AU2002361556A1 - Anchors for micro-electro-mechanical systems (mems) devices - Google Patents

Anchors for micro-electro-mechanical systems (mems) devices

Info

Publication number
AU2002361556A1
AU2002361556A1 AU2002361556A AU2002361556A AU2002361556A1 AU 2002361556 A1 AU2002361556 A1 AU 2002361556A1 AU 2002361556 A AU2002361556 A AU 2002361556A AU 2002361556 A AU2002361556 A AU 2002361556A AU 2002361556 A1 AU2002361556 A1 AU 2002361556A1
Authority
AU
Australia
Prior art keywords
anchors
mems
electro
micro
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002361556A
Inventor
Eric M. Prophet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Superconductor Technologies Inc
Original Assignee
Superconductor Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Superconductor Technologies Inc filed Critical Superconductor Technologies Inc
Publication of AU2002361556A1 publication Critical patent/AU2002361556A1/en
Abandoned legal-status Critical Current

Links

AU2002361556A 2001-10-04 2002-08-29 Anchors for micro-electro-mechanical systems (mems) devices Abandoned AU2002361556A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/972,033 2001-10-04

Publications (1)

Publication Number Publication Date
AU2002361556A1 true AU2002361556A1 (en) 2003-05-26

Family

ID=

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