DE60112813D1 - Verfahren zur behandlung einer verbrauchten glycolaufschlämmung - Google Patents

Verfahren zur behandlung einer verbrauchten glycolaufschlämmung

Info

Publication number
DE60112813D1
DE60112813D1 DE60112813T DE60112813T DE60112813D1 DE 60112813 D1 DE60112813 D1 DE 60112813D1 DE 60112813 T DE60112813 T DE 60112813T DE 60112813 T DE60112813 T DE 60112813T DE 60112813 D1 DE60112813 D1 DE 60112813D1
Authority
DE
Germany
Prior art keywords
consumed
treating
glycol
tube
glycol tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60112813T
Other languages
English (en)
Other versions
DE60112813T2 (de
Inventor
Carlo Zavattari
Guido Fragiacomo
Elio Portaluppi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Garbo Srl Cerano Novara It
MEMC Electronic Materials SpA
Original Assignee
GARBO SERVIZI Srl NOVARA
GARBO SERVIZI Srl
SunEdison Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GARBO SERVIZI Srl NOVARA, GARBO SERVIZI Srl, SunEdison Inc filed Critical GARBO SERVIZI Srl NOVARA
Application granted granted Critical
Publication of DE60112813D1 publication Critical patent/DE60112813D1/de
Publication of DE60112813T2 publication Critical patent/DE60112813T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
    • C10M175/005—Working-up used lubricants to recover useful products ; Cleaning using extraction processes; apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/10—Arrangements for cooling or lubricating tools or work
    • B23Q11/1069—Filtration systems specially adapted for cutting liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007—Use, recovery or regeneration of abrasive mediums
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE60112813T 2001-05-29 2001-05-29 Verfahren zur behandlung einer verbrauchten glycolaufschlämmung Expired - Lifetime DE60112813T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IT2001/000276 WO2002096611A1 (en) 2001-05-29 2001-05-29 Method for treating an exhausted glycol-based slurry

Publications (2)

Publication Number Publication Date
DE60112813D1 true DE60112813D1 (de) 2005-09-22
DE60112813T2 DE60112813T2 (de) 2006-03-30

Family

ID=11133671

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60144346T Expired - Lifetime DE60144346D1 (de) 2001-05-29 2001-05-29 Verfahren zur Behandlung einer verbrauchten Glykolaufschlämmung
DE60112813T Expired - Lifetime DE60112813T2 (de) 2001-05-29 2001-05-29 Verfahren zur behandlung einer verbrauchten glycolaufschlämmung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE60144346T Expired - Lifetime DE60144346D1 (de) 2001-05-29 2001-05-29 Verfahren zur Behandlung einer verbrauchten Glykolaufschlämmung

Country Status (4)

Country Link
US (1) US7223344B2 (de)
EP (2) EP1390184B1 (de)
DE (2) DE60144346D1 (de)
WO (1) WO2002096611A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60144346D1 (de) 2001-05-29 2011-05-12 Memc Electronic Materials Verfahren zur Behandlung einer verbrauchten Glykolaufschlämmung
US7736501B2 (en) * 2002-09-19 2010-06-15 Suncor Energy Inc. System and process for concentrating hydrocarbons in a bitumen feed
CA2400258C (en) * 2002-09-19 2005-01-11 Suncor Energy Inc. Bituminous froth inclined plate separator and hydrocarbon cyclone treatment process
NO325179B1 (no) * 2003-04-23 2008-02-11 Metallkraft As Fremgangsmate ved rensing av silisiumkarbid-partikler
JP4160930B2 (ja) * 2004-05-19 2008-10-08 シャープ株式会社 ハロシランの製造方法、固形分の精製方法
AU2012203361B2 (en) * 2005-06-24 2015-11-26 Sic Processing Ag Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components
ITRM20050329A1 (it) * 2005-06-24 2006-12-25 Guido Fragiacomo Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto.
US7820051B2 (en) * 2007-02-23 2010-10-26 International Business Machines Corporation Recycling of electrochemical-mechanical planarization (ECMP) slurries/electrolytes
CA2645991A1 (en) 2007-10-30 2009-04-30 Pall Corporation Method for treating spent abrasive slurry
US8056551B2 (en) 2007-10-30 2011-11-15 Pall Corporation Method and system for manufacturing wafer-like slices from a substrate material
CH703236B1 (fr) 2007-12-19 2011-12-15 Ecole Polytech Procédé de récupération de silicium dans des déchets de sciage.
CN101244823B (zh) * 2008-02-20 2010-06-23 江南大学 从硅片切割加工副产物中回收碳化硅的方法
WO2010003456A1 (en) * 2008-07-09 2010-01-14 Garbo S.R.L. Method for purification and compaction of feedstock for photovoltaic applications
US8231006B2 (en) * 2008-12-31 2012-07-31 Memc Singapore Pte. Ltd. Methods to recover and purify silicon particles from saw kerf
DE102009034949A1 (de) * 2009-07-09 2011-01-13 Akw Apparate + Verfahren Gmbh Verfahren zur Aufbereitung einer Suspension
WO2011016996A2 (en) * 2009-07-27 2011-02-10 Memc Electronic Materials, Inc. Methods and systems for processing abrasive slurry
CA2689021C (en) 2009-12-23 2015-03-03 Thomas Charles Hann Apparatus and method for regulating flow through a pumpbox
CN102259863A (zh) * 2010-05-31 2011-11-30 溧阳汉达电子材料有限公司 使用后切割砂浆的处理方法
KR101171799B1 (ko) * 2010-06-29 2012-08-13 고려대학교 산학협력단 실리카 에칭 폐기물을 재활용하는 방법 및 메조다공성 물질을 제조하는 방법
EP2601280B1 (de) 2010-08-03 2014-10-08 Basf Se Trägerflüssigkeiten für abrasiva
GB2484348A (en) 2010-10-08 2012-04-11 Rec Wafer Norway As Abrasive slurry and method of production of photovoltaic wafers
CN102010785B (zh) * 2010-10-29 2013-05-08 临沂市凯祥硅粉有限公司 从硅片线切割加工废砂浆中回收碳化硅微粉和线切割液的方法
CN102031193B (zh) * 2010-11-02 2013-12-25 薛荣秀 一种从硅片切割废砂浆中回收碳化硅和聚乙二醇切削液的方法
CN102041155B (zh) * 2010-12-31 2013-03-13 南京工业大学 一种硅片切削废液的资源化处理方法
CN102502636B (zh) * 2011-09-30 2013-08-14 威海市海王旋流器有限公司 一种分离碳化硅废砂浆的装置及工艺
CN102399620B (zh) * 2011-10-08 2013-05-01 江苏佳宇资源利用股份有限公司 一种从晶硅切割废砂浆中回收碳化硅组份的方法
CN102502637A (zh) * 2011-10-08 2012-06-20 江苏佳宇资源利用股份有限公司 一种去除碳化硅微粉中二氧化硅组份的方法
DE102011119448B4 (de) * 2011-11-28 2013-12-05 Ralf Schefler Verfahren zur Rückgewinnung von Polyglycolether und Silizium aus einer Hilfsstoffsuspension
EP2809754A1 (de) 2012-02-01 2014-12-10 Basf Se Kühl- und/oder schmierflüssigkeiten zur waferherstellung
TW201312638A (zh) * 2012-03-03 2013-03-16 Hong Tung Resource Co Ltd 矽晶圓切割廢料之處理方法
CN102757856B (zh) * 2012-07-30 2013-10-09 江苏阳帆机电设备制造有限公司 一种硅片切割产生废砂浆在线回收方法
JP5888203B2 (ja) * 2012-10-25 2016-03-16 信越半導体株式会社 ワイヤソー用スラリーの製造方法
US9228246B2 (en) 2013-01-11 2016-01-05 Alternative Charge Materials, Llc Method of agglomerating silicon/silicon carbide from wiresawing waste
TWI517935B (zh) * 2013-04-16 2016-01-21 國立台灣科技大學 氣體添加硏磨液的供應系統及其方法
EP3060521B1 (de) * 2013-10-24 2017-09-13 Metallkraft AS Nichtchemisches verfahren zur rückgewinnung von siliciumcarbidteilchen
CN103626332B (zh) * 2013-11-15 2015-04-29 河南新大新材料股份有限公司 碳化硅微粉废水的循环利用方法
JP6204506B2 (ja) * 2014-01-31 2017-09-27 Hoya株式会社 使用済み研磨スラリーの再生方法、磁気ディスク用ガラス基板の製造方法
JP6172030B2 (ja) * 2014-04-03 2017-08-02 信越半導体株式会社 ワークの切断方法及び加工液
SG11201706012RA (en) * 2015-01-27 2017-09-28 Metallkraft As Non-chemical method and system for recovering silicon carbide particles and glycol from a slurry
CN105621414A (zh) * 2015-03-11 2016-06-01 辽宁工业大学 一种从晶硅线切割废砂浆中回收碳化硅的方法
DE102017203977A1 (de) 2017-03-10 2018-09-13 Gebr. Schmid Gmbh Verfahren zur Herstellung texturierter Wafer und Aufrausprühstrahlbehandlungsvorrichtung
CN108164020B (zh) * 2017-12-28 2020-03-03 洛阳阿特斯光伏科技有限公司 一种金刚线切割晶体硅生产线的用水方法及用水系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438735A (en) * 1964-12-18 1969-04-15 Boeing Co Removal of metals from oleaginous materials and analysis of the metals
GB2017517B (en) * 1978-03-10 1982-06-23 Fiat Ricerche Recovery of the components of grinding sludge
DE3344404A1 (de) 1983-12-08 1985-07-18 Mannesmann AG, 4000 Düsseldorf Verfahren und vorrichtung zur reinigung von kreislauf-fluessigkeiten
US4751006A (en) * 1987-07-16 1988-06-14 Monlan, Incorporated Coolant reclamation unit
DE4117060A1 (de) 1991-05-23 1992-11-26 Mannesmann Ag Verfahren zum reinigen metallischer schleifschlaemme von oel oder oelhaltigen emulsionen
US5799643A (en) * 1995-10-04 1998-09-01 Nippei Toyama Corp Slurry managing system and slurry managing method for wire saws
JP3199159B2 (ja) 1996-01-26 2001-08-13 信越半導体株式会社 油性スラリー廃液の再利用システム
JP3249373B2 (ja) 1996-02-21 2002-01-21 信越半導体株式会社 水溶性スラリー廃液の再利用システム
JP2816133B2 (ja) * 1996-04-18 1998-10-27 株式会社ジーテック 遠心分離機、及びこれを用いた研磨液等の再生システム
US5664990A (en) * 1996-07-29 1997-09-09 Integrated Process Equipment Corp. Slurry recycling in CMP apparatus
DE19642908A1 (de) * 1996-10-17 1998-04-23 Wacker Siltronic Halbleitermat Sägesuspension und Verfahren zum Abtrennen von Scheiben von einem Kristall
DE19723957A1 (de) 1997-06-06 1998-12-10 Siemens Ag Verfahren zum Übertragen analoger Meßwerte
JPH1112562A (ja) * 1997-06-27 1999-01-19 Mitsubishi Chem Corp ダイアモンド砥粒の回収方法
JP3560121B2 (ja) * 1997-11-11 2004-09-02 三井金属鉱業株式会社 廃研摩材からの希土類系研摩材原料の製造方法
JP3408979B2 (ja) * 1997-12-26 2003-05-19 株式会社日平トヤマ スラリ管理システム
IT1299540B1 (it) * 1998-07-01 2000-03-16 Memc Electronic Materials Procedimento per separare e rigenerare abrasivo esausto a base di glicole e carburo di silicio ai fini della loro riutilizzazione
JPH11319755A (ja) * 1998-05-13 1999-11-24 Mitsui Mining & Smelting Co Ltd 酸化レアアース系廃研磨材の回収方法
JP2000071172A (ja) * 1998-08-28 2000-03-07 Nec Corp 化学機械研磨用スラリーの再生装置及び再生方法
US6615817B2 (en) * 2000-03-31 2003-09-09 Motoichi Horio Recycling system of wire saw abrasive grain slurry and centrifugal separators therefor
DE60144346D1 (de) 2001-05-29 2011-05-12 Memc Electronic Materials Verfahren zur Behandlung einer verbrauchten Glykolaufschlämmung

Also Published As

Publication number Publication date
EP1561557B1 (de) 2011-03-30
DE60112813T2 (de) 2006-03-30
EP1390184B1 (de) 2005-08-17
EP1561557A1 (de) 2005-08-10
EP1390184A1 (de) 2004-02-25
DE60144346D1 (de) 2011-05-12
US7223344B2 (en) 2007-05-29
US20040144722A1 (en) 2004-07-29
WO2002096611A1 (en) 2002-12-05

Similar Documents

Publication Publication Date Title
DE60112813D1 (de) Verfahren zur behandlung einer verbrauchten glycolaufschlämmung
DE60224113D1 (de) Verfahren zur Abgabe einer bioaktiven Substanz
ATE553259T1 (de) Verfahren zur papierherstellung
DE60136755D1 (de) Verfahren zur effizienten reaktiven Überwachung
DE60140357D1 (de) Verfahren zur verbesserung der bandbreiteneffizienz
DE60122532D1 (de) Verfahren zur behandlung von mehreren bohrlochintervallen
ATE390473T1 (de) Verfahren zur reinigung einer harten oberfläche
ATE417803T1 (de) Verfahren zur bedienung eines aufzuges
DE60120048D1 (de) Verfahren zur Auswahl eines Objektes
DE60113574D1 (de) Verfahren zur Herstellung einer Halbleitervorrichtung
DE60110775D1 (de) Verfahren zur Reparaturbeschichtung
DE60120520D1 (de) Verfahren zur behandlung von abwasser
ATE300520T1 (de) Verfahren zur herstellung amlodipinmaleat
DE60124884D1 (de) Verfahren zur verbesserung der fotomaskengeometrie
DE69935358D1 (de) Verfahren zur Faltungsverschachtelung
DE60138344D1 (de) Verfahren zur Mutagenese
DE60142824D1 (de) Numerisch gesteuertes Verfahren
DE50114485D1 (de) Verfahren zur sichtweitenbestimmung
DE60124487D1 (de) Verfahren zur Reinigung nach einer Ätzung
DE50105109D1 (de) Verfahren zur Ermittlung von Netzwerktopologien
ATA17552001A (de) Verfahren zur behandlung säurehältiger abwässer
DE60134220D1 (de) Verfahren zur herstellung einer heteroübergang-bicmos-integrierter schaltung
DE60210501D1 (de) Verfahren zur behandlung eines luftreifens
DE10192273D2 (de) Verfahren zur Positionierung einer fremdkraftbetätigten Schließfläche
ATA15252000A (de) Verfahren zur dekontamination

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MEMC ELECTRONIC MATERIALS S.P.A., NOVARA, IT

Owner name: GARBO S.R.L, CERANO, NOVARA, IT