DE60125997D1 - Flüssigkeitsausstosskopf, Verfahren zu seiner Herstellung und Flüssigkeitsausstossgerät - Google Patents

Flüssigkeitsausstosskopf, Verfahren zu seiner Herstellung und Flüssigkeitsausstossgerät

Info

Publication number
DE60125997D1
DE60125997D1 DE60125997T DE60125997T DE60125997D1 DE 60125997 D1 DE60125997 D1 DE 60125997D1 DE 60125997 T DE60125997 T DE 60125997T DE 60125997 T DE60125997 T DE 60125997T DE 60125997 D1 DE60125997 D1 DE 60125997D1
Authority
DE
Germany
Prior art keywords
liquid ejection
manufacture
ejection head
ejection device
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60125997T
Other languages
English (en)
Other versions
DE60125997T2 (de
Inventor
Masahiko Kubota
Masanori Takenouchi
Kiyomitsu Kudo
Ryoji Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60125997D1 publication Critical patent/DE60125997D1/de
Application granted granted Critical
Publication of DE60125997T2 publication Critical patent/DE60125997T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
DE60125997T 2000-02-15 2001-02-14 Flüssigkeitsausstosskopf, Verfahren zu seiner Herstellung und Flüssigkeitsausstossgerät Expired - Lifetime DE60125997T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000037188 2000-02-15
JP2000037188A JP3584193B2 (ja) 2000-02-15 2000-02-15 液体吐出ヘッド、液体吐出装置及び前記液体吐出ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE60125997D1 true DE60125997D1 (de) 2007-03-08
DE60125997T2 DE60125997T2 (de) 2007-11-08

Family

ID=18561113

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60125997T Expired - Lifetime DE60125997T2 (de) 2000-02-15 2001-02-14 Flüssigkeitsausstosskopf, Verfahren zu seiner Herstellung und Flüssigkeitsausstossgerät

Country Status (4)

Country Link
US (1) US6464345B2 (de)
EP (1) EP1125743B1 (de)
JP (1) JP3584193B2 (de)
DE (1) DE60125997T2 (de)

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JP2003025577A (ja) * 2001-07-11 2003-01-29 Canon Inc 液体吐出ヘッド
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP4042497B2 (ja) * 2002-04-15 2008-02-06 セイコーエプソン株式会社 導電膜パターンの形成方法、配線基板、電子デバイス、電子機器、並びに非接触型カード媒体
US7513042B2 (en) 2002-07-12 2009-04-07 Benq Corporation Method for fluid injector
US7252368B2 (en) 2002-07-12 2007-08-07 Benq Corporation Fluid injector
JP4141376B2 (ja) 2003-11-12 2008-08-27 セイコーエプソン株式会社 液滴吐出装置、マイクロアレイの製造装置及びマイクロアレイの製造方法
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
JP4221611B2 (ja) * 2006-10-31 2009-02-12 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP2009119650A (ja) * 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) * 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
JP2009208393A (ja) * 2008-03-05 2009-09-17 Canon Inc インクジェット記録ヘッド
JP2009220286A (ja) * 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
EP2632727B1 (de) * 2010-10-26 2015-08-05 Eastman Kodak Company Spender mit einer anordnung aus flüssigkeitsausgabeelementen
JP2018094845A (ja) 2016-12-15 2018-06-21 キヤノン株式会社 液体吐出ヘッド

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JPH09141873A (ja) 1995-09-22 1997-06-03 Canon Inc 液体吐出ヘッド、液体吐出装置、および記録方法
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JP3647205B2 (ja) 1996-06-07 2005-05-11 キヤノン株式会社 液体吐出方法、液供給方法、液体吐出ヘッド、該液体吐出ヘッドを用いた液体吐出ヘッドカートリッジ、及び液体吐出装置
JP3542460B2 (ja) 1996-06-07 2004-07-14 キヤノン株式会社 液体吐出方法及び液体吐出装置
JP3403009B2 (ja) 1996-07-12 2003-05-06 キヤノン株式会社 可動部材の変位と気泡成長を伴う液体吐出方法、該吐出方法に用いられる液体吐出ヘッド、ヘッドカートリッジ及びこれらを用いた液体吐出装置
JP3927711B2 (ja) 1997-12-05 2007-06-13 キヤノン株式会社 液体吐出ヘッドの製造方法
EP0920998B1 (de) 1997-12-05 2003-04-09 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf, Flüssigkeitsausstossverfahren, Kopfkassette und Flüssigkeitsausstossvorrichtung

Also Published As

Publication number Publication date
JP2001225475A (ja) 2001-08-21
EP1125743B1 (de) 2007-01-17
EP1125743A1 (de) 2001-08-22
JP3584193B2 (ja) 2004-11-04
US6464345B2 (en) 2002-10-15
US20010020966A1 (en) 2001-09-13
DE60125997T2 (de) 2007-11-08

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