DE60124953D1 - Infrarot thermographisches nachweisverfahren für chemische sensoren auf halbleiterbasis - Google Patents

Infrarot thermographisches nachweisverfahren für chemische sensoren auf halbleiterbasis

Info

Publication number
DE60124953D1
DE60124953D1 DE60124953T DE60124953T DE60124953D1 DE 60124953 D1 DE60124953 D1 DE 60124953D1 DE 60124953 T DE60124953 T DE 60124953T DE 60124953 T DE60124953 T DE 60124953T DE 60124953 D1 DE60124953 D1 DE 60124953D1
Authority
DE
Germany
Prior art keywords
procedure
infrared thermographic
semiconductor semiconductors
semiconductors
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60124953T
Other languages
English (en)
Other versions
DE60124953T2 (de
Inventor
Michael Mccarron
A Morris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Application granted granted Critical
Publication of DE60124953D1 publication Critical patent/DE60124953D1/de
Publication of DE60124953T2 publication Critical patent/DE60124953T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/007—Arrangements to check the analyser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Radiation Pyrometers (AREA)
DE60124953T 2000-10-16 2001-10-15 Infrarot thermographisches nachweisverfahren für chemische sensoren auf halbleiterbasis Expired - Lifetime DE60124953T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24062000P 2000-10-16 2000-10-16
US240620P 2000-10-16
PCT/US2001/042710 WO2002068947A2 (en) 2000-10-16 2001-10-15 Infrared thermographic screening technique for semiconductor-based chemical sensors

Publications (2)

Publication Number Publication Date
DE60124953D1 true DE60124953D1 (de) 2007-01-11
DE60124953T2 DE60124953T2 (de) 2007-09-20

Family

ID=22907258

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60124953T Expired - Lifetime DE60124953T2 (de) 2000-10-16 2001-10-15 Infrarot thermographisches nachweisverfahren für chemische sensoren auf halbleiterbasis

Country Status (11)

Country Link
US (1) US6498046B2 (de)
EP (1) EP1351762B1 (de)
JP (1) JP4112369B2 (de)
KR (1) KR100851185B1 (de)
CN (1) CN100429514C (de)
AU (1) AU2002258354B8 (de)
CA (1) CA2423784C (de)
DE (1) DE60124953T2 (de)
HK (1) HK1075024A1 (de)
TW (1) TW554167B (de)
WO (1) WO2002068947A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6849239B2 (en) 2000-10-16 2005-02-01 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing mixtures of gases
KR101127280B1 (ko) * 2000-10-16 2012-04-24 이 아이 듀폰 디 네모아 앤드 캄파니 가스의 혼합물을 분석하는 방법 및 장치
US20050211949A1 (en) 2003-11-13 2005-09-29 Bivens Donald B Detectable refrigerant compositions and uses thereof
CN104048754B (zh) * 2014-05-21 2016-02-03 西北核技术研究所 激光参数测量中光导型探测器的光热效应修正方法
US9678030B2 (en) * 2014-12-30 2017-06-13 General Electricity Company Materials and sensors for detecting gaseous agents
GB201702785D0 (en) * 2017-02-21 2017-04-05 Univ Liverpool Gas sorption screening
US11703471B1 (en) 2018-12-20 2023-07-18 University Of Rhode Island Board Of Trustees Trace detection of chemical compounds via catalytic decomposition and redox reactions
CN111896581B (zh) * 2020-08-06 2022-03-25 西南石油大学 一种基于岩石电阻变化的裂纹分布检测方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4007435A (en) 1973-07-30 1977-02-08 Tien Tseng Ying Sensor device and method of manufacturing same
US4151503A (en) 1977-10-05 1979-04-24 Ford Motor Company Temperature compensated resistive exhaust gas sensor construction
US4234542A (en) 1979-01-29 1980-11-18 Bendix Autolite Corporation Thin coat temperature compensated resistance oxide gas sensor
US4225842A (en) 1979-07-25 1980-09-30 Bendix Autolite Corporation Resistance type oxygen sensor
US4387359A (en) 1981-01-21 1983-06-07 Bendix Autolite Corporation Titania oxygen sensor with chrome oxide compensator
US4646009A (en) * 1982-05-18 1987-02-24 Ade Corporation Contacts for conductivity-type sensors
US4542640A (en) 1983-09-15 1985-09-24 Clifford Paul K Selective gas detection and measurement system
US4535316A (en) 1984-03-26 1985-08-13 Allied Corporation Heated titania oxygen sensor
JPH0672861B2 (ja) 1986-08-04 1994-09-14 日本碍子株式会社 ＮＯｘセンサ
SU1516972A1 (ru) * 1988-01-28 1989-10-23 Предприятие П/Я В-8644 Детектор теплопроводности с пироэлектриком
GB8927567D0 (en) 1989-12-06 1990-02-07 Gen Electric Co Plc Detection of chemicals
EP0527258B1 (de) 1991-08-14 1995-10-25 Siemens Aktiengesellschaft Gassensor-Array zur Detektion einzelner Gaskomponenten in einem Gasgemisch
US5417494A (en) * 1992-05-01 1995-05-23 Exid, Inc. Contactless testing of electronic materials and devices using microwaves
SE513477C2 (sv) 1993-11-08 2000-09-18 Volvo Ab Sensor för detektering av kväveoxidföreningar
DE4408504A1 (de) 1994-03-14 1995-09-21 Bosch Gmbh Robert Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen
DE4408361C2 (de) 1994-03-14 1996-02-01 Bosch Gmbh Robert Elektrochemischer Sensor zur Bestimmung der Sauerstoffkonzentration in Gasgemischen
US5879526A (en) 1994-11-08 1999-03-09 Robert Bosch Gmbh Electrochemical measuring sensor for determining nitrogen oxides in gas mixtures
US5661408A (en) * 1995-03-01 1997-08-26 Qc Solutions, Inc. Real-time in-line testing of semiconductor wafers
GB9512929D0 (en) 1995-06-24 1995-08-30 Sun Electric Uk Ltd Multi-gas sensor systems for automatic emissions measurement
US5554273A (en) 1995-07-26 1996-09-10 Praxair Technology, Inc. Neural network compensation for sensors
US6084418A (en) 1996-02-28 2000-07-04 Denso Corporation Method for accurately detecting sensor element resistance
US5683569A (en) * 1996-02-28 1997-11-04 Motorola, Inc. Method of sensing a chemical and sensor therefor
JPH1068346A (ja) 1996-06-21 1998-03-10 Ngk Insulators Ltd エンジン排ガス系の制御法
US5776601A (en) 1996-10-28 1998-07-07 General Motors Corporation Titania exhaust gas oxygen sensor
US6082176A (en) 1997-06-13 2000-07-04 Ngk Spark Plug Co., Ltd. NOx-concentration detecting apparatus
CA2316188C (en) * 1997-12-23 2005-02-15 Studiengesellschaft Kohle Mbh Method for combinatorial material development using differential thermal images
US6085576A (en) 1998-03-20 2000-07-11 Cyrano Sciences, Inc. Handheld sensing apparatus
EP1084390A4 (de) 1998-06-09 2005-07-27 California Inst Of Techn Kolloidal-teilchen zur verwendung in sensor-arrays

