DE60034754D1 - Resistzusammensetzung und Musterübertragungsverfahren - Google Patents

Resistzusammensetzung und Musterübertragungsverfahren

Info

Publication number
DE60034754D1
DE60034754D1 DE60034754T DE60034754T DE60034754D1 DE 60034754 D1 DE60034754 D1 DE 60034754D1 DE 60034754 T DE60034754 T DE 60034754T DE 60034754 T DE60034754 T DE 60034754T DE 60034754 D1 DE60034754 D1 DE 60034754D1
Authority
DE
Germany
Prior art keywords
resist composition
transfer method
pattern transfer
pattern
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60034754T
Other languages
English (en)
Other versions
DE60034754T2 (de
Inventor
Tsunehiro Nishi
Takeru Watanabe
Takeshi Kinsho
Koji Hasegawa
Tomohiro Kobayashi
Jun Hatakeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE60034754D1 publication Critical patent/DE60034754D1/de
Publication of DE60034754T2 publication Critical patent/DE60034754T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE60034754T 1999-10-25 2000-10-25 Resistzusammensetzung und Musterübertragungsverfahren Expired - Lifetime DE60034754T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30290999A JP4269119B2 (ja) 1999-10-25 1999-10-25 レジスト材料及びパターン形成方法
JP30290999 1999-10-25

Publications (2)

Publication Number Publication Date
DE60034754D1 true DE60034754D1 (de) 2007-06-21
DE60034754T2 DE60034754T2 (de) 2008-01-17

Family

ID=17914580

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034754T Expired - Lifetime DE60034754T2 (de) 1999-10-25 2000-10-25 Resistzusammensetzung und Musterübertragungsverfahren

Country Status (6)

Country Link
US (1) US6667145B1 (de)
EP (1) EP1096318B1 (de)
JP (1) JP4269119B2 (de)
KR (1) KR100536162B1 (de)
DE (1) DE60034754T2 (de)
TW (1) TW554245B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6406828B1 (en) * 2000-02-24 2002-06-18 Shipley Company, L.L.C. Polymer and photoresist compositions
JP4627918B2 (ja) * 2000-04-13 2011-02-09 三井化学株式会社 開環メタセシス共重合体水素添加物およびその製造方法
JP4225699B2 (ja) 2001-03-12 2009-02-18 富士フイルム株式会社 ポジ型感光性組成物
JP2003002922A (ja) * 2001-06-18 2003-01-08 Jsr Corp 環状オレフィン系重合体およびその製造方法
US7192681B2 (en) 2001-07-05 2007-03-20 Fuji Photo Film Co., Ltd. Positive photosensitive composition
KR100561068B1 (ko) 2002-07-10 2006-03-15 주식회사 엘지화학 노보넨-에스테르계 부가중합체 및 이의 제조방법
US7989571B2 (en) 2002-07-10 2011-08-02 Lg Chem, Ltd. Method for producing norbornene monomer composition, norbornene polymer prepared therefrom, optical film comprising the norbornene polymer, and method for producing the norbornene polymer
CN1281653C (zh) * 2002-07-10 2006-10-25 Lg化学株式会社 降冰片烯－酯基加成聚合物及该降冰片烯－酯基加成聚合物的制备方法
US7341843B2 (en) * 2003-04-11 2008-03-11 Allergan, Inc. Botulinum toxin A peptides and methods of predicting and reducing immunoresistance to botulinum toxin therapy
JP4810813B2 (ja) * 2004-09-10 2011-11-09 Ｊｓｒ株式会社 架橋重合体およびその製造方法
KR100789247B1 (ko) * 2005-01-05 2008-01-02 주식회사 엘지화학 광반응성 중합체 및 이의 제조 방법
JP2007314668A (ja) * 2006-05-26 2007-12-06 Jsr Corp 環状オレフィン系開環重合体水素化物およびその製造方法並びに架橋重合体およびその製造方法
JP4811515B2 (ja) * 2009-11-26 2011-11-09 Ｊｓｒ株式会社 架橋重合体およびその製造方法
JP2011021206A (ja) * 2010-10-29 2011-02-03 Jsr Corp 環状オレフィン系開環重合体の製造方法
JP2011046958A (ja) * 2010-10-29 2011-03-10 Jsr Corp 環状オレフィン系開環重合体の製造方法
US9872399B1 (en) 2016-07-22 2018-01-16 International Business Machines Corporation Implementing backdrilling elimination utilizing anti-electroplate coating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100261022B1 (ko) 1996-10-11 2000-09-01 윤종용 화학증폭형 레지스트 조성물
JP4273530B2 (ja) * 1997-10-14 2009-06-03 住友ベークライト株式会社 環状カーボナート樹脂組成物及びその硬化物
TW457277B (en) * 1998-05-11 2001-10-01 Shinetsu Chemical Co Ester compounds, polymers, resist composition and patterning process
TWI228504B (en) 1998-11-02 2005-03-01 Shinetsu Chemical Co Novel ester compounds, polymers, resist compositions and patterning process
JP3680920B2 (ja) 1999-02-25 2005-08-10 信越化学工業株式会社 新規なエステル化合物、高分子化合物、レジスト材料、及びパターン形成方法
AU3524800A (en) * 1999-03-12 2000-09-28 B.F. Goodrich Company, The Polycyclic polymers containing pendant cyclic anhydride groups

Also Published As

Publication number Publication date
US6667145B1 (en) 2003-12-23
TW554245B (en) 2003-09-21
DE60034754T2 (de) 2008-01-17
EP1096318A1 (de) 2001-05-02
EP1096318B1 (de) 2007-05-09
KR100536162B1 (ko) 2005-12-14
JP4269119B2 (ja) 2009-05-27
JP2001125270A (ja) 2001-05-11
KR20010051209A (ko) 2001-06-25

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Legal Events

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8364 No opposition during term of opposition