DE602004000851D1 - Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten - Google Patents

Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten

Info

Publication number
DE602004000851D1
DE602004000851D1 DE602004000851T DE602004000851T DE602004000851D1 DE 602004000851 D1 DE602004000851 D1 DE 602004000851D1 DE 602004000851 T DE602004000851 T DE 602004000851T DE 602004000851 T DE602004000851 T DE 602004000851T DE 602004000851 D1 DE602004000851 D1 DE 602004000851D1
Authority
DE
Germany
Prior art keywords
opposite
thin film
piezoelectric elements
acoustically coupled
axes orientation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004000851T
Other languages
English (en)
Other versions
DE602004000851T2 (de
Inventor
John D Larson Iii
Yuri Oshmyansky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/699,481 external-priority patent/US6946928B2/en
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE602004000851D1 publication Critical patent/DE602004000851D1/de
Application granted granted Critical
Publication of DE602004000851T2 publication Critical patent/DE602004000851T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/584—Coupled Resonator Filters [CFR]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
DE602004000851T 2003-10-30 2004-07-01 Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten Active DE602004000851T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US699481 2003-10-30
US10/699,481 US6946928B2 (en) 2003-10-30 2003-10-30 Thin-film acoustically-coupled transformer
US10/836,663 US7091649B2 (en) 2003-10-30 2004-04-29 Film acoustically-coupled transformers with two reverse c-axis piezoelectric elements
US836663 2004-04-29

Publications (2)

Publication Number Publication Date
DE602004000851D1 true DE602004000851D1 (de) 2006-06-14
DE602004000851T2 DE602004000851T2 (de) 2007-05-16

Family

ID=34426391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004000851T Active DE602004000851T2 (de) 2003-10-30 2004-07-01 Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten

Country Status (4)

Country Link
US (1) US7367095B2 (de)
EP (1) EP1528677B1 (de)
JP (1) JP4754803B2 (de)
DE (1) DE602004000851T2 (de)

Families Citing this family (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7275292B2 (en) 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
EP1528676B1 (de) * 2003-10-30 2006-09-13 Avago Technologies General IP (Singapore) Pte. Ltd Akustisch gekoppelter Dünnschicht-Transformator mit piezoelektrischem Material, welches entgegengesetzte C-Axen Orientierung besitzt
US7388454B2 (en) 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7369013B2 (en) 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7436269B2 (en) * 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7868522B2 (en) 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7675390B2 (en) 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7423503B2 (en) * 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7463499B2 (en) 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US7586392B2 (en) * 2006-01-23 2009-09-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Dual path acoustic data coupling system and method
US20070210748A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power supply and electronic device having integrated power supply
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US7479685B2 (en) 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
DE102006032950B4 (de) * 2006-07-17 2010-07-22 Epcos Ag Schaltung mit BAW-Resonatoren
FI121722B (fi) * 2006-09-18 2011-03-15 Valtion Teknillinen Levykondensaattori- tai levyresonaattorijärjestely
US8925163B2 (en) 2006-09-18 2015-01-06 Teknologian Tutkimuskeskus Vtt Method of manufacturing laterally coupled BAW thin films
US20090079514A1 (en) * 2007-09-24 2009-03-26 Tiberiu Jamneala Hybrid acoustic resonator-based filters
US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7732977B2 (en) 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
JP5220503B2 (ja) * 2008-07-23 2013-06-26 太陽誘電株式会社 弾性波デバイス
US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
US9255912B2 (en) 2009-04-29 2016-02-09 The Trustees Of Columbia University In The City Of New York Monolithic FBAR-CMOS structure such as for mass sensing
CA2760508A1 (en) * 2009-04-29 2010-11-04 The Trustees Of Columbia University In The City Of New York Monolithic fbar-cmos structure such as for mass sensing
US20100314973A1 (en) * 2009-06-10 2010-12-16 Ritek Corporation Piezoelectric Device with Magnetically Enhanced Piezoelectricity
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US9847768B2 (en) * 2009-11-23 2017-12-19 Avago Technologies General Ip (Singapore) Pte. Ltd. Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis
US8193877B2 (en) 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US9679765B2 (en) * 2010-01-22 2017-06-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9842983B2 (en) * 2010-10-07 2017-12-12 Epcos Ag Piezoelectric multi-layer component
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
US9490771B2 (en) 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
US9401692B2 (en) 2012-10-29 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having collar structure
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9583354B2 (en) 2011-03-30 2017-02-28 The Aerospace Corporation Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same
US9679779B2 (en) * 2011-03-30 2017-06-13 The Aerospace Corporation Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US9065421B2 (en) * 2012-01-31 2015-06-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
WO2014062936A1 (en) 2012-10-17 2014-04-24 The Trustees Of Columbia University In The City Of New York Cmos-integrated jfet for dense low-noise bioelectronic platforms
US9385684B2 (en) 2012-10-23 2016-07-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having guard ring
WO2014210307A1 (en) 2013-06-26 2014-12-31 Edrees Hassan Co-integrated bulk acoustic wave resonators
US10340885B2 (en) 2014-05-08 2019-07-02 Avago Technologies International Sales Pte. Limited Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes
KR101622488B1 (ko) 2014-12-18 2016-05-18 동국대학교 산학협력단 역전 층 기법을 이용하여 제조된 배열형 초음파 변환자 및 그 제조 방법
US10333494B2 (en) 2014-12-24 2019-06-25 Qorvo Us, Inc. Simplified acoustic RF resonator parallel capacitance compensation
US10581403B2 (en) 2016-07-11 2020-03-03 Qorvo Us, Inc. Device having a titanium-alloyed surface
KR102066960B1 (ko) * 2016-08-03 2020-01-16 삼성전기주식회사 박막 벌크 음향 공진기 및 이를 포함하는 필터
US11050412B2 (en) 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
US11165413B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Coupled resonator structure
US11165412B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Zero-output coupled resonator filter and related radio frequency filter circuit
US11152913B2 (en) 2018-03-28 2021-10-19 Qorvo Us, Inc. Bulk acoustic wave (BAW) resonator
JP2019193220A (ja) * 2018-04-27 2019-10-31 サムソン エレクトロ−メカニックス カンパニーリミテッド． バルク音響共振器を含むフィルター
KR20200094995A (ko) * 2019-01-31 2020-08-10 삼성전기주식회사 체적 음향 공진기
US11146247B2 (en) 2019-07-25 2021-10-12 Qorvo Us, Inc. Stacked crystal filter structures
US11757430B2 (en) 2020-01-07 2023-09-12 Qorvo Us, Inc. Acoustic filter circuit for noise suppression outside resonance frequency
US11146246B2 (en) * 2020-01-13 2021-10-12 Qorvo Us, Inc. Phase shift structures for acoustic resonators
US11146245B2 (en) 2020-01-13 2021-10-12 Qorvo Us, Inc. Mode suppression in acoustic resonators
US11632097B2 (en) 2020-11-04 2023-04-18 Qorvo Us, Inc. Coupled resonator filter device
US11575363B2 (en) 2021-01-19 2023-02-07 Qorvo Us, Inc. Hybrid bulk acoustic wave filter

Family Cites Families (136)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1307476A (fr) * 1960-12-12 1962-10-26 U S Sonics Corp Amplificateur sélecteur de fréquences
US3189851A (en) * 1962-06-04 1965-06-15 Sonus Corp Piezoelectric filter
US3321648A (en) * 1964-06-04 1967-05-23 Sonus Corp Piezoelectric filter element
GB1207974A (en) 1966-11-17 1970-10-07 Clevite Corp Frequency selective apparatus including a piezoelectric device
US3422371A (en) * 1967-07-24 1969-01-14 Sanders Associates Inc Thin film piezoelectric oscillator
US3826931A (en) 1967-10-26 1974-07-30 Hewlett Packard Co Dual crystal resonator apparatus
US3582839A (en) 1968-06-06 1971-06-01 Clevite Corp Composite coupled-mode filter
US3607761A (en) 1968-12-09 1971-09-21 Continental Oil Co Soap bars containing salts of fatty acids derived from the guerbet reaction
US3610969A (en) * 1970-02-06 1971-10-05 Mallory & Co Inc P R Monolithic piezoelectric resonator for use as filter or transformer
US3845402A (en) 1973-02-15 1974-10-29 Edmac Ass Inc Sonobuoy receiver system, floating coupler
JPS5213794A (en) * 1975-07-22 1977-02-02 Kinsekishiya Kenkyusho:Kk Piezoelectric oscillator
FR2380666A1 (fr) 1977-02-14 1978-09-08 Cii Honeywell Bull Systeme de commande de decoupage pour convertisseur dans une alimentation electrique continue
US4084217A (en) 1977-04-19 1978-04-11 Bbc Brown, Boveri & Company, Limited Alternating-current fed power supply
GB2033185B (en) 1978-09-22 1983-05-18 Secr Defence Acoustic wave device with temperature stabilisation
US4281299A (en) 1979-11-23 1981-07-28 Honeywell Inc. Signal isolator
ZA81781B (en) 1980-02-13 1982-03-31 Int Computers Ltd Digital systems
US4320365A (en) 1980-11-03 1982-03-16 United Technologies Corporation Fundamental, longitudinal, thickness mode bulk wave resonator
JPS58137317A (ja) * 1982-02-09 1983-08-15 Nec Corp 圧電薄膜複合振動子
GB2137056B (en) 1983-03-16 1986-09-03 Standard Telephones Cables Ltd Communications apparatus
JPS6070814A (ja) * 1983-09-27 1985-04-22 Murata Mfg Co Ltd 圧電素子
JPS60126907A (ja) * 1983-12-12 1985-07-06 Nippon Telegr & Teleph Corp <Ntt> 単一応答複合圧電振動素子
US4625138A (en) 1984-10-24 1986-11-25 The United States Of America As Represented By The Secretary Of The Army Piezoelectric microwave resonator using lateral excitation
US4719383A (en) * 1985-05-20 1988-01-12 The United States Of America As Represented By The United States Department Of Energy Piezoelectric shear wave resonator and method of making same
SE465946B (sv) 1986-09-11 1991-11-18 Bengt Henoch Anordning foer oeverfoering av elektrisk energi till elektrisk utrustning genom omagnetiska och elektriskt isolerande material
US4906840A (en) 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
US4841429A (en) 1988-03-24 1989-06-20 Hughes Aircraft Company Capacitive coupled power supplies
US4836882A (en) 1988-09-12 1989-06-06 The United States Of America As Represented By The Secretary Of The Army Method of making an acceleration hardened resonator
US5118982A (en) 1989-05-31 1992-06-02 Nec Corporation Thickness mode vibration piezoelectric transformer
US5048038A (en) * 1990-01-25 1991-09-10 The United States Of America As Represented By The United States Department Of Energy Ion-implanted planar-buried-heterostructure diode laser
DE69129879T2 (de) * 1990-05-22 1999-02-18 Canon Kk Datenaufzeichnungsgerät
US5241456A (en) 1990-07-02 1993-08-31 General Electric Company Compact high density interconnect structure
JP2995076B2 (ja) 1990-07-24 1999-12-27 富士通株式会社 半導体装置
US5162691A (en) * 1991-01-22 1992-11-10 The United States Of America As Represented By The Secretary Of The Army Cantilevered air-gap type thin film piezoelectric resonator
US5294898A (en) * 1992-01-29 1994-03-15 Motorola, Inc. Wide bandwidth bandpass filter comprising parallel connected piezoelectric resonators
US5382930A (en) 1992-12-21 1995-01-17 Trw Inc. Monolithic multipole filters made of thin film stacked crystal filters
US5384808A (en) * 1992-12-31 1995-01-24 Apple Computer, Inc. Method and apparatus for transmitting NRZ data signals across an isolation barrier disposed in an interface between adjacent devices on a bus
US5448014A (en) 1993-01-27 1995-09-05 Trw Inc. Mass simultaneous sealing and electrical connection of electronic devices
US5465725A (en) 1993-06-15 1995-11-14 Hewlett Packard Company Ultrasonic probe
US5587620A (en) 1993-12-21 1996-12-24 Hewlett-Packard Company Tunable thin film acoustic resonators and method for making the same
US5594705A (en) * 1994-02-04 1997-01-14 Dynamotive Canada Corporation Acoustic transformer with non-piezoelectric core
US5864261A (en) * 1994-05-23 1999-01-26 Iowa State University Research Foundation Multiple layer acoustical structures for thin-film resonator based circuits and systems
JPH0878786A (ja) * 1994-09-02 1996-03-22 Mitsubishi Electric Corp 歪量子井戸の構造
US5692279A (en) * 1995-08-17 1997-12-02 Motorola Method of making a monolithic thin film resonator lattice filter
CN1183587C (zh) * 1996-04-08 2005-01-05 德克萨斯仪器股份有限公司 用于把两个集成电路直流上相互隔离的方法和设备
US5714917A (en) 1996-10-02 1998-02-03 Nokia Mobile Phones Limited Device incorporating a tunable thin film bulk acoustic resonator for performing amplitude and phase modulation
US5873154A (en) * 1996-10-17 1999-02-23 Nokia Mobile Phones Limited Method for fabricating a resonator having an acoustic mirror
US6087198A (en) * 1998-02-12 2000-07-11 Texas Instruments Incorporated Low cost packaging for thin-film resonators and thin-film resonator-based filters
US5872493A (en) * 1997-03-13 1999-02-16 Nokia Mobile Phones, Ltd. Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror
US5853601A (en) 1997-04-03 1998-12-29 Northrop Grumman Corporation Top-via etch technique for forming dielectric membranes
US6339048B1 (en) * 1999-12-23 2002-01-15 Elementis Specialties, Inc. Oil and oil invert emulsion drilling fluids with improved anti-settling properties
US6040962A (en) * 1997-05-14 2000-03-21 Tdk Corporation Magnetoresistive element with conductive films and magnetic domain films overlapping a central active area
US5910756A (en) * 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
US5894647A (en) * 1997-06-30 1999-04-20 Tfr Technologies, Inc. Method for fabricating piezoelectric resonators and product
JP3378775B2 (ja) 1997-07-07 2003-02-17 株式会社村田製作所 圧電共振子およびその周波数調整方法
US5982297A (en) * 1997-10-08 1999-11-09 The Aerospace Corporation Ultrasonic data communication system
US6873065B2 (en) * 1997-10-23 2005-03-29 Analog Devices, Inc. Non-optical signal isolator
DE19755893C2 (de) * 1997-12-08 2001-01-25 Claus Rein Verfahren und Anordnung zur Energie- und Informationsübertragung mittels Ultraschall
US5936150A (en) * 1998-04-13 1999-08-10 Rockwell Science Center, Llc Thin film resonant chemical sensor with resonant acoustic isolator
US5953479A (en) * 1998-05-07 1999-09-14 The United States Of America As Represented By The Secretary Of The Army Tilted valance-band quantum well double heterostructures for single step active and passive optical waveguide device monolithic integration
KR100328807B1 (ko) 1998-05-08 2002-03-14 가네코 히사시 제조비용이 저렴하고 충분한 접착 강도가 수득될 수 있는 수지구조물 및 이의 제조 방법
GB2337755B (en) * 1998-05-29 2003-10-29 Secr Defence Virus vaccine
JPH11345406A (ja) * 1998-05-29 1999-12-14 Sony Corp マスクパターンの形成方法及び薄膜磁気ヘッドの製造方法
US6060818A (en) 1998-06-02 2000-05-09 Hewlett-Packard Company SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters
DE19826152A1 (de) 1998-06-12 1999-12-16 Thomson Brandt Gmbh Anordnung mit einem Schaltnetzteil und einem Mikroprozessor
US6150703A (en) 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
US6252229B1 (en) 1998-07-10 2001-06-26 Boeing North American, Inc. Sealed-cavity microstructure and microbolometer and associated fabrication methods
US6229247B1 (en) 1998-11-09 2001-05-08 Face International Corp. Multi-layer piezoelectric electrical energy transfer device
WO2000038296A1 (fr) 1998-12-22 2000-06-29 Seiko Epson Corporation Systeme d'alimentation en energie, systeme de reception d'energie, systeme de transmission de puissance, procede de transmission de puissance, dispositif portatif et temporisateur
FI113211B (fi) * 1998-12-30 2004-03-15 Nokia Corp Balansoitu suodatinrakenne ja matkaviestinlaite
US6215375B1 (en) * 1999-03-30 2001-04-10 Agilent Technologies, Inc. Bulk acoustic wave resonator with improved lateral mode suppression
JP3531522B2 (ja) * 1999-04-19 2004-05-31 株式会社村田製作所 圧電共振子
US6262637B1 (en) * 1999-06-02 2001-07-17 Agilent Technologies, Inc. Duplexer incorporating thin-film bulk acoustic resonators (FBARs)
DE19931297A1 (de) * 1999-07-07 2001-01-11 Philips Corp Intellectual Pty Volumenwellen-Filter
US6265246B1 (en) 1999-07-23 2001-07-24 Agilent Technologies, Inc. Microcap wafer-level package
US6228675B1 (en) 1999-07-23 2001-05-08 Agilent Technologies, Inc. Microcap wafer-level package with vias
JP4420538B2 (ja) 1999-07-23 2010-02-24 アバゴ・テクノロジーズ・ワイヤレス・アイピー（シンガポール）プライベート・リミテッド ウェーハパッケージの製造方法
US6107721A (en) * 1999-07-27 2000-08-22 Tfr Technologies, Inc. Piezoelectric resonators on a differentially offset reflector
US6617750B2 (en) 1999-09-21 2003-09-09 Rockwell Automation Technologies, Inc. Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US6292336B1 (en) * 1999-09-30 2001-09-18 Headway Technologies, Inc. Giant magnetoresistive (GMR) sensor element with enhanced magnetoresistive (MR) coefficient
US6307447B1 (en) 1999-11-01 2001-10-23 Agere Systems Guardian Corp. Tuning mechanical resonators for electrical filter
JP2001196883A (ja) 1999-11-01 2001-07-19 Murata Mfg Co Ltd 圧電共振素子の周波数調整方法
US6441539B1 (en) * 1999-11-11 2002-08-27 Murata Manufacturing Co., Ltd. Piezoelectric resonator
US6479320B1 (en) 2000-02-02 2002-11-12 Raytheon Company Vacuum package fabrication of microelectromechanical system devices with integrated circuit components
US6466418B1 (en) * 2000-02-11 2002-10-15 Headway Technologies, Inc. Bottom spin valves with continuous spacer exchange (or hard) bias
US6262600B1 (en) * 2000-02-14 2001-07-17 Analog Devices, Inc. Isolator for transmitting logic signals across an isolation barrier
DE10007577C1 (de) 2000-02-18 2001-09-13 Infineon Technologies Ag Piezoresonator
JP4471443B2 (ja) * 2000-03-29 2010-06-02 京セラ株式会社 圧電共振子
JP2003530750A (ja) * 2000-04-06 2003-10-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 共振器を有するチューニング可能なフィルタ構成
US6384697B1 (en) 2000-05-08 2002-05-07 Agilent Technologies, Inc. Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator
US6420820B1 (en) * 2000-08-31 2002-07-16 Agilent Technologies, Inc. Acoustic wave resonator and method of operating the same to maintain resonance when subjected to temperature variations
US6377137B1 (en) 2000-09-11 2002-04-23 Agilent Technologies, Inc. Acoustic resonator filter with reduced electromagnetic influence due to die substrate thickness
US6486751B1 (en) 2000-09-26 2002-11-26 Agere Systems Inc. Increased bandwidth thin film resonator having a columnar structure
US6530515B1 (en) 2000-09-26 2003-03-11 Amkor Technology, Inc. Micromachine stacked flip chip package fabrication method
US6542055B1 (en) 2000-10-31 2003-04-01 Agilent Technologies, Inc. Integrated filter balun
ATE295632T1 (de) * 2000-11-03 2005-05-15 Paratek Microwave Inc Verfahren zur kanalfrequenzzuteilung für hf- und mikrowellenduplexer
US6515558B1 (en) 2000-11-06 2003-02-04 Nokia Mobile Phones Ltd Thin-film bulk acoustic resonator with enhanced power handling capacity
US6550664B2 (en) 2000-12-09 2003-04-22 Agilent Technologies, Inc. Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology
US6424237B1 (en) 2000-12-21 2002-07-23 Agilent Technologies, Inc. Bulk acoustic resonator perimeter reflection system
US6518860B2 (en) 2001-01-05 2003-02-11 Nokia Mobile Phones Ltd BAW filters having different center frequencies on a single substrate and a method for providing same
US6407649B1 (en) 2001-01-05 2002-06-18 Nokia Corporation Monolithic FBAR duplexer and method of making the same
US6462631B2 (en) 2001-02-14 2002-10-08 Agilent Technologies, Inc. Passband filter having an asymmetrical filter response
US6583374B2 (en) 2001-02-20 2003-06-24 Rockwell Automation Technologies, Inc. Microelectromechanical system (MEMS) digital electrical isolator
US6617249B2 (en) 2001-03-05 2003-09-09 Agilent Technologies, Inc. Method for making thin film bulk acoustic resonators (FBARS) with different frequencies on a single substrate and apparatus embodying the method
US6566979B2 (en) 2001-03-05 2003-05-20 Agilent Technologies, Inc. Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
US6483229B2 (en) * 2001-03-05 2002-11-19 Agilent Technologies, Inc. Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
US6469597B2 (en) * 2001-03-05 2002-10-22 Agilent Technologies, Inc. Method of mass loading of thin film bulk acoustic resonators (FBAR) for creating resonators of different frequencies and apparatus embodying the method
US6472954B1 (en) 2001-04-23 2002-10-29 Agilent Technologies, Inc. Controlled effective coupling coefficients for film bulk acoustic resonators
US6476536B1 (en) 2001-04-27 2002-11-05 Nokia Corporation Method of tuning BAW resonators
US6489688B1 (en) 2001-05-02 2002-12-03 Zeevo, Inc. Area efficient bond pad placement
JP2005236337A (ja) * 2001-05-11 2005-09-02 Ube Ind Ltd 薄膜音響共振器及びその製造方法
US6601276B2 (en) 2001-05-11 2003-08-05 Agere Systems Inc. Method for self alignment of patterned layers in thin film acoustic devices
JP3903842B2 (ja) * 2001-07-03 2007-04-11 株式会社村田製作所 圧電共振子、フィルタおよび電子通信機器
US6936954B2 (en) * 2001-08-29 2005-08-30 Honeywell International Inc. Bulk resonator
US6593870B2 (en) 2001-10-18 2003-07-15 Rockwell Automation Technologies, Inc. MEMS-based electrically isolated analog-to-digital converter
US6630753B2 (en) 2001-10-29 2003-10-07 International Business Machines Corporation Low cost redundant AC to DC power supply
DE10160617A1 (de) * 2001-12-11 2003-06-12 Epcos Ag Akustischer Spiegel mit verbesserter Reflexion
US6600390B2 (en) 2001-12-13 2003-07-29 Agilent Technologies, Inc. Differential filters with common mode rejection and broadband rejection
US6906451B2 (en) * 2002-01-08 2005-06-14 Murata Manufacturing Co., Ltd. Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator
US6670866B2 (en) * 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
US6873529B2 (en) * 2002-02-26 2005-03-29 Kyocera Corporation High frequency module
EP1345323B1 (de) * 2002-03-15 2005-02-09 Matsushita Electric Industrial Co., Ltd. Symmetrisches Hochfrequenz-Bauelement, Schaltkreis und Verfahren zur Verbesserung der Signalsymmetrie
DE10246791B4 (de) * 2002-10-08 2017-10-19 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitender Resonator und Schaltung mit dem Resonator
US6944432B2 (en) * 2002-11-12 2005-09-13 Nokia Corporation Crystal-less oscillator transceiver
DE10256937B4 (de) * 2002-12-05 2018-02-01 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement mit unsymmetrisch/symmetrischer Beschaltung
JP3889351B2 (ja) * 2002-12-11 2007-03-07 Ｔｄｋ株式会社 デュプレクサ
DE10258422A1 (de) * 2002-12-13 2004-06-24 Epcos Ag Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
JP2004304704A (ja) * 2003-04-01 2004-10-28 Matsushita Electric Ind Co Ltd 薄膜音響共振子、及び、薄膜音響共振子回路
JP2005117641A (ja) * 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器
US7019605B2 (en) * 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
EP1528676B1 (de) * 2003-10-30 2006-09-13 Avago Technologies General IP (Singapore) Pte. Ltd Akustisch gekoppelter Dünnschicht-Transformator mit piezoelektrischem Material, welches entgegengesetzte C-Axen Orientierung besitzt
US7391285B2 (en) * 2003-10-30 2008-06-24 Avago Technologies Wireless Ip Pte Ltd Film acoustically-coupled transformer
US7358831B2 (en) * 2003-10-30 2008-04-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with simplified packaging
US6946928B2 (en) * 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7084553B2 (en) * 2004-03-04 2006-08-01 Ludwiczak Damian R Vibrating debris remover
US6963257B2 (en) * 2004-03-19 2005-11-08 Nokia Corporation Coupled BAW resonator based duplexers
US7600371B2 (en) * 2005-10-18 2009-10-13 The Boeing Company Thrust reversers including support members for inhibiting deflection

