DE10011830B8 - Winkelgeschwindigkeitssensor mit Oszillatoren - Google Patents
Winkelgeschwindigkeitssensor mit Oszillatoren Download PDFInfo
- Publication number
- DE10011830B8 DE10011830B8 DE10011830A DE10011830A DE10011830B8 DE 10011830 B8 DE10011830 B8 DE 10011830B8 DE 10011830 A DE10011830 A DE 10011830A DE 10011830 A DE10011830 A DE 10011830A DE 10011830 B8 DE10011830 B8 DE 10011830B8
- Authority
- DE
- Germany
- Prior art keywords
- oscillators
- angular velocity
- velocity sensor
- sensor
- angular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6694799 | 1999-03-12 | ||
JP11-66947 | 1999-03-12 | ||
JP11-345134 | 1999-12-03 | ||
JP34513499A JP4126833B2 (ja) | 1999-03-12 | 1999-12-03 | 角速度センサ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE10011830A1 DE10011830A1 (de) | 2000-09-14 |
DE10011830B4 DE10011830B4 (de) | 2012-09-20 |
DE10011830B8 true DE10011830B8 (de) | 2013-01-03 |
Family
ID=26408149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10011830A Expired - Fee Related DE10011830B8 (de) | 1999-03-12 | 2000-03-10 | Winkelgeschwindigkeitssensor mit Oszillatoren |
Country Status (3)
Country | Link |
---|---|
US (1) | US6321598B1 (de) |
JP (1) | JP4126833B2 (de) |
DE (1) | DE10011830B8 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100363786B1 (ko) * | 1999-05-13 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
AU2002255563A1 (en) * | 2001-02-20 | 2002-09-04 | Rockwell Automation Technologies, Inc. | Microelectromechanical systems (mems) device including an analog or a digital |
JP2002318244A (ja) * | 2001-04-24 | 2002-10-31 | Denso Corp | 半導体力学量センサとその製造方法 |
US6722197B2 (en) | 2001-06-19 | 2004-04-20 | Honeywell International Inc. | Coupled micromachined structure |
US6877374B2 (en) * | 2002-02-06 | 2005-04-12 | Analog Devices, Inc. | Micromachined gyroscope |
US7089792B2 (en) * | 2002-02-06 | 2006-08-15 | Analod Devices, Inc. | Micromachined apparatus utilizing box suspensions |
US6823733B2 (en) * | 2002-11-04 | 2004-11-30 | Matsushita Electric Industrial Co., Ltd. | Z-axis vibration gyroscope |
JP2005195574A (ja) * | 2003-10-20 | 2005-07-21 | Sony Corp | 角速度検出装置、角速度検出装置による角速度検出方法および角速度検出装置の製造方法 |
WO2005103620A1 (en) | 2004-04-14 | 2005-11-03 | Analog Devices, Inc. | Inertial sensor with a linear array of sensor elements |
JP2006071477A (ja) * | 2004-09-02 | 2006-03-16 | Denso Corp | 角速度センサ |
US7478557B2 (en) | 2004-10-01 | 2009-01-20 | Analog Devices, Inc. | Common centroid micromachine driver |
JP4673314B2 (ja) * | 2004-10-07 | 2011-04-20 | パナソニック株式会社 | 角速度センサユニット及び角速度センサ診断装置 |
JP4239177B2 (ja) * | 2005-04-07 | 2009-03-18 | 株式会社タツノ・メカトロニクス | 計量機の給油量表示器 |
US7421897B2 (en) | 2005-04-14 | 2008-09-09 | Analog Devices, Inc. | Cross-quad and vertically coupled inertial sensors |
US7832271B2 (en) | 2005-05-24 | 2010-11-16 | Japan Aerospace Exploration Agency | Gyroscope |
JP5061524B2 (ja) * | 2006-08-01 | 2012-10-31 | 三菱電機株式会社 | 加速度センサ |
KR100875457B1 (ko) * | 2006-08-31 | 2008-12-22 | (주)에스엠엘전자 | 각속도 센서 구조물 |
JPWO2008032415A1 (ja) * | 2006-09-15 | 2010-01-21 | 株式会社日立製作所 | 角速度センサ |
JP2008139054A (ja) * | 2006-11-30 | 2008-06-19 | Epson Toyocom Corp | 角速度センサ |
FI120921B (fi) * | 2007-06-01 | 2010-04-30 | Vti Technologies Oy | Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi |
JP5105968B2 (ja) * | 2007-06-22 | 2012-12-26 | 株式会社日立製作所 | 角速度検出装置 |
FI122397B (fi) * | 2008-04-16 | 2011-12-30 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
JP5228675B2 (ja) * | 2008-07-29 | 2013-07-03 | 富士通株式会社 | 角速度センサおよび電子装置 |
FR2941533B1 (fr) * | 2009-01-23 | 2011-03-11 | Commissariat Energie Atomique | Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte. |
FR2941525B1 (fr) * | 2009-01-23 | 2011-03-25 | Commissariat Energie Atomique | Gyrometre en technologie de surface, a detection hors plan par jauge de contrainte. |
FR2962532B1 (fr) * | 2010-07-07 | 2013-11-29 | Commissariat Energie Atomique | Capteur inertiel de rotations a disque oscillant |
FR2983574B1 (fr) * | 2011-12-06 | 2014-01-10 | Sagem Defense Securite | Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur |
JP2016057073A (ja) | 2014-09-05 | 2016-04-21 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
JP6481294B2 (ja) | 2014-09-05 | 2019-03-13 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
JP6481293B2 (ja) | 2014-09-05 | 2019-03-13 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
JP7044552B2 (ja) * | 2015-01-20 | 2022-03-30 | キューアペル メディカル, エルエルシー | 可変支持を有する管状構造 |
DE112016002627T5 (de) * | 2015-06-11 | 2018-02-22 | Georgia Tech Research Corporation | MEMS-Trägheitsmessvorrichtung mit geneigten Elektroden zur Abstimmung der Quadratur |
DE102015225182A1 (de) | 2015-12-15 | 2017-06-22 | Robert Bosch Gmbh | Vorrichtung und Verfahren zum Erfassen einer Drehbewegung |
ITUB20159197A1 (it) * | 2015-12-29 | 2017-06-29 | St Microelectronics Srl | Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare |
TWI669267B (zh) * | 2017-04-04 | 2019-08-21 | 日商村田製作所股份有限公司 | 用於角速度的微機械感測器元件 |
JP7225817B2 (ja) * | 2019-01-17 | 2023-02-21 | セイコーエプソン株式会社 | 角速度センサー、慣性計測装置、電子機器および移動体 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5313835A (en) * | 1991-12-19 | 1994-05-24 | Motorola, Inc. | Integrated monolithic gyroscopes/accelerometers with logic circuits |
DE4403646A1 (de) * | 1994-02-05 | 1995-08-10 | Vdo Schindling | Drehgeschwindigkeitssensor |
DE19523895A1 (de) * | 1995-06-30 | 1997-01-02 | Bosch Gmbh Robert | Beschleunigungssensor |
EP0785413A2 (de) * | 1996-01-22 | 1997-07-23 | Murata Manufacturing Co., Ltd. | Drehgeschwindigkeitssensor |
WO1997045699A2 (en) * | 1996-05-31 | 1997-12-04 | The Regents Of The University Of California | Micromachined vibratory rate gyroscope |
WO1998015799A1 (de) * | 1996-10-07 | 1998-04-16 | HAHN-SCHICKARD-GESELLSCHAFT FÜR ANGEWANDTE FORSCHUNG E.V. Wilhelm-Schickard-Strasse 10 | Drehratensensor mit entkoppelten orthogonalen primär- und sekundärschwingungen |
DE19719780A1 (de) * | 1997-05-10 | 1998-11-12 | Bosch Gmbh Robert | Beschleunigungserfassungseinrichtung |
DE19829582C1 (de) * | 1998-07-02 | 2000-03-09 | Daimler Chrysler Ag | Verfahren und Vorrichtung zur Drehratenbestimmung, insbesondere der Gier-Drehrate eines Kraftfahrzeugs |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0341312A (ja) * | 1989-07-07 | 1991-02-21 | Matsushita Electric Ind Co Ltd | 角速度センサ及び角速度検出装置 |
US5377544A (en) | 1991-12-19 | 1995-01-03 | Motorola, Inc. | Rotational vibration gyroscope |
US5359893A (en) | 1991-12-19 | 1994-11-01 | Motorola, Inc. | Multi-axes gyroscope |
US5329815A (en) | 1991-12-19 | 1994-07-19 | Motorola, Inc. | Vibration monolithic gyroscope |
JPH0634375A (ja) | 1992-07-16 | 1994-02-08 | Murata Mfg Co Ltd | 角速度センサ |
US5734105A (en) | 1992-10-13 | 1998-03-31 | Nippondenso Co., Ltd. | Dynamic quantity sensor |
JP3355812B2 (ja) | 1994-10-14 | 2002-12-09 | 株式会社デンソー | 半導体ヨーレートセンサ |
DE4442033C2 (de) | 1994-11-25 | 1997-12-18 | Bosch Gmbh Robert | Drehratensensor |
JPH08159776A (ja) * | 1994-12-08 | 1996-06-21 | Nissan Motor Co Ltd | 角速度センサ |
US5635640A (en) | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
DE19530007C2 (de) * | 1995-08-16 | 1998-11-26 | Bosch Gmbh Robert | Drehratensensor |
JP3039364B2 (ja) * | 1996-03-11 | 2000-05-08 | 株式会社村田製作所 | 角速度センサ |
JPH10170275A (ja) * | 1996-12-13 | 1998-06-26 | Toyota Central Res & Dev Lab Inc | 振動型角速度センサ |
-
1999
- 1999-12-03 JP JP34513499A patent/JP4126833B2/ja not_active Expired - Fee Related
-
2000
- 2000-03-09 US US09/522,076 patent/US6321598B1/en not_active Expired - Lifetime
- 2000-03-10 DE DE10011830A patent/DE10011830B8/de not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5313835A (en) * | 1991-12-19 | 1994-05-24 | Motorola, Inc. | Integrated monolithic gyroscopes/accelerometers with logic circuits |
DE4403646A1 (de) * | 1994-02-05 | 1995-08-10 | Vdo Schindling | Drehgeschwindigkeitssensor |
DE19523895A1 (de) * | 1995-06-30 | 1997-01-02 | Bosch Gmbh Robert | Beschleunigungssensor |
EP0785413A2 (de) * | 1996-01-22 | 1997-07-23 | Murata Manufacturing Co., Ltd. | Drehgeschwindigkeitssensor |
WO1997045699A2 (en) * | 1996-05-31 | 1997-12-04 | The Regents Of The University Of California | Micromachined vibratory rate gyroscope |
WO1998015799A1 (de) * | 1996-10-07 | 1998-04-16 | HAHN-SCHICKARD-GESELLSCHAFT FÜR ANGEWANDTE FORSCHUNG E.V. Wilhelm-Schickard-Strasse 10 | Drehratensensor mit entkoppelten orthogonalen primär- und sekundärschwingungen |
DE19719780A1 (de) * | 1997-05-10 | 1998-11-12 | Bosch Gmbh Robert | Beschleunigungserfassungseinrichtung |
DE19829582C1 (de) * | 1998-07-02 | 2000-03-09 | Daimler Chrysler Ag | Verfahren und Vorrichtung zur Drehratenbestimmung, insbesondere der Gier-Drehrate eines Kraftfahrzeugs |
Also Published As
Publication number | Publication date |
---|---|
US6321598B1 (en) | 2001-11-27 |
DE10011830B4 (de) | 2012-09-20 |
JP4126833B2 (ja) | 2008-07-30 |
JP2000329562A (ja) | 2000-11-30 |
DE10011830A1 (de) | 2000-09-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
R016 | Response to examination communication | ||
R018 | Grant decision by examination section/examining division | ||
R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: G01C0019560000 Ipc: G01C0019571900 |
|
R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: G01C0019560000 Ipc: G01C0019571900 Effective date: 20120511 |
|
R020 | Patent grant now final |
Effective date: 20121221 |
|
R084 | Declaration of willingness to licence | ||
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |