DE60106527D1 - Vorrichtung zur Trockenbehandlung von Oberflächen und Verfahren zur Trockenbehandlung von Oberflächen unter Verwendung einer solchen Vorrichtung - Google Patents

Vorrichtung zur Trockenbehandlung von Oberflächen und Verfahren zur Trockenbehandlung von Oberflächen unter Verwendung einer solchen Vorrichtung

Info

Publication number
DE60106527D1
DE60106527D1 DE60106527T DE60106527T DE60106527D1 DE 60106527 D1 DE60106527 D1 DE 60106527D1 DE 60106527 T DE60106527 T DE 60106527T DE 60106527 T DE60106527 T DE 60106527T DE 60106527 D1 DE60106527 D1 DE 60106527D1
Authority
DE
Germany
Prior art keywords
dry treatment
dry
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60106527T
Other languages
English (en)
Other versions
DE60106527T2 (de
Inventor
Takeshi Nishiuchi
Ikuo Shimamoto
Nobuhiro Misumi
Yoshimi Tochishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Metals Ltd
Original Assignee
Neomax Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neomax Co Ltd filed Critical Neomax Co Ltd
Publication of DE60106527D1 publication Critical patent/DE60106527D1/de
Application granted granted Critical
Publication of DE60106527T2 publication Critical patent/DE60106527T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/18—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions
    • B24C3/26—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions the work being supported by barrel cages, i.e. tumblers; Gimbal mountings therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Solid Materials (AREA)
DE60106527T 2000-07-13 2001-07-06 Vorrichtung zur trockenen Oberflächenbehandlung und Verfahren zur trockenen Oberflächenbehanlung mit dieser Vorrichtung Expired - Lifetime DE60106527T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000213427 2000-07-13
JP2000213427 2000-07-13

Publications (2)

Publication Number Publication Date
DE60106527D1 true DE60106527D1 (de) 2004-11-25
DE60106527T2 DE60106527T2 (de) 2005-02-24

Family

ID=18709181

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60106527T Expired - Lifetime DE60106527T2 (de) 2000-07-13 2001-07-06 Vorrichtung zur trockenen Oberflächenbehandlung und Verfahren zur trockenen Oberflächenbehanlung mit dieser Vorrichtung

Country Status (4)

Country Link
US (1) US7056197B2 (de)
EP (1) EP1172177B1 (de)
CN (1) CN1209487C (de)
DE (1) DE60106527T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101786144B (zh) * 2010-03-05 2012-01-04 山西中科天罡科技开发有限公司 贮氢合金生产中的稀土金属锭料表面氧化层的清洁工艺
EP2476514A1 (de) 2011-01-12 2012-07-18 Sandvik Intellectual Property AB Verfahren und Vorrichtung zur Behandlung mindestens eines Werkstücks
JP5799837B2 (ja) * 2012-01-31 2015-10-28 日立金属株式会社 表面処理用治具
CN104004993B (zh) * 2013-02-25 2018-01-12 北京中科三环高技术股份有限公司 一种表面处理装置
US20160068957A1 (en) * 2013-04-12 2016-03-10 Haydn N.G. Wadley Corrosion resistant metal and metal alloy coatings containing supersaturated concentrations of corrosion inhibiting elements and methods and systems for making the same
CN103537991B (zh) * 2013-09-29 2016-08-24 湖南恒岳重钢钢结构工程有限公司 工件除锈用的翻转装置
JP6161586B2 (ja) * 2014-10-02 2017-07-12 コトブキ技研工業株式会社 粒状物質の磨砕装置
CN104480440A (zh) * 2014-11-05 2015-04-01 烟台首钢磁性材料股份有限公司 小尺寸钕铁硼磁体表面真空镀膜方法及专用镀膜设备
US9993906B1 (en) 2015-01-19 2018-06-12 Berry's Manufacturing of Utah, Inc. Vibratory tumbler
CN106002595A (zh) * 2016-05-20 2016-10-12 深圳市金瑞电子材料有限公司 一种抛光处理设备和方法
CN107267949A (zh) * 2017-07-27 2017-10-20 大连维钛克科技股份有限公司 真空镀膜机内为方形片状钕铁硼工件镀膜的翻转装置
CN110144571A (zh) * 2018-02-12 2019-08-20 威测国际能源材料有限公司 金属件的镀膜设备
TWI743803B (zh) * 2020-05-22 2021-10-21 東友科技股份有限公司 網狀殼體及噴砂方法
CN113696104B (zh) * 2020-05-22 2022-10-04 东友科技股份有限公司 网状壳体及喷砂方法
CN112338815B (zh) * 2020-10-26 2021-09-14 江西科迪亚精密工业有限公司 一种铝合金铸件生产加工用的抛丸装置
CN117646195B (zh) * 2024-01-30 2024-04-26 湖南德智新材料有限公司 支撑机构、支撑装置和薄膜制备设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191874A (en) * 1963-07-30 1965-06-29 Mine And Smelter Supply Compan Disintegrators
GB1074901A (en) * 1965-05-03 1967-07-05 American Components Inc Improved process and apparatus for depositing metal films on substrates
US3948003A (en) * 1971-02-22 1976-04-06 Gebrueder Pletscher Apparatus for the treatment of workpiece surfaces
US4003164A (en) * 1974-04-22 1977-01-18 The Carborundum Company Workpiece treating barrel
US4116161A (en) * 1976-11-12 1978-09-26 Mcdonnell Douglas Corporation Dual tumbling barrel plating apparatus
CH648504A5 (de) * 1980-10-03 1985-03-29 Fischer Ag Georg Verfahren und einrichtung zum strahlbehandeln von werkstuecken.
US4691400A (en) * 1983-06-09 1987-09-08 Arneson Howard M Article buffing apparatus and method
US4757648A (en) * 1986-08-04 1988-07-19 Pangborn Corporation Rocker barrel configuration
US5531637A (en) * 1993-05-14 1996-07-02 Kabushiki Kaisha Nagao Kogyo Automatic centrifugal fluidizing barrel processing apparatus
FR2708005B1 (fr) * 1993-07-20 1995-11-17 Antoine Rodrigues Procédé et dispositif d'usure et de décoloration artificielles de produits textiles.
JP3860614B2 (ja) * 1993-08-31 2006-12-20 松下電工株式会社 コーティング装置用バレル
CN1105649A (zh) 1994-01-18 1995-07-26 尹军 多孔性水处理材料
JP3833275B2 (ja) * 1994-01-24 2006-10-11 株式会社アルバック 全方向同時蒸着重合装置
US5782677A (en) * 1997-01-14 1998-07-21 Kanouse; Richard C. Continuous process blast mill for finishing cast metal parts
JPH11347941A (ja) * 1998-06-05 1999-12-21 Kansai Kogyo:Kk Ｒ−Ｆｅ−Ｂ系永久磁石の表面処理被膜剥離方法
JP3801418B2 (ja) * 1999-05-14 2006-07-26 株式会社Ｎｅｏｍａｘ 表面処理方法
EP1136587B1 (de) * 2000-03-23 2013-05-15 Hitachi Metals, Ltd. Vorrichtung zum Auftragen von Filmen

Also Published As

Publication number Publication date
CN1333386A (zh) 2002-01-30
EP1172177B1 (de) 2004-10-20
US7056197B2 (en) 2006-06-06
EP1172177A1 (de) 2002-01-16
CN1209487C (zh) 2005-07-06
US20020028631A1 (en) 2002-03-07
DE60106527T2 (de) 2005-02-24

Similar Documents

Publication Publication Date Title
DE69911445D1 (de) Verfahren und vorrichtung zur entdeckung von mitteln unter verwendung von mehrfachübertragungsumfang
DE60045363D1 (de) Verfahren und vorrichtung zur charakterisierung von farbgeräten
DE60226674D1 (de) Verfahren und Vorrichtung zur Ausrüstung von Bohrlöchern
DE60132767D1 (de) Verfahren und vorrichtung zur herstellung von überlappungssäumen
DE69940804D1 (de) Verfahren und vorrichtung zur unterdrückung von abklingartefakten
DE60137301D1 (de) Lithographieapparat und Verfahren zur Herstellung einer Vorrichtung
DE69904106D1 (de) Verfahren und Vorrichtung zur Herstellung von faserverstärkten Strukturen
DE60106527D1 (de) Vorrichtung zur Trockenbehandlung von Oberflächen und Verfahren zur Trockenbehandlung von Oberflächen unter Verwendung einer solchen Vorrichtung
DE69903497T2 (de) Verfahren und Vorrichtung zur Unterdrückung von Resonanz
DE50109333D1 (de) Verfahren und vorrichtung zur oberflächenbehandlung von objekten
DE69812098D1 (de) Verfahren und vorrichtung zur verwaltung von hash-codierten objekten
DE60133866D1 (de) Vorrichtung und Verfahren zur Bestimmung von Steuerungsparametern einer maschinellen Vorrichtung
DE19983717T1 (de) Vorrichtung und Verfahren zur Ausrichtung
DE69820804D1 (de) Vorrichtung und Verfahren zur Reinigung von polymerisierbaren organischen Komponenten
DE59908995D1 (de) Verfahren und Vorrichtung zur Online-Herstellung von SC-A-Papier
DE50114195D1 (de) Verfahren und vorrichtung zur aufbereitung von formsand
DE69920581D1 (de) Verfahren und Vorrichtung zur Charakterisierung von Oberflächeneffekten
DE50112136D1 (de) Anlage und verfahren zur aufbereitung von shredder-rückständen und verwendung einer erzeugten flusen-fraktion
DE60321677D1 (de) Vorrichtung und verfahren zur dickenkontrolle von lackierungen mithilfe einer optoakustischen technik
DE60214560D1 (de) Verfahren und vorrichtung zur herstellung von faserformkörpern
DE60120107D1 (de) Verfahren und Vorrichtung zur Behandlung einer Scheibe
DE60110878D1 (de) Verfahren zur Objektfiltrierung und Klientgerät unter Verwendung desselben
DE50101042D1 (de) Verfahren zur eingabe einer zeichenfolge und vorrichtung
ATA49098A (de) Verfahren und vorrichtung zur entstörung von umrichtern
DE50106691D1 (de) Vorrichtung und verfahren zur überwachung einer kondensatordurchführung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition