DE60141150D1 - Vorrichtung zur untersuchung der wafer-oberfläche und verfahren zur untersuchung der wafer-oberfläche - Google Patents
Vorrichtung zur untersuchung der wafer-oberfläche und verfahren zur untersuchung der wafer-oberflächeInfo
- Publication number
- DE60141150D1 DE60141150D1 DE60141150T DE60141150T DE60141150D1 DE 60141150 D1 DE60141150 D1 DE 60141150D1 DE 60141150 T DE60141150 T DE 60141150T DE 60141150 T DE60141150 T DE 60141150T DE 60141150 D1 DE60141150 D1 DE 60141150D1
- Authority
- DE
- Germany
- Prior art keywords
- wafer surface
- studying
- examining
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000269163A JP4733820B2 (ja) | 2000-09-05 | 2000-09-05 | 不良ウエハの判定装置及び判定方法 |
JP2000269147A JP4733252B2 (ja) | 2000-09-05 | 2000-09-05 | ウエハの表面検査装置及び検査方法 |
JP2000301148A JP4659961B2 (ja) | 2000-09-29 | 2000-09-29 | ウエハ表面情報処理装置 |
JP2000301146A JP4623809B2 (ja) | 2000-09-29 | 2000-09-29 | ウエハ表面検査装置及びウエハ表面検査方法 |
PCT/JP2001/007699 WO2002021111A1 (fr) | 2000-09-05 | 2001-09-05 | Appareil d'inspection de la surface de plaquettes, procede d'inspection de la surface de plaquettes, appareil d'estimation de plaquettes defectueuses, procede d'estimation de plaquette defectueuse et appareil de traitement d'informations sur la surface de plaquettes |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60141150D1 true DE60141150D1 (de) | 2010-03-11 |
Family
ID=27481588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60141150T Expired - Lifetime DE60141150D1 (de) | 2000-09-05 | 2001-09-05 | Vorrichtung zur untersuchung der wafer-oberfläche und verfahren zur untersuchung der wafer-oberfläche |
Country Status (6)
Country | Link |
---|---|
US (1) | US7383156B2 (de) |
EP (1) | EP1324022B1 (de) |
KR (2) | KR20030034149A (de) |
DE (1) | DE60141150D1 (de) |
TW (1) | TW513772B (de) |
WO (1) | WO2002021111A1 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4584531B2 (ja) * | 2002-08-02 | 2010-11-24 | 株式会社日立製作所 | 異物モニタリングシステム |
US6766265B2 (en) * | 2002-12-18 | 2004-07-20 | Advanced Micro Devices, Inc. | Processing tester information by trellising in integrated circuit technology development |
DE10260817B3 (de) * | 2002-12-23 | 2004-08-26 | Infineon Technologies Ag | Verfahren und Vorrichtung zur Analyse von Kratzern auf Halbleiterwafern |
US7319935B2 (en) * | 2003-02-12 | 2008-01-15 | Micron Technology, Inc. | System and method for analyzing electrical failure data |
US7471382B2 (en) | 2004-10-04 | 2008-12-30 | Kla-Tencor Technologies Corporation | Surface inspection system with improved capabilities |
US8041103B2 (en) | 2005-11-18 | 2011-10-18 | Kla-Tencor Technologies Corp. | Methods and systems for determining a position of inspection data in design data space |
US7570796B2 (en) | 2005-11-18 | 2009-08-04 | Kla-Tencor Technologies Corp. | Methods and systems for utilizing design data in combination with inspection data |
US7676077B2 (en) | 2005-11-18 | 2010-03-09 | Kla-Tencor Technologies Corp. | Methods and systems for utilizing design data in combination with inspection data |
JP4982303B2 (ja) * | 2006-09-25 | 2012-07-25 | 株式会社東芝 | 検査方法、検査システム、検査プログラム及び電子デバイスの製造方法 |
WO2008086282A2 (en) | 2007-01-05 | 2008-07-17 | Kla-Tencor Corporation | Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions |
JP4597155B2 (ja) * | 2007-03-12 | 2010-12-15 | 株式会社日立ハイテクノロジーズ | データ処理装置、およびデータ処理方法 |
US9404858B2 (en) * | 2007-03-22 | 2016-08-02 | Byk-Gardner Gmbh | Method and apparatus for determination of surface properties of coatings by determining contrast of an evaluated image |
US8213704B2 (en) | 2007-05-09 | 2012-07-03 | Kla-Tencor Corp. | Methods and systems for detecting defects in a reticle design pattern |
US7975245B2 (en) | 2007-08-20 | 2011-07-05 | Kla-Tencor Corp. | Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects |
US8139844B2 (en) | 2008-04-14 | 2012-03-20 | Kla-Tencor Corp. | Methods and systems for determining a defect criticality index for defects on wafers |
WO2010014609A2 (en) | 2008-07-28 | 2010-02-04 | Kla-Tencor Corporation | Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer |
TWI535901B (zh) * | 2008-09-29 | 2016-06-01 | 勝高股份有限公司 | 矽晶圓及其製造方法 |
US8775101B2 (en) | 2009-02-13 | 2014-07-08 | Kla-Tencor Corp. | Detecting defects on a wafer |
US8204297B1 (en) | 2009-02-27 | 2012-06-19 | Kla-Tencor Corp. | Methods and systems for classifying defects detected on a reticle |
US8112241B2 (en) | 2009-03-13 | 2012-02-07 | Kla-Tencor Corp. | Methods and systems for generating an inspection process for a wafer |
TWI497623B (zh) * | 2009-07-06 | 2015-08-21 | Camtek Ltd | 用於自動秘方驗證及選擇之系統及方法 |
US9418413B1 (en) | 2009-07-06 | 2016-08-16 | Camtek Ltd. | System and a method for automatic recipe validation and selection |
US8781781B2 (en) | 2010-07-30 | 2014-07-15 | Kla-Tencor Corp. | Dynamic care areas |
EP2447889A1 (de) * | 2010-10-29 | 2012-05-02 | Siemens Aktiengesellschaft | Verfahren zur Modellierung eines Defektmanagements in einem Herstellungsverfahren und zur Handhabung des Defekts während des Herstellungsverfahrens basierend auf dem modellierten Defektmanagement |
KR101230203B1 (ko) * | 2010-12-28 | 2013-03-18 | 유진인스텍 주식회사 | 웨이퍼 연마헤드의 표면결함 검출장치 |
US9170211B2 (en) | 2011-03-25 | 2015-10-27 | Kla-Tencor Corp. | Design-based inspection using repeating structures |
US9087367B2 (en) | 2011-09-13 | 2015-07-21 | Kla-Tencor Corp. | Determining design coordinates for wafer defects |
KR101288105B1 (ko) * | 2011-11-21 | 2013-07-22 | 바이옵트로 주식회사 | 측정 장치 |
US8831334B2 (en) | 2012-01-20 | 2014-09-09 | Kla-Tencor Corp. | Segmentation for wafer inspection |
US9177370B2 (en) * | 2012-03-12 | 2015-11-03 | Kla-Tencor Corporation | Systems and methods of advanced site-based nanotopography for wafer surface metrology |
US10330608B2 (en) * | 2012-05-11 | 2019-06-25 | Kla-Tencor Corporation | Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools |
US8826200B2 (en) | 2012-05-25 | 2014-09-02 | Kla-Tencor Corp. | Alteration for wafer inspection |
US9189844B2 (en) | 2012-10-15 | 2015-11-17 | Kla-Tencor Corp. | Detecting defects on a wafer using defect-specific information |
US9053527B2 (en) | 2013-01-02 | 2015-06-09 | Kla-Tencor Corp. | Detecting defects on a wafer |
US9134254B2 (en) | 2013-01-07 | 2015-09-15 | Kla-Tencor Corp. | Determining a position of inspection system output in design data space |
US9311698B2 (en) | 2013-01-09 | 2016-04-12 | Kla-Tencor Corp. | Detecting defects on a wafer using template image matching |
KR102019534B1 (ko) | 2013-02-01 | 2019-09-09 | 케이엘에이 코포레이션 | 결함 특유의, 다중 채널 정보를 이용한 웨이퍼 상의 결함 검출 |
US9865512B2 (en) | 2013-04-08 | 2018-01-09 | Kla-Tencor Corp. | Dynamic design attributes for wafer inspection |
US9310320B2 (en) | 2013-04-15 | 2016-04-12 | Kla-Tencor Corp. | Based sampling and binning for yield critical defects |
NL2017860B1 (en) | 2015-12-07 | 2017-07-27 | Ultratech Inc | Systems and methods of characterizing process-induced wafer shape for process control using cgs interferometry |
US10217190B2 (en) * | 2016-12-27 | 2019-02-26 | Kla-Tencor Corporation | System and method for reconstructing high-resolution point spread functions from low-resolution inspection images |
KR102017612B1 (ko) * | 2017-09-13 | 2019-09-04 | 주성엔지니어링(주) | 기판처리장치용 기판검사방법 |
KR102073361B1 (ko) * | 2017-12-29 | 2020-02-04 | 주식회사 비스텔 | 뉴럴 네트워크 모델 기반의 웨이퍼 불량 패턴 인식 방법 및 이를 위한 컴퓨터 프로그램 |
KR102073362B1 (ko) * | 2017-12-29 | 2020-02-04 | 주식회사 비스텔 | 웨이퍼 맵을 불량 패턴에 따라 분류하는 방법 및 컴퓨터 프로그램 |
WO2019180714A1 (en) * | 2018-03-22 | 2019-09-26 | Optimal Plus Ltd. | Methods and systems for detecting defects on an electronic assembly |
CN111563870B (zh) * | 2019-02-14 | 2023-10-27 | 深圳中科飞测科技股份有限公司 | 图像处理方法和设备、检测方法和装置、存储介质 |
KR20220010509A (ko) * | 2019-05-07 | 2022-01-25 | 쉬저우 신징 세미컨덕터 테크놀러지 컴퍼니 리미티드 | 웨이퍼 상의 결함을 자동 감지하고 제어하는 방법 및 시스템 |
JP7400667B2 (ja) * | 2020-08-31 | 2023-12-19 | 株式会社Sumco | シリコンウェーハの検査方法、シリコンウェーハの製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4589139A (en) * | 1982-02-04 | 1986-05-13 | Nippon Kogaku K. K. | Apparatus for detecting defects in pattern |
US4532650A (en) * | 1983-05-12 | 1985-07-30 | Kla Instruments Corporation | Photomask inspection apparatus and method using corner comparator defect detection algorithm |
JP2923789B2 (ja) * | 1990-01-11 | 1999-07-26 | 日立電子エンジニアリング株式会社 | 面板欠陥データの欠陥種別分類方法 |
IL102659A (en) * | 1992-07-27 | 1997-07-13 | Orbot Instr Ltd | Apparatus and method for comparing and aligning two digital representations of an image |
US5479252A (en) * | 1993-06-17 | 1995-12-26 | Ultrapointe Corporation | Laser imaging system for inspection and analysis of sub-micron particles |
US5828778A (en) * | 1995-07-13 | 1998-10-27 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for analyzing failure of semiconductor wafer |
US5761064A (en) | 1995-10-06 | 1998-06-02 | Advanced Micro Devices, Inc. | Defect management system for productivity and yield improvement |
US5913105A (en) * | 1995-11-29 | 1999-06-15 | Advanced Micro Devices Inc | Method and system for recognizing scratch patterns on semiconductor wafers |
JPH09199551A (ja) * | 1996-01-12 | 1997-07-31 | Mitsubishi Electric Corp | インライン検査用検査データ解析処理装置 |
US6542830B1 (en) | 1996-03-19 | 2003-04-01 | Hitachi, Ltd. | Process control system |
JPH10141932A (ja) * | 1996-11-07 | 1998-05-29 | Fujitsu Ltd | パターン検査方法と装置 |
JP3752338B2 (ja) * | 1997-01-31 | 2006-03-08 | オリンパス株式会社 | マクロ検査装置及びプロセスモニタリング方法 |
JP3435684B2 (ja) * | 1997-09-30 | 2003-08-11 | 株式会社アドバンテスト | 画像情報処理装置 |
WO2000014790A1 (fr) * | 1998-09-03 | 2000-03-16 | Hitachi, Ltd. | Systeme d'inspection et procede de production d'un dispositif electronique l'utilisant |
JP2000077495A (ja) * | 1998-09-03 | 2000-03-14 | Hitachi Ltd | 検査システム及びそれを用いた電子デバイスの製造方法 |
JP3784603B2 (ja) * | 2000-03-02 | 2006-06-14 | 株式会社日立製作所 | 検査方法及びその装置並びに検査装置における検査条件設定方法 |
JP4038356B2 (ja) * | 2001-04-10 | 2008-01-23 | 株式会社日立製作所 | 欠陥データ解析方法及びその装置並びにレビューシステム |
-
2001
- 2001-08-31 TW TW090121582A patent/TW513772B/zh not_active IP Right Cessation
- 2001-09-05 DE DE60141150T patent/DE60141150D1/de not_active Expired - Lifetime
- 2001-09-05 WO PCT/JP2001/007699 patent/WO2002021111A1/ja active Application Filing
- 2001-09-05 US US10/363,746 patent/US7383156B2/en not_active Expired - Lifetime
- 2001-09-05 KR KR10-2003-7002429A patent/KR20030034149A/ko active Search and Examination
- 2001-09-05 KR KR1020087000266A patent/KR20080025124A/ko not_active Application Discontinuation
- 2001-09-05 EP EP01963440A patent/EP1324022B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR20080025124A (ko) | 2008-03-19 |
EP1324022A4 (de) | 2005-06-15 |
WO2002021111A1 (fr) | 2002-03-14 |
TW513772B (en) | 2002-12-11 |
KR20030034149A (ko) | 2003-05-01 |
US20040036863A1 (en) | 2004-02-26 |
EP1324022A1 (de) | 2003-07-02 |
US7383156B2 (en) | 2008-06-03 |
EP1324022B1 (de) | 2010-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |