DE602005018206D1 - Direktelektronen-detektor - Google Patents

Direktelektronen-detektor

Info

Publication number
DE602005018206D1
DE602005018206D1 DE602005018206T DE602005018206T DE602005018206D1 DE 602005018206 D1 DE602005018206 D1 DE 602005018206D1 DE 602005018206 T DE602005018206 T DE 602005018206T DE 602005018206 T DE602005018206 T DE 602005018206T DE 602005018206 D1 DE602005018206 D1 DE 602005018206D1
Authority
DE
Germany
Prior art keywords
contacts
detector
mum
central portion
spatial resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005018206T
Other languages
English (en)
Inventor
Ruediger Reinhard Meyer
Angus Ian Kirkland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Original Assignee
Oxford University Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford University Innovation Ltd filed Critical Oxford University Innovation Ltd
Publication of DE602005018206D1 publication Critical patent/DE602005018206D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Light Receiving Elements (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE602005018206T 2004-05-27 2005-05-24 Direktelektronen-detektor Active DE602005018206D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0411926.9A GB0411926D0 (en) 2004-05-27 2004-05-27 Direct electron detector
PCT/GB2005/002039 WO2005117145A1 (en) 2004-05-27 2005-05-24 Direct electron detector

Publications (1)

Publication Number Publication Date
DE602005018206D1 true DE602005018206D1 (de) 2010-01-21

Family

ID=32671203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005018206T Active DE602005018206D1 (de) 2004-05-27 2005-05-24 Direktelektronen-detektor

Country Status (7)

Country Link
US (2) US20070262404A1 (de)
EP (1) EP1756874B1 (de)
JP (1) JP4815434B2 (de)
AT (1) ATE451721T1 (de)
DE (1) DE602005018206D1 (de)
GB (1) GB0411926D0 (de)
WO (1) WO2005117145A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7714300B1 (en) * 2006-06-27 2010-05-11 Kla-Tencor Technologies Corporation High-speed high-efficiency solid-state electron detector
EP2461347A1 (de) 2010-12-06 2012-06-06 Fei Company Detektorsystem für Transmissionselektronenmikroskop
DE102010055633A1 (de) * 2010-12-22 2012-06-28 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Halbleiterdetektor mit versetztem Bondkontakt
US8940634B2 (en) 2011-06-29 2015-01-27 International Business Machines Corporation Overlapping contacts for semiconductor device
FR2978566B1 (fr) 2011-07-25 2016-10-28 Commissariat Energie Atomique Systeme d'imagerie pour l'imagerie d'objets a mouvement rapide
JP2013057598A (ja) * 2011-09-08 2013-03-28 Rigaku Corp 半導体ストリップ検出器
US9805910B1 (en) * 2015-03-14 2017-10-31 Kla-Tencor Corporation Automated SEM nanoprobe tool
ES2653767B1 (es) 2016-07-07 2019-03-28 Consejo Superior Investigacion Sensor de electrones para microscopia electronica
EP3444843B8 (de) * 2017-08-14 2021-03-24 ams International AG Anordnung zur detektion von elektromagnetischer strahlung und verfahren zur herstellung einer anordnung zur detektion von elektromagnetischer strahlung
TW202238175A (zh) * 2019-11-05 2022-10-01 荷蘭商Ａｓｍｌ荷蘭公司 用於高速應用之大主動區域偵測器封裝
ES2890176B2 (es) * 2020-07-01 2022-10-31 Consejo Superior Investigacion Detector para medir la energia de electrones en microscopios electronicos de barrido

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3586857A (en) * 1968-05-30 1971-06-22 Siemens Ag Semiconductor electron detector
NL8700370A (nl) 1987-02-16 1988-09-16 Philips Nv Stralingsgevoelige halfgeleiderinrichting.
US5146296A (en) * 1987-12-03 1992-09-08 Xsirius Photonics, Inc. Devices for detecting and/or imaging single photoelectron
US5164809A (en) * 1989-04-21 1992-11-17 The Regents Of The University Of Calif. Amorphous silicon radiation detectors
US5030831A (en) * 1989-10-19 1991-07-09 University Of Pittsburgh Method of operating p-i-n diodes and superlattice devices as far infrared detectors
DE4102285A1 (de) 1991-01-26 1992-08-06 Messerschmitt Boelkow Blohm Verfahren zur herstellung einer membrandiode
US5627377A (en) * 1995-09-07 1997-05-06 Santa Barbara Research Center Single carrier-type solid-state radiation detector device
US6204087B1 (en) * 1997-02-07 2001-03-20 University Of Hawai'i Fabrication of three-dimensional architecture for solid state radiation detectors
JP3254164B2 (ja) * 1997-04-30 2002-02-04 科学技術振興事業団 イメージングマイクロストリップガスチャンバー
JP4547760B2 (ja) * 2000-02-28 2010-09-22 株式会社島津製作所 放射線検出器および放射線撮像装置
JP2001305234A (ja) * 2000-04-25 2001-10-31 Nikon Corp 半導体電子線検出器
JP2002009272A (ja) * 2000-06-26 2002-01-11 Canon Inc 光電変換装置及びそのリペア方法
JP2002071821A (ja) * 2000-08-25 2002-03-12 Inst Of Physical & Chemical Res 荷電粒子検出装置
JP2003167061A (ja) 2001-11-30 2003-06-13 Ebara Corp マルチビーム検出器、電子線装置、及び該装置を用いた半導体デバイス製造方法
CN101459203B (zh) * 2003-09-09 2011-06-15 旭化成电子材料元件株式会社 红外线传感器ic、红外线传感器及其制造方法

Also Published As

Publication number Publication date
US20090206428A1 (en) 2009-08-20
JP2008500689A (ja) 2008-01-10
US20070262404A1 (en) 2007-11-15
WO2005117145A1 (en) 2005-12-08
EP1756874B1 (de) 2009-12-09
ATE451721T1 (de) 2009-12-15
JP4815434B2 (ja) 2011-11-16
US7888761B2 (en) 2011-02-15
GB0411926D0 (en) 2004-06-30
EP1756874A1 (de) 2007-02-28

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