AU2002255563A1 - Microelectromechanical systems (mems) device including an analog or a digital - Google Patents

Microelectromechanical systems (mems) device including an analog or a digital

Info

Publication number
AU2002255563A1
AU2002255563A1 AU2002255563A AU2002255563A AU2002255563A1 AU 2002255563 A1 AU2002255563 A1 AU 2002255563A1 AU 2002255563 A AU2002255563 A AU 2002255563A AU 2002255563 A AU2002255563 A AU 2002255563A AU 2002255563 A1 AU2002255563 A1 AU 2002255563A1
Authority
AU
Australia
Prior art keywords
mems
analog
digital
device including
microelectromechanical systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002255563A
Inventor
Jeffrey R. Annis
Ernst H. Dummermuth
Richard D. Harris
Patrick C. Herbert
Michael J. Knieser
Robert J. Kretschmann
Henric Larsson
Winfred L. Morris
Jun J. Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/788,928 external-priority patent/US6583374B2/en
Priority claimed from US09/804,817 external-priority patent/US6798312B1/en
Priority claimed from US09/805,410 external-priority patent/US6617750B2/en
Priority claimed from US10/001,412 external-priority patent/US6803755B2/en
Application filed by Rockwell Automation Technologies Inc filed Critical Rockwell Automation Technologies Inc
Publication of AU2002255563A1 publication Critical patent/AU2002255563A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
AU2002255563A 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital Abandoned AU2002255563A1 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US09/788,928 US6583374B2 (en) 2001-02-20 2001-02-20 Microelectromechanical system (MEMS) digital electrical isolator
US09/788,928 2001-02-20
US09/804,817 US6798312B1 (en) 1999-09-21 2001-03-13 Microelectromechanical system (MEMS) analog electrical isolator
US09/805,410 2001-03-13
US09/805,410 US6617750B2 (en) 1999-09-21 2001-03-13 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US09/804,817 2001-03-13
US10/001,412 2001-10-25
US10/001,412 US6803755B2 (en) 1999-09-21 2001-10-25 Microelectromechanical system (MEMS) with improved beam suspension
PCT/US2002/004824 WO2002067293A2 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital

Publications (1)

Publication Number Publication Date
AU2002255563A1 true AU2002255563A1 (en) 2002-09-04

Family

ID=27485089

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002255563A Abandoned AU2002255563A1 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital

Country Status (4)

Country Link
EP (1) EP1386347A4 (en)
JP (1) JP4464607B2 (en)
AU (1) AU2002255563A1 (en)
WO (1) WO2002067293A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690178B2 (en) * 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
JP4643192B2 (en) * 2004-07-16 2011-03-02 アオイ電子株式会社 Gripper
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
KR100252009B1 (en) * 1997-09-25 2000-04-15 윤종용 Micro structure for oscillation and method of controlling resonant frequency and the same and microactuator and micro gyroscope using the same
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
JP4126833B2 (en) * 1999-03-12 2008-07-30 株式会社デンソー Angular velocity sensor device
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device

Also Published As

Publication number Publication date
EP1386347A4 (en) 2005-05-25
JP2005503267A (en) 2005-02-03
EP1386347A2 (en) 2004-02-04
WO2002067293A2 (en) 2002-08-29
WO2002067293A3 (en) 2003-11-27
JP4464607B2 (en) 2010-05-19
WO2002067293A9 (en) 2004-04-01

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase