DE602004002018D1 - Trennung von C2F6 von CF4 durch Adsorption auf Aktivkohle - Google Patents

Trennung von C2F6 von CF4 durch Adsorption auf Aktivkohle

Info

Publication number
DE602004002018D1
DE602004002018D1 DE602004002018T DE602004002018T DE602004002018D1 DE 602004002018 D1 DE602004002018 D1 DE 602004002018D1 DE 602004002018 T DE602004002018 T DE 602004002018T DE 602004002018 T DE602004002018 T DE 602004002018T DE 602004002018 D1 DE602004002018 D1 DE 602004002018D1
Authority
DE
Germany
Prior art keywords
adsorption
activated carbon
separation
impurity
improvement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602004002018T
Other languages
English (en)
Other versions
DE602004002018T2 (de
Inventor
Philip Bruce Henderson
Timothy Christopher Golden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of DE602004002018D1 publication Critical patent/DE602004002018D1/de
Application granted granted Critical
Publication of DE602004002018T2 publication Critical patent/DE602004002018T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0462—Temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/901—Activated carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE602004002018T 2003-04-08 2004-04-06 Trennung von C2F6 von CF4 durch Adsorption auf Aktivkohle Expired - Fee Related DE602004002018T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/409,230 US6669760B1 (en) 2003-04-08 2003-04-08 Separation of C2F6 from CF4 by adsorption on activated carbon
US409230 2003-04-08

Publications (2)

Publication Number Publication Date
DE602004002018D1 true DE602004002018D1 (de) 2006-10-05
DE602004002018T2 DE602004002018T2 (de) 2006-12-07

Family

ID=29736741

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004002018T Expired - Fee Related DE602004002018T2 (de) 2003-04-08 2004-04-06 Trennung von C2F6 von CF4 durch Adsorption auf Aktivkohle

Country Status (6)

Country Link
US (1) US6669760B1 (de)
EP (1) EP1466882B1 (de)
JP (1) JP2004307507A (de)
AT (1) ATE337287T1 (de)
DE (1) DE602004002018T2 (de)
TW (1) TWI270406B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005046746A (ja) * 2003-07-29 2005-02-24 Japan Organo Co Ltd ガス分離装置
US20070261706A1 (en) 2004-12-15 2007-11-15 Ashesh Banerjea Cigarette with carbon on tow filter
JP4683543B2 (ja) * 2005-06-16 2011-05-18 オルガノ株式会社 ガス分離方法及びガス分離装置
EP2318121B1 (de) * 2008-07-04 2012-06-27 The South African Nuclear Energy Corporation Limited Gewinnung einer gasförmigen komponente aus einem gemisch von gasförmigen verbindungen
CN114288812A (zh) * 2021-11-30 2022-04-08 浙江大学 一种分离含氟电子特气的方法
CN114307517B (zh) * 2021-12-31 2022-10-11 天津大学浙江绍兴研究院 惰性气体保护的高纯全氟碳电子特气吸附纯化方法
JP7441985B2 (ja) 2022-02-21 2024-03-01 ダイキン工業株式会社 分離方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462867A (en) 1977-10-28 1979-05-21 Citizen Watch Co Ltd Watch with pulse measuring function
US4820318A (en) * 1987-12-24 1989-04-11 Allied-Signal Inc. Removal of organic compounds from gas streams using carbon molecular sieves
EP0630362B1 (de) 1992-03-10 1996-08-21 E.I. Du Pont De Nemours And Company Reinigung von hexafluorethanprodukten
US5206207A (en) * 1992-03-18 1993-04-27 Westvaco Corporation Preparation for high activity high density carbon
DE4216867A1 (de) * 1992-05-22 1993-11-25 Solvay Catalysts Gmbh Sorption von organischen Verbindungen aus Gasen
US5710092A (en) * 1993-10-25 1998-01-20 Westvaco Corporation Highly microporous carbon
US5622682A (en) * 1994-04-06 1997-04-22 Atmi Ecosys Corporation Method for concentration and recovery of halocarbons from effluent gas streams
EP0744210A1 (de) * 1995-05-22 1996-11-27 The Boc Group, Inc. Reinigung von Gasströmen
JPH0929002A (ja) * 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
US5814127A (en) * 1996-12-23 1998-09-29 American Air Liquide Inc. Process for recovering CF4 and C2 F6 from a gas
US5976222A (en) * 1998-03-23 1999-11-02 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
US6017382A (en) * 1998-03-30 2000-01-25 The Boc Group, Inc. Method of processing semiconductor manufacturing exhaust gases
US6187077B1 (en) 1998-04-17 2001-02-13 American Air Liquide Inc. Separation of CF4 and C2F6 from a perfluorocompound mixture

Also Published As

Publication number Publication date
DE602004002018T2 (de) 2006-12-07
TWI270406B (en) 2007-01-11
TW200422092A (en) 2004-11-01
US6669760B1 (en) 2003-12-30
EP1466882A1 (de) 2004-10-13
EP1466882B1 (de) 2006-08-23
ATE337287T1 (de) 2006-09-15
JP2004307507A (ja) 2004-11-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee