DE60142385D1 - Maske zur Herstellung von Bildschirmen - Google Patents
Maske zur Herstellung von BildschirmenInfo
- Publication number
- DE60142385D1 DE60142385D1 DE60142385T DE60142385T DE60142385D1 DE 60142385 D1 DE60142385 D1 DE 60142385D1 DE 60142385 T DE60142385 T DE 60142385T DE 60142385 T DE60142385 T DE 60142385T DE 60142385 D1 DE60142385 D1 DE 60142385D1
- Authority
- DE
- Germany
- Prior art keywords
- screens
- mask
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Gas-Filled Discharge Tubes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2000-0071327A KR100382491B1 (ko) | 2000-11-28 | 2000-11-28 | 유기 el의 새도우 마스크 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60142385D1 true DE60142385D1 (de) | 2010-07-29 |
Family
ID=19702008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60142385T Expired - Lifetime DE60142385D1 (de) | 2000-11-28 | 2001-11-27 | Maske zur Herstellung von Bildschirmen |
Country Status (6)
Country | Link |
---|---|
US (1) | US6866720B2 (de) |
EP (1) | EP1209522B1 (de) |
JP (1) | JP2002221912A (de) |
KR (1) | KR100382491B1 (de) |
CN (1) | CN1209681C (de) |
DE (1) | DE60142385D1 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100848972B1 (ko) * | 2001-08-24 | 2008-07-30 | 다이니폰 인사츠 가부시키가이샤 | 진공증착용 다면부착 마스크장치 |
KR100490534B1 (ko) * | 2001-12-05 | 2005-05-17 | 삼성에스디아이 주식회사 | 유기 전자 발광 소자의 박막 증착용 마스크 프레임 조립체 |
KR100472012B1 (ko) * | 2001-12-17 | 2005-03-08 | 조수제 | 섀도우 마스크 및 그 제조 방법 |
US20030151118A1 (en) * | 2002-02-14 | 2003-08-14 | 3M Innovative Properties Company | Aperture masks for circuit fabrication |
US6821348B2 (en) * | 2002-02-14 | 2004-11-23 | 3M Innovative Properties Company | In-line deposition processes for circuit fabrication |
US6897164B2 (en) * | 2002-02-14 | 2005-05-24 | 3M Innovative Properties Company | Aperture masks for circuit fabrication |
US6727125B2 (en) * | 2002-04-17 | 2004-04-27 | Sharp Laboratories Of America, Inc. | Multi-pattern shadow mask system and method for laser annealing |
KR100813832B1 (ko) * | 2002-05-31 | 2008-03-17 | 삼성에스디아이 주식회사 | 증착용 마스크 프레임 조립체와 이의 제조방법 |
CN100464440C (zh) * | 2002-06-03 | 2009-02-25 | 三星移动显示器株式会社 | 用于有机电致发光装置的薄层真空蒸发的掩模框组件 |
US20030221620A1 (en) * | 2002-06-03 | 2003-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Vapor deposition device |
KR100480705B1 (ko) * | 2002-07-03 | 2005-04-06 | 엘지전자 주식회사 | 유기 el 소자 제작용 새도우 마스크 및 그 제조 방법 |
KR100499476B1 (ko) * | 2002-07-22 | 2005-07-05 | 엘지전자 주식회사 | 유기 el 소자의 새도우 마스크 |
US6729927B2 (en) * | 2002-08-01 | 2004-05-04 | Eastman Kodak Company | Method and apparatus for making a shadow mask array |
KR100698044B1 (ko) * | 2002-10-19 | 2007-03-23 | 엘지.필립스 엘시디 주식회사 | 마스크 설계 방법 및 패널 형성 방법 |
KR100463532B1 (ko) * | 2002-10-22 | 2004-12-29 | 엘지전자 주식회사 | 대면적 풀-컬러 디스플레이 패널의 제작방법 |
US6926840B2 (en) * | 2002-12-31 | 2005-08-09 | Eastman Kodak Company | Flexible frame for mounting a deposition mask |
JP4089632B2 (ja) * | 2003-03-07 | 2008-05-28 | セイコーエプソン株式会社 | マスクの製造方法、マスクの製造装置、発光材料の成膜方法 |
KR100534580B1 (ko) * | 2003-03-27 | 2005-12-07 | 삼성에스디아이 주식회사 | 표시장치용 증착 마스크 및 그의 제조방법 |
JP2005276480A (ja) * | 2004-03-23 | 2005-10-06 | Seiko Epson Corp | マスク、マスクの製造方法、薄膜パターンの形成方法、電気光学装置の製造方法および電子機器 |
KR100659057B1 (ko) | 2004-07-15 | 2006-12-21 | 삼성에스디아이 주식회사 | 박막 증착용 마스크 프레임 조립체 및 유기 전계 발광표시장치 |
KR100676177B1 (ko) * | 2005-03-22 | 2007-02-01 | 엘지전자 주식회사 | 유기전계발광표시소자의 제조장치 |
KR100662558B1 (ko) * | 2005-12-13 | 2006-12-28 | 삼성전자주식회사 | 마스크 및 이를 이용한 디스플레이장치의 제조방법 |
WO2007099518A1 (en) * | 2006-03-03 | 2007-09-07 | Ecole Polytechnique Federale De Lausanne (Epfl) | Stencil mask for accurate pattern replication |
KR100775846B1 (ko) * | 2006-09-04 | 2007-11-13 | 엘지전자 주식회사 | 디스플레이 소자 제조용 마스크 |
KR100853544B1 (ko) * | 2007-04-05 | 2008-08-21 | 삼성에스디아이 주식회사 | 평판 표시장치 박막 증착용 마스크 프레임 조립체 및 이를이용한 증착장비 |
KR100947442B1 (ko) | 2007-11-20 | 2010-03-12 | 삼성모바일디스플레이주식회사 | 수직 증착형 마스크 제조장치 및 이를 이용한 수직 증착형마스크의 제조방법 |
TWI398533B (zh) * | 2009-12-29 | 2013-06-11 | Au Optronics Corp | 蔭罩及其製作方法 |
KR101182440B1 (ko) * | 2010-01-11 | 2012-09-12 | 삼성디스플레이 주식회사 | 박막 증착용 마스크 프레임 조립체 |
CN102110787B (zh) * | 2010-11-05 | 2012-07-25 | 四川虹视显示技术有限公司 | Oled掩膜板对位方法 |
KR101759347B1 (ko) * | 2010-12-14 | 2017-08-01 | 삼성디스플레이 주식회사 | 박막 증착용 마스크 프레임 조립체 및 그 제조방법 |
KR101693578B1 (ko) * | 2011-03-24 | 2017-01-10 | 삼성디스플레이 주식회사 | 증착 마스크 |
JP5890252B2 (ja) * | 2012-05-30 | 2016-03-22 | 日本航空電子工業株式会社 | 電気コネクタ |
US9583363B2 (en) | 2012-12-31 | 2017-02-28 | Sunedison Semiconductor Limited (Uen201334164H) | Processes and apparatus for preparing heterostructures with reduced strain by radial distension |
KR20140109699A (ko) * | 2013-03-06 | 2014-09-16 | 삼성디스플레이 주식회사 | 마스크 구조체와 이를 포함하는 마스크 조립체 및 마스크 구조체 제조방법 |
KR20140125191A (ko) * | 2013-04-18 | 2014-10-28 | 삼성디스플레이 주식회사 | 증착 장치 |
CN103235451A (zh) * | 2013-04-23 | 2013-08-07 | 北京京东方光电科技有限公司 | 掩膜板及其制造方法 |
GB201311738D0 (en) * | 2013-06-29 | 2013-08-14 | British Telecomm | Apparatus |
CN103757589A (zh) * | 2014-01-23 | 2014-04-30 | 上海和辉光电有限公司 | 掩膜装置、制造该掩膜装置的系统以及方法 |
US10323316B2 (en) * | 2014-10-17 | 2019-06-18 | Advantech Global, Ltd | Multi-mask alignment system and method |
US10745796B2 (en) * | 2014-10-17 | 2020-08-18 | Advantech Global, Ltd | Multi-mask alignment system and method |
CN105986225A (zh) * | 2015-02-16 | 2016-10-05 | 上海和辉光电有限公司 | Oled蒸镀用的屏蔽层及其制作方法 |
KR102404575B1 (ko) * | 2015-10-12 | 2022-06-03 | 삼성디스플레이 주식회사 | 증착 장치와 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
CN105568217B (zh) | 2016-01-06 | 2017-12-05 | 京东方科技集团股份有限公司 | 金属掩模板及其制作方法 |
CN106527041B (zh) | 2016-10-10 | 2018-10-09 | 南京中电熊猫液晶显示科技有限公司 | 掩膜版及其曝光方法、以及液晶显示面板 |
CN110767689B (zh) * | 2018-10-31 | 2022-08-16 | 云谷(固安)科技有限公司 | 掩膜板、显示面板、其制备方法及显示终端 |
JP7487481B2 (ja) | 2019-02-06 | 2024-05-21 | 大日本印刷株式会社 | 蒸着マスク装置、マスク支持機構及び蒸着マスク装置の製造方法 |
CN109750257B (zh) * | 2019-03-26 | 2021-03-26 | 京东方科技集团股份有限公司 | 掩膜板及其制造方法 |
KR101999360B1 (ko) * | 2019-05-14 | 2019-07-11 | 주식회사 핌스 | 박막 증착용 마스크 조립체를 위한 복합 프레임 요소 및 그 제조 방법 |
CN111020477B (zh) * | 2019-11-29 | 2021-12-21 | 武汉天马微电子有限公司 | 一种掩膜装置、蒸镀方法及显示面板 |
KR20210091382A (ko) * | 2020-01-13 | 2021-07-22 | 삼성디스플레이 주식회사 | 마스크, 이의 제조 방법, 및 표시 패널 제조 방법 |
KR20220034993A (ko) * | 2020-09-11 | 2022-03-21 | 삼성디스플레이 주식회사 | 증착 장치 및 증착 장치의 마스크 착좌 방법 |
KR102435235B1 (ko) * | 2020-10-07 | 2022-08-24 | 주식회사 효산 | 마스크의 제조 방법 및 마스크 |
CN115747714A (zh) * | 2022-11-24 | 2023-03-07 | 黄石全洋光电科技有限公司 | 一种具有分离式网框的张网机及其张网加工方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3352282A (en) | 1965-07-23 | 1967-11-14 | Bendix Corp | Vacuum deposit device including means to register and manipulate mask and substrate elements |
JPS60181264A (ja) * | 1984-02-24 | 1985-09-14 | Konishiroku Photo Ind Co Ltd | 製膜方法およびその装置 |
JPH09120592A (ja) | 1995-10-23 | 1997-05-06 | Dainippon Printing Co Ltd | 成膜装置用マスク及びそれを利用する成膜基板 |
JP2815004B2 (ja) * | 1996-10-30 | 1998-10-27 | 日本電気株式会社 | 表示装置およびその製造方法 |
DE29707686U1 (de) | 1997-04-28 | 1997-06-26 | Balzers Prozess Systeme Vertri | Magnethalterung für Folienmasken |
JP4016220B2 (ja) * | 1997-06-10 | 2007-12-05 | ホーチキ株式会社 | 蒸着膜形成方法及び真空蒸着装置 |
JP4058149B2 (ja) * | 1997-12-01 | 2008-03-05 | キヤノンアネルバ株式会社 | 真空成膜装置のマスク位置合わせ方法 |
JP2848384B1 (ja) * | 1997-12-05 | 1999-01-20 | 日本電気株式会社 | 有機el表示装置及びその製造方法 |
KR100282392B1 (ko) * | 1998-06-12 | 2001-02-15 | 구자홍 | 풀-컬러유기전계발광소자및그제조방법 |
JP4282798B2 (ja) * | 1998-11-02 | 2009-06-24 | ローム株式会社 | Elディスプレイパネルおよびその製造方法 |
US6146489A (en) * | 1998-11-19 | 2000-11-14 | General Electric Company | Method and apparatus for depositing scintillator material on radiation imager |
JP3575303B2 (ja) * | 1998-11-26 | 2004-10-13 | トヨタ自動車株式会社 | 薄膜形成方法 |
KR100595170B1 (ko) * | 1999-03-17 | 2006-07-03 | 엘지전자 주식회사 | 풀-컬러 유기 el 디스플레이 패널 및 그 제조방법 |
KR100606439B1 (ko) * | 1999-04-08 | 2006-07-31 | 엘지.필립스 엘시디 주식회사 | 전기발광소자 제조방법 |
JP2001237073A (ja) * | 2000-02-24 | 2001-08-31 | Tohoku Pioneer Corp | 多面取り用メタルマスク及びその製造方法 |
-
2000
- 2000-11-28 KR KR10-2000-0071327A patent/KR100382491B1/ko active IP Right Grant
-
2001
- 2001-11-27 DE DE60142385T patent/DE60142385D1/de not_active Expired - Lifetime
- 2001-11-27 US US09/993,521 patent/US6866720B2/en not_active Expired - Lifetime
- 2001-11-27 EP EP01128145A patent/EP1209522B1/de not_active Expired - Lifetime
- 2001-11-28 CN CNB011381612A patent/CN1209681C/zh not_active Expired - Lifetime
- 2001-11-28 JP JP2001362324A patent/JP2002221912A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1209522A2 (de) | 2002-05-29 |
JP2002221912A (ja) | 2002-08-09 |
EP1209522B1 (de) | 2010-06-16 |
EP1209522A3 (de) | 2004-09-29 |
KR100382491B1 (ko) | 2003-05-09 |
CN1209681C (zh) | 2005-07-06 |
US6866720B2 (en) | 2005-03-15 |
CN1362642A (zh) | 2002-08-07 |
US20020062785A1 (en) | 2002-05-30 |
KR20020041654A (ko) | 2002-06-03 |
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