Also Published As

Publication number Publication date
EP1351762B1 (de) 2006-11-29
US6498046B2 (en) 2002-12-24
CN1592652A (zh) 2005-03-09
CA2423784A1 (en) 2002-09-06
KR20030038819A (ko) 2003-05-16
KR100851185B1 (ko) 2008-08-08
WO2002068947A3 (en) 2003-07-31
AU2002258354B2 (en) 2005-08-11
EP1351762A2 (de) 2003-10-15
JP2004519668A (ja) 2004-07-02
TW554167B (en) 2003-09-21
HK1075024A1 (en) 2005-12-02
JP4112369B2 (ja) 2008-07-02
WO2002068947A2 (en) 2002-09-06
DE60124953T2 (de) 2007-09-20
CA2423784C (en) 2010-07-20
AU2002258354B8 (en) 2005-12-08
US20020106827A1 (en) 2002-08-08
CN100429514C (zh) 2008-10-29

Similar Documents

Publication Publication Date Title
DE60034070D1 (de) Integrierte Halbleitervorrichtung
DE60143643D1 (de) Integriertes halbleiterschaltungsbauelement
DE60036594D1 (de) Feldeffekt-Halbleiterbauelement
DE60232480D1 (de) Hochspannungs-Halbleiterbauelement
DE60030208T8 (de) Waferinspektionsvorrichtung
DE60205697D1 (de) Halbleiteranordnung mit Temperaturkompensationsschaltung
DE69827863D1 (de) Integriertes Halbleiterschaltkreisbauelement
DE69937739D1 (de) Halbleitervorrichtung
DE69942813D1 (de) Halbleitervorrichtung
DE60135728D1 (de) Integrierte Halbleiterschaltung
NO20011684L (no) Halvlederlaser-basert avfölingsinnretning
DE60025067D1 (de) Cmos Halbleiter integrierte Schaltung
DE60142141D1 (de) Halbleiterbauelement
DE60005959D1 (de) Halbleiteranordnung
DE19980453T1 (de) Halbleiterbauelement-Testgerät
DE60211244D1 (de) Halbleiterbauelement
DE69920486D1 (de) Halbleiterschaltung
DE60133429D1 (de) Verdrahtungssubstrat, seine Herstellung und Halbleiterbauteil
DE10191585B8 (de) Halbleitervorrichtung
DE60124953D1 (de) Infrarot thermographisches nachweisverfahren für chemische sensoren auf halbleiterbasis
DE60321866D1 (de) Halbleiter integrierte Schaltungsvorrichtung
DE60218009D1 (de) Halbleiterspeichervorrichtung
DE69907257T2 (de) Halbleitergassensor
DE60008047D1 (de) Feldeffekt-Halbleiteranordnung
DE69927476D1 (de) Halbleiteranordnung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition