DE60032697D1 - Trägheitsgeschwindigkeitssensor mit Stimmgabel - Google Patents

Trägheitsgeschwindigkeitssensor mit Stimmgabel

Info

Publication number
DE60032697D1
DE60032697D1 DE60032697T DE60032697T DE60032697D1 DE 60032697 D1 DE60032697 D1 DE 60032697D1 DE 60032697 T DE60032697 T DE 60032697T DE 60032697 T DE60032697 T DE 60032697T DE 60032697 D1 DE60032697 D1 DE 60032697D1
Authority
DE
Germany
Prior art keywords
speed sensor
tuning fork
inertia speed
inertia
tuning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60032697T
Other languages
English (en)
Other versions
DE60032697T2 (de
Inventor
Stuart J Knowles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Custom Sensors and Technologies Inc
Original Assignee
BEI Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEI Technologies Inc filed Critical BEI Technologies Inc
Application granted granted Critical
Publication of DE60032697D1 publication Critical patent/DE60032697D1/de
Publication of DE60032697T2 publication Critical patent/DE60032697T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
DE60032697T 1999-09-15 2000-08-16 Trägheitsgeschwindigkeitssensor mit Stimmgabel Expired - Lifetime DE60032697T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/396,996 US6262520B1 (en) 1999-09-15 1999-09-15 Inertial rate sensor tuning fork
US396996 1999-09-15

Publications (2)

Publication Number Publication Date
DE60032697D1 true DE60032697D1 (de) 2007-02-15
DE60032697T2 DE60032697T2 (de) 2007-10-04

Family

ID=23569468

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60032697T Expired - Lifetime DE60032697T2 (de) 1999-09-15 2000-08-16 Trägheitsgeschwindigkeitssensor mit Stimmgabel
DE1085654T Pending DE1085654T1 (de) 1999-09-15 2000-08-16 Trägheitsgeschwindigkeitssensor mit Stimmgabel

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1085654T Pending DE1085654T1 (de) 1999-09-15 2000-08-16 Trägheitsgeschwindigkeitssensor mit Stimmgabel

Country Status (4)

Country Link
US (2) US6262520B1 (de)
EP (1) EP1085654B1 (de)
JP (1) JP4118497B2 (de)
DE (2) DE60032697T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6747393B2 (en) * 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6262520B1 (en) * 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork
JP4147784B2 (ja) * 2001-10-09 2008-09-10 富士通株式会社 角速度センサ
US6858972B2 (en) * 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
JP2005156395A (ja) * 2003-11-27 2005-06-16 Kyocera Kinseki Corp 慣性センサ素子
US7124632B2 (en) * 2004-07-26 2006-10-24 Bei Technologies, Inc. Electronically configurable rate sensor circuit and method
US7237169B2 (en) * 2004-07-26 2007-06-26 Bei Technologies, Inc. Cross-monitoring sensor system and method
DE602005020725D1 (de) 2004-09-24 2010-06-02 Seiko Epson Corp Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement
JP2006105614A (ja) * 2004-09-30 2006-04-20 Seiko Epson Corp 振動型ジャイロスコープ、及び振動型ジャイロスコープの製造方法
JP4415389B2 (ja) * 2005-04-27 2010-02-17 セイコーエプソン株式会社 圧電デバイス
JP4442521B2 (ja) * 2005-06-29 2010-03-31 セイコーエプソン株式会社 圧電振動片および圧電デバイス
US7392702B2 (en) * 2005-08-08 2008-07-01 Litton Systems Inc. Method for modifying the location of nodal points of a vibrating beam
US7694734B2 (en) * 2005-10-31 2010-04-13 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
JP2008249489A (ja) * 2007-03-30 2008-10-16 Tdk Corp 角速度センサ素子および角速度センサ装置
EP2017960B1 (de) * 2007-07-19 2009-12-30 ETA SA Manufacture Horlogère Suisse Piezoelektrischer Resonator mit optimierten Bewegungsfähigkeiten
US8080925B2 (en) * 2008-09-23 2011-12-20 Custom Sensors & Technologies, Inc. Inertial sensor with dual cavity package and method of fabrication
US8256288B2 (en) * 2008-12-16 2012-09-04 Seiko Epson Corporation Sensor device
US8359920B2 (en) * 2009-05-15 2013-01-29 Lockheed Martin Corp. Gravity sensing instrument
JP5350101B2 (ja) * 2009-06-30 2013-11-27 京セラクリスタルデバイス株式会社 音叉型屈曲水晶振動子
TWI398097B (zh) * 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
US8516887B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric z-axis gyroscope
EP2400662B1 (de) * 2010-06-18 2015-11-04 Nxp B.V. Mikroelektromechanische Resonatorgeometrie
US8516349B2 (en) 2010-09-02 2013-08-20 Microsoft Corporation Generation and application of a sub-codebook of an error control coding codebook
WO2012081457A1 (ja) * 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
US8573057B2 (en) * 2011-04-28 2013-11-05 Custom Sensors & Technologies, Inc. Sensor mount vibration reduction
JP6136402B2 (ja) * 2013-03-15 2017-05-31 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
SE537998C2 (sv) 2014-05-09 2016-02-02 Per-Axel Uhlin Vibrationssensor av magnetisk typ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2195417A (en) * 1937-11-10 1940-04-02 Bell Telephone Labor Inc Vibrating piezoelectric relay
US3437850A (en) * 1963-08-19 1969-04-08 Baldwin Co D H Composite tuning fork filters
DE2009379C3 (de) * 1970-02-27 1975-01-30 Gebrueder Junghans Gmbh, 7230 Schramberg Piezoelektrischer Oszillator in Form einer Stimmgabel als Zeitnormal für zeithaltende Geräte
US3683213A (en) 1971-03-09 1972-08-08 Statek Corp Microresonator of tuning fork configuration
JPS5239391A (en) * 1975-09-25 1977-03-26 Citizen Watch Co Ltd Composite vibrator for watches
JPS5379486A (en) * 1976-12-24 1978-07-13 Seiko Epson Corp Tuning-fork-shaped crystal vibrator
JPS5437488A (en) 1977-07-20 1979-03-19 Seiko Epson Corp Tuning fork type crystal oscillator
DE2748501C3 (de) * 1977-10-28 1985-05-30 Born, Eberhard, Dr. Verfahren und Vorrichtung zur Erstellung von Texturtopogrammen
JPS5521679A (en) * 1978-08-04 1980-02-15 Seiko Epson Corp Crystal oscillator of composite mode h type
FR2464595A1 (fr) 1979-08-31 1981-03-06 Ebauches Sa Procede de detection d'asymetrie de resonateurs a cristal piezoelectrique en forme de diapason et resonateurs pour sa mise en oeuvre
JPS5694813A (en) * 1979-12-27 1981-07-31 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
US4724351A (en) * 1983-04-01 1988-02-09 Quartex, Inc. Double resonating beam force transducer with reduced longitudinal pumping
US5396144A (en) * 1993-08-02 1995-03-07 New S.D., Inc. Rotation rate sensor with center mounted tuning fork
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
IL112770A0 (en) * 1995-02-23 1996-06-18 Netzer Yishay Coupled resonator vibratory rate sensor
JP3811226B2 (ja) 1996-07-26 2006-08-16 トヨタ自動車株式会社 水晶振動子及びその製造方法
US6262520B1 (en) * 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork

Also Published As

Publication number Publication date
DE60032697T2 (de) 2007-10-04
EP1085654A2 (de) 2001-03-21
JP2001133269A (ja) 2001-05-18
JP4118497B2 (ja) 2008-07-16
US6507141B2 (en) 2003-01-14
EP1085654A3 (de) 2002-02-27
US6262520B1 (en) 2001-07-17
DE1085654T1 (de) 2001-08-23
EP1085654B1 (de) 2007-01-03
US20010054860A1 (en) 2001-12-27

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Representative=s name: V. FUENER EBBINGHAUS FINCK HANO, 81541 MUENCHEN

8364 No opposition during term of opposition