AU2001287936A1 - Micro electro-mechanical systems - Google Patents

Micro electro-mechanical systems

Info

Publication number
AU2001287936A1
AU2001287936A1 AU2001287936A AU8793601A AU2001287936A1 AU 2001287936 A1 AU2001287936 A1 AU 2001287936A1 AU 2001287936 A AU2001287936 A AU 2001287936A AU 8793601 A AU8793601 A AU 8793601A AU 2001287936 A1 AU2001287936 A1 AU 2001287936A1
Authority
AU
Australia
Prior art keywords
mechanical systems
micro electro
electro
micro
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001287936A
Inventor
Crofton John Brierley
Anthony Patrick Needham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Bookham Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology PLC filed Critical Bookham Technology PLC
Publication of AU2001287936A1 publication Critical patent/AU2001287936A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
AU2001287936A 2000-09-25 2001-09-25 Micro electro-mechanical systems Abandoned AU2001287936A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0023477 2000-09-25
GB0023477A GB2371119A (en) 2000-09-25 2000-09-25 Micro electro-mechanical systems
PCT/GB2001/004271 WO2002024570A1 (en) 2000-09-25 2001-09-25 Micro electro-mechanical systems

Publications (1)

Publication Number Publication Date
AU2001287936A1 true AU2001287936A1 (en) 2002-04-02

Family

ID=9900084

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001287936A Abandoned AU2001287936A1 (en) 2000-09-25 2001-09-25 Micro electro-mechanical systems

Country Status (3)

Country Link
AU (1) AU2001287936A1 (en)
GB (1) GB2371119A (en)
WO (1) WO2002024570A1 (en)

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US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
KR20040103977A (en) * 2002-04-17 2004-12-09 (주)엠투엔 Micro piezoelectric actuator and method for fabricating same
US7781850B2 (en) * 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7710632B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
JP5048939B2 (en) 2005-11-01 2012-10-17 オリンパス株式会社 Etalon device and its assembly adjustment method
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
FR2900400B1 (en) * 2006-04-28 2008-11-07 Tronic S Microsystems Sa COLLECTIVE PROCESS FOR MANUFACTURING MEMBRANES AND CAVITIES OF LOW VOLUME AND HIGH PRECISION
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
EP2366943B1 (en) 2006-10-06 2013-04-17 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus of a display
US8872085B2 (en) 2006-10-06 2014-10-28 Qualcomm Mems Technologies, Inc. Display device having front illuminator with turning features
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
NO336140B1 (en) 2009-09-18 2015-05-26 Sintef Micro optical device actuator
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
EP2590890A1 (en) 2010-07-05 2013-05-15 Aron Michael Piezo-electric based micro-electro-mechanical lens actuation system
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
WO2013133767A1 (en) * 2012-03-07 2013-09-12 National University Of Singapore A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof
CN102928977B (en) * 2012-10-24 2015-08-12 无锡微奥科技有限公司 A kind of method for making of MEMS micro mirror bistable structure and photoswitch
JP6496973B2 (en) * 2013-08-07 2019-04-10 セイコーエプソン株式会社 Optical filters, optical modules, electronic equipment
US10488256B2 (en) 2017-05-26 2019-11-26 California Institute Of Technology Spectral filter having controllable spectral bandwidth and resolution
US11287322B2 (en) 2019-02-06 2022-03-29 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
CN109883602B (en) * 2019-03-13 2020-11-06 中国电子科技集团公司第四十九研究所 Self-compensating silicon micro-resonant pressure sensitive chip based on SOI
WO2021092579A1 (en) 2019-11-08 2021-05-14 California Institute Of Technology Infrared spectrometer having dielectric-polymer-based spectral filter
US11788887B2 (en) * 2020-03-27 2023-10-17 Nanohmics, Inc. Tunable notch filter

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Publication number Priority date Publication date Assignee Title
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5484073A (en) * 1994-03-28 1996-01-16 I/O Sensors, Inc. Method for fabricating suspension members for micromachined sensors
DE19757197A1 (en) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
US5914804A (en) * 1998-01-28 1999-06-22 Lucent Technologies Inc Double-cavity micromechanical optical modulator with plural multilayer mirrors
KR100703140B1 (en) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interferometric modulation and its manufacturing method
US6014240A (en) * 1998-12-01 2000-01-11 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
US6836366B1 (en) * 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same

Also Published As

Publication number Publication date
WO2002024570A1 (en) 2002-03-28
GB2371119A (en) 2002-07-17
GB0023477D0 (en) 2000-11-08

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