AU2002255563A1 - Microelectromechanical systems (mems) device including an analog or a digital - Google Patents
Microelectromechanical systems (mems) device including an analog or a digitalInfo
- Publication number
- AU2002255563A1 AU2002255563A1 AU2002255563A AU2002255563A AU2002255563A1 AU 2002255563 A1 AU2002255563 A1 AU 2002255563A1 AU 2002255563 A AU2002255563 A AU 2002255563A AU 2002255563 A AU2002255563 A AU 2002255563A AU 2002255563 A1 AU2002255563 A1 AU 2002255563A1
- Authority
- AU
- Australia
- Prior art keywords
- mems
- analog
- digital
- device including
- microelectromechanical systems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
- H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/788,928 US6583374B2 (en) | 2001-02-20 | 2001-02-20 | Microelectromechanical system (MEMS) digital electrical isolator |
US09/788,928 | 2001-02-20 | ||
US09/804,817 US6798312B1 (en) | 1999-09-21 | 2001-03-13 | Microelectromechanical system (MEMS) analog electrical isolator |
US09/805,410 | 2001-03-13 | ||
US09/805,410 US6617750B2 (en) | 1999-09-21 | 2001-03-13 | Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise |
US09/804,817 | 2001-03-13 | ||
US10/001,412 | 2001-10-25 | ||
US10/001,412 US6803755B2 (en) | 1999-09-21 | 2001-10-25 | Microelectromechanical system (MEMS) with improved beam suspension |
PCT/US2002/004824 WO2002067293A2 (en) | 2001-02-20 | 2002-02-20 | Microelectromechanical systems (mems) device including an analog or a digital |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002255563A1 true AU2002255563A1 (en) | 2002-09-04 |
Family
ID=27485089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002255563A Abandoned AU2002255563A1 (en) | 2001-02-20 | 2002-02-20 | Microelectromechanical systems (mems) device including an analog or a digital |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1386347A4 (en) |
JP (1) | JP4464607B2 (en) |
AU (1) | AU2002255563A1 (en) |
WO (1) | WO2002067293A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6690178B2 (en) * | 2001-10-26 | 2004-02-10 | Rockwell Automation Technologies, Inc. | On-board microelectromechanical system (MEMS) sensing device for power semiconductors |
JP4643192B2 (en) * | 2004-07-16 | 2011-03-02 | アオイ電子株式会社 | Gripper |
US7205867B2 (en) * | 2005-05-19 | 2007-04-17 | Robert Bosch Gmbh | Microelectromechanical resonator structure, and method of designing, operating and using same |
US7227432B2 (en) * | 2005-06-30 | 2007-06-05 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
US5359893A (en) * | 1991-12-19 | 1994-11-01 | Motorola, Inc. | Multi-axes gyroscope |
US5536988A (en) * | 1993-06-01 | 1996-07-16 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5739686A (en) * | 1996-04-30 | 1998-04-14 | Naughton; Michael J. | Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection |
US5959516A (en) * | 1998-01-08 | 1999-09-28 | Rockwell Science Center, Llc | Tunable-trimmable micro electro mechanical system (MEMS) capacitor |
KR100252009B1 (en) * | 1997-09-25 | 2000-04-15 | 윤종용 | Micro structure for oscillation and method of controlling resonant frequency and the same and microactuator and micro gyroscope using the same |
US6060336A (en) * | 1998-12-11 | 2000-05-09 | C.F. Wan Incorporated | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
JP4126833B2 (en) * | 1999-03-12 | 2008-07-30 | 株式会社デンソー | Angular velocity sensor device |
US6094102A (en) * | 1999-04-30 | 2000-07-25 | Rockwell Science Center, Llc | Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method |
US6307169B1 (en) * | 2000-02-01 | 2001-10-23 | Motorola Inc. | Micro-electromechanical switch |
US6384353B1 (en) * | 2000-02-01 | 2002-05-07 | Motorola, Inc. | Micro-electromechanical system device |
-
2002
- 2002-02-20 EP EP02724965A patent/EP1386347A4/en not_active Withdrawn
- 2002-02-20 AU AU2002255563A patent/AU2002255563A1/en not_active Abandoned
- 2002-02-20 WO PCT/US2002/004824 patent/WO2002067293A2/en active Application Filing
- 2002-02-20 JP JP2002566525A patent/JP4464607B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1386347A4 (en) | 2005-05-25 |
JP2005503267A (en) | 2005-02-03 |
EP1386347A2 (en) | 2004-02-04 |
WO2002067293A2 (en) | 2002-08-29 |
WO2002067293A3 (en) | 2003-11-27 |
JP4464607B2 (en) | 2010-05-19 |
WO2002067293A9 (en) | 2004-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |