko) * | 2010-12-02 | 2011-12-02 | 엘티씨 (주) | 1차 알칸올 아민을 포함하는 ｌｃｄ 제조용 포토레지스트 박리액 조성물 |
| US9327966B2 (en) * | 2011-06-01 | 2016-05-03 | Avantor Performance Materials, Inc. | Semi-aqueous polymer removal compositions with enhanced compatibility to copper, tungsten, and porous low-K dielectrics |
| MY172099A (en) | 2011-10-05 | 2019-11-13 | Avantor Performance Mat Llc | Microelectronic substrate cleaning compositions having copper/azole polymer inhibition |
| JP6144468B2 (ja) * | 2012-08-22 | 2017-06-07 | 富士フイルム株式会社 | レジスト剥離方法および半導体基板製品の製造方法 |
| CN103937627B (zh) * | 2014-03-28 | 2017-10-10 | 张海鹏 | 一种用于贴片电容的清洗剂 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6326130B1 (en) | 1993-10-07 | 2001-12-04 | Mallinckrodt Baker, Inc. | Photoresist strippers containing reducing agents to reduce metal corrosion |
| US5567574A (en) | 1995-01-10 | 1996-10-22 | Mitsubishi Gas Chemical Company, Inc. | Removing agent composition for photoresist and method of removing |
| US6440326B1 (en) | 1998-08-13 | 2002-08-27 | Mitsubishi Gas Chemical Company, Inc. | Photoresist removing composition |
| KR100286860B1 (ko) | 1998-12-31 | 2001-07-12 | 주식회사 동진쎄미켐 | 포토레지스트 리무버 조성물 |
| JP4224651B2 (ja) * | 1999-02-25 | 2009-02-18 | 三菱瓦斯化学株式会社 | レジスト剥離剤およびそれを用いた半導体素子の製造方法 |
| KR20040032855A (ko) * | 2001-07-13 | 2004-04-17 | 이케이씨 테크놀로지, 인코포레이티드 | 술폭시드 피롤리드(인)온 알칸올아민 박리 및 세정 조성물 |
| JP4252758B2 (ja) * | 2002-03-22 | 2009-04-08 | 関東化学株式会社 | フォトレジスト残渣除去液組成物 |
-
2005
- 2005-02-01 DE DE602005021890T patent/DE602005021890D1/de active Active
- 2005-02-01 JP JP2006534481A patent/JP4272676B2/ja not_active Expired - Fee Related
- 2005-02-01 AT AT05712754T patent/ATE471537T1/de active
- 2005-02-01 PT PT05712754T patent/PT1787168E/pt unknown
- 2005-02-01 EP EP05712754A patent/EP1787168B1/de not_active Not-in-force
- 2005-02-01 WO PCT/US2005/003422 patent/WO2006019402A1/en active Application Filing
- 2005-02-01 CN CN2005800237425A patent/CN1985217B/zh not_active Expired - Fee Related
- 2005-02-01 PL PL05712754T patent/PL1787168T3/pl unknown
- 2005-02-01 ES ES05712754T patent/ES2345616T3/es active Active
- 2005-02-01 BR BRPI0513315-7A patent/BRPI0513315A/pt not_active IP Right Cessation
- 2005-02-01 CA CA002573788A patent/CA2573788A1/en not_active Abandoned
- 2005-02-01 US US11/630,602 patent/US7825078B2/en not_active Expired - Fee Related
- 2005-02-01 DK DK05712754.0T patent/DK1787168T3/da active
- 2005-02-21 KR KR1020050014181A patent/KR100642185B1/ko not_active IP Right Cessation
- 2005-02-25 MY MYPI20050742A patent/MY140032A/en unknown
- 2005-03-23 TW TW094108991A patent/TW200613544A/zh unknown
-
2006
- 2006-12-15 ZA ZA200610563A patent/ZA200610563B/en unknown
-
2007
- 2007-01-03 IL IL180532A patent/IL180532A/en not_active IP Right Cessation
- 2007-02-13 NO NO20070835A patent/NO20070835L/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| IL180532A0 (en) | 2007-06-03 |
| EP1787168B1 (de) | 2010-06-16 |
| ES2345616T3 (es) | 2010-09-28 |
| CN1985217B (zh) | 2011-10-12 |
| PT1787168E (pt) | 2010-07-16 |
| ATE471537T1 (de) | 2010-07-15 |
| JP2007511784A (ja) | 2007-05-10 |
| MY140032A (en) | 2009-11-30 |
| NO20070835L (no) | 2007-04-10 |
| ZA200610563B (en) | 2008-07-30 |
| US20080287333A1 (en) | 2008-11-20 |
| JP4272676B2 (ja) | 2009-06-03 |
| TW200613544A (en) | 2006-05-01 |
| CN1985217A (zh) | 2007-06-20 |
| US7825078B2 (en) | 2010-11-02 |
| KR100642185B1 (ko) | 2006-11-10 |
| BRPI0513315A (pt) | 2008-05-06 |
| EP1787168A1 (de) | 2007-05-23 |
| IL180532A (en) | 2012-03-29 |
| WO2006019402A1 (en) | 2006-02-23 |
| KR20060043033A (ko) | 2006-05-15 |
| CA2573788A1 (en) | 2006-02-23 |
| DK1787168T3 (da) | 2010-08-09 |
| PL1787168T3 (pl) | 2010-11-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AVANTOR PERFORMANCE MATERIALS, INC., PHILLIPSB, US |