Also Published As

Publication number Publication date
US7367095B2 (en) 2008-05-06
JP4754803B2 (ja) 2011-08-24
EP1528677B1 (de) 2006-05-10
DE602004000851T2 (de) 2007-05-16
JP2005136992A (ja) 2005-05-26
US20060185139A1 (en) 2006-08-24
EP1528677A1 (de) 2005-05-04

Similar Documents

Publication Publication Date Title
DE602004000851D1 (de) Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten
DE602004002363D1 (de) Akustisch gekoppelter Dünnschicht-Transformator mit piezoelektrischem Material, welches entgegengesetzte C-Axen Orientierung besitzt
DE60328401D1 (de) IP Redundanz mit verbesserter Übergabenachrichtigung
BR0300219B1 (pt) fluorocopolìmero e laminado de múltiplas camadas.
DE50213637D1 (de) Piezoelektrische resonatorvorrichtung mit verstimmungsschichtfolge
DE60327864D1 (de) Ballondissektor mit kanüle
ATE400611T1 (de) Mit pvdf coextrudierbare zusammensetzung
NO20040819L (no) Piezoelektrisk biologisk lydmonitor med kretskort.
DE60308333D1 (de) Materialien mit multiplen vesikelschichten
DE60143295D1 (de) Feldsteuereinheit mit zwei adern
DE60313018D1 (de) Mikroelektromechanisches bauteil mit piezoelektrischem dünnfilmaktuator
DE50309880D1 (de) Herbizid-kombinationen mit speziellen sulfonylharnstoffen
DE60221961D1 (de) Mikrobearbeiteter variabler Parallelplattenkondensator mit Plattenfederung
DE60302850D1 (de) Applikator mit wenigstens zwei getrennt gelagerten Produkten
DE602004009490D1 (de) Piezoelektrischer Oszillator
HK1062357A1 (en) Thin film piezoelectric element, its manufacturingmethod, and actuator using the same
DE602004030057D1 (de) Mehrschichtiges Piezoelektrisches Bauelement
DE602004027519D1 (de) Mehrschichtiges piezoelektrisches bauelement
DE602004023174D1 (de) Fehlerzulassende Schaltung mit Redundanz
EP1450477A4 (de) Piezoelektrisches betätigungsglied und uhr und tragbare einheit mit piezoelektrischem betätigungsglied
DE502004002210D1 (de) Gurtaufroller mit zwei straffvorrichtungen
DE602004008552D1 (de) Drehtisch mit zwei Lagern
DE602004029076D1 (de) Mehrschichtiges piezoelektrisches bauelement
ATE381264T1 (de) Herbizid-kombinationen mit speziellen sulfonamiden
DE50303735D1 (de) Verdichtermaschine mit zwei gegensinnig laufenden rotoren

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: AVAGO TECHNOLOGIES GENERAL IP PTE. LTD., SINGAPUR,

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: DILG HAEUSLER SCHINDELMANN PATENTANWALTSGESELLSCHA

8327 Change in the person/name/address of the patent owner

Owner name: AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. L, SG