DE60033102D1 - Beschichtungszusammensetzung für die Filmherstellung, Verfahren zur Filmherstellung und isolierende Filme - Google Patents

Beschichtungszusammensetzung für die Filmherstellung, Verfahren zur Filmherstellung und isolierende Filme

Info

Publication number
DE60033102D1
DE60033102D1 DE60033102T DE60033102T DE60033102D1 DE 60033102 D1 DE60033102 D1 DE 60033102D1 DE 60033102 T DE60033102 T DE 60033102T DE 60033102 T DE60033102 T DE 60033102T DE 60033102 D1 DE60033102 D1 DE 60033102D1
Authority
DE
Germany
Prior art keywords
film production
coating composition
insulating films
film
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60033102T
Other languages
English (en)
Other versions
DE60033102T2 (de
Inventor
Takahiko Kurosawa
Eiji Hayashi
Seo Youngsoon
Atsushi Shiota
Kinji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Application granted granted Critical
Publication of DE60033102D1 publication Critical patent/DE60033102D1/de
Publication of DE60033102T2 publication Critical patent/DE60033102T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/312—Organic layers, e.g. photoresist
    • H01L21/3121—Layers comprising organo-silicon compounds
    • H01L21/3122—Layers comprising organo-silicon compounds layers comprising polysiloxane compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/14—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Materials Engineering (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Wood Science & Technology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Silicon Polymers (AREA)
  • Paints Or Removers (AREA)
  • Formation Of Insulating Films (AREA)
DE60033102T 1999-09-29 2000-09-28 Beschichtungszusammensetzung für die Filmherstellung, Verfahren zur Filmherstellung und isolierende Filme Expired - Lifetime DE60033102T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27555499 1999-09-29
JP27555499 1999-09-29

Publications (2)

Publication Number Publication Date
DE60033102D1 true DE60033102D1 (de) 2007-03-15
DE60033102T2 DE60033102T2 (de) 2007-08-30

Family

ID=17557077

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60033102T Expired - Lifetime DE60033102T2 (de) 1999-09-29 2000-09-28 Beschichtungszusammensetzung für die Filmherstellung, Verfahren zur Filmherstellung und isolierende Filme

Country Status (5)

Country Link
US (1) US6410151B1 (de)
EP (1) EP1088868B1 (de)
KR (1) KR100618487B1 (de)
DE (1) DE60033102T2 (de)
TW (1) TW565594B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6696538B2 (en) * 1999-07-27 2004-02-24 Lg Chemical Ltd. Semiconductor interlayer dielectric material and a semiconductor device using the same
US6902771B2 (en) * 2000-02-01 2005-06-07 Jsr Corporation Process for producing silica-based film, silica-based film, insulating film, and semiconductor device
US20040038048A1 (en) * 2000-02-02 2004-02-26 Lg Chemical Ltd. Semiconductor interlayer dielectric material and a semiconductor device using the same
US7128976B2 (en) * 2000-04-10 2006-10-31 Jsr Corporation Composition for film formation, method of film formation, and silica-based film
JP2002012638A (ja) * 2000-06-30 2002-01-15 Dow Corning Toray Silicone Co Ltd 高エネルギー線硬化性組成物および樹脂成形体
JP2002285086A (ja) * 2001-03-26 2002-10-03 Jsr Corp 膜形成用組成物、膜の形成方法およびシリカ系膜
KR20020095103A (ko) 2001-06-11 2002-12-20 제이에스알 가부시끼가이샤 실리카막의 형성 방법, 실리카막, 절연막 및 반도체 장치
US7307343B2 (en) 2002-05-30 2007-12-11 Air Products And Chemicals, Inc. Low dielectric materials and methods for making same
US7122880B2 (en) 2002-05-30 2006-10-17 Air Products And Chemicals, Inc. Compositions for preparing low dielectric materials
JP3631236B2 (ja) * 2002-07-12 2005-03-23 東京応化工業株式会社 シリカ系有機被膜の製造方法
US7404990B2 (en) 2002-11-14 2008-07-29 Air Products And Chemicals, Inc. Non-thermal process for forming porous low dielectric constant films
TWI240959B (en) 2003-03-04 2005-10-01 Air Prod & Chem Mechanical enhancement of dense and porous organosilicate materials by UV exposure
JP5128044B2 (ja) * 2003-12-10 2013-01-23 東京応化工業株式会社 シリコン基板又は金属配線パターンが設けられたシリコン基板被覆用シリカ系被膜形成用材料の製造方法
US7504470B2 (en) * 2004-08-31 2009-03-17 Silecs Oy Polyorganosiloxane dielectric materials
KR101428718B1 (ko) 2007-02-02 2014-09-24 삼성디스플레이 주식회사 감광성 유기물, 이의 도포 방법, 이를 이용한 유기막 패턴형성 방법, 이로써 제조되는 표시 장치
EP2075277A3 (de) * 2007-12-25 2012-11-07 Nitto Denko Corporation Silikonharzzusammensetzung
JP5106307B2 (ja) * 2008-08-06 2012-12-26 日東電工株式会社 金属酸化物微粒子を含有してなる樹脂組成物
WO2010027128A1 (en) * 2008-09-02 2010-03-11 Cheil Industries Inc. Compound for filling small gaps in semiconductor device, composition comprising the compound and process for fabricating semiconductor capacitor
CN102050949B (zh) * 2009-11-04 2014-02-19 三星电子株式会社 有机硅酸酯化合物及包括其的组合物和膜
SG183291A1 (en) 2010-02-17 2012-09-27 Air Liquide VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS
US20170260419A1 (en) * 2016-03-14 2017-09-14 Honeywell International Inc. Polysiloxane formulations and coatings for optoelectronic applications, methods of production, and uses thereof
KR101810892B1 (ko) * 2016-09-13 2017-12-20 동우 화인켐 주식회사 터치 센서 및 이를 포함하는 터치 스크린 패널
US11015082B2 (en) * 2017-12-19 2021-05-25 Honeywell International Inc. Crack-resistant polysiloxane dielectric planarizing compositions, methods and films
US10947412B2 (en) * 2017-12-19 2021-03-16 Honeywell International Inc. Crack-resistant silicon-based planarizing compositions, methods and films
CN112635616B (zh) * 2020-11-27 2022-11-25 常州捷佳创精密机械有限公司 一种硅片湿化学处理工艺

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156870A (ja) 1984-08-24 1986-03-22 Noritake Co Ltd 超仕上げ砥石
US5306759A (en) * 1992-02-13 1994-04-26 Japan Synthetic Rubber Co., Ltd. Coating composition and process for manufacturing the same
JP3517890B2 (ja) * 1993-02-18 2004-04-12 日産化学工業株式会社 液晶表示素子用絶縁膜形成用塗布液
US5733644A (en) * 1994-04-15 1998-03-31 Mitsubishi Chemical Corporation Curable composition and method for preparing the same
JPH1025417A (ja) * 1996-07-08 1998-01-27 Toray Dow Corning Silicone Co Ltd 硬化性液状組成物、その硬化物、および電子部品
US6043330A (en) * 1997-04-21 2000-03-28 Alliedsignal Inc. Synthesis of siloxane resins
JP3812104B2 (ja) * 1997-12-02 2006-08-23 Ｊｓｒ株式会社 膜形成用組成物

Also Published As

Publication number Publication date
DE60033102T2 (de) 2007-08-30
US6410151B1 (en) 2002-06-25
KR20010070110A (ko) 2001-07-25
TW565594B (en) 2003-12-11
EP1088868A3 (de) 2003-10-29
EP1088868B1 (de) 2007-01-24
EP1088868A2 (de) 2001-04-04
KR100618487B1 (ko) 2006-08-31